Variable size and shape distribution of ferroelectric nanoislands by chemical mechanical polishing.
Clemens
Sven
S
Institut für Werkstoffe der Elektrotechnik II, Rheinisch-Westfälische Technische Hochschule, 52056 Aachen, Germany.
Röhrig
Serge
S
Rüdiger
Andreas
A
Schneller
Theodor
T
Waser
Rainer
R
D003460:Crystallization / Q000379:methods*; D004595:Electroplating / Q000379:methods*; D007854:Lead / Q000737:chemistry*; D046911:Macromolecular Substances / Q000737:chemistry; D008280:Magnetics; D008422:Materials Testing; D019563:Mechanics; D008968:Molecular Conformation; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D036103:Nanotechnology / Q000379:methods*; D010316:Particle Size; D013499:Surface Properties; D014025:Titanium / Q000737:chemistry*
D046911:Macromolecular Substances; C481719:lead titanate; D007854:Lead; D014025:Titanium