title: Variable size and shape distribution of ferroelectric nanoislands by chemical mechanical polishing.
authors.affiliation: Institut für Werkstoffe der Elektrotechnik II, Rheinisch-Westfälische Technische Hochschule, 52056 Aachen, Germany.
authors.forename: Sven
authors.initials: S
authors.lastname: Clemens
authors.forename: Serge
authors.initials: S
authors.lastname: Röhrig
authors.forename: Andreas
authors.initials: A
authors.lastname: Rüdiger
authors.forename: Theodor
authors.initials: T
authors.lastname: Schneller
authors.forename: Rainer
authors.initials: R
authors.lastname: Waser
mesh_terms: D003460:Crystallization / Q000379:methods*; D004595:Electroplating / Q000379:methods*; D007854:Lead / Q000737:chemistry*; D046911:Macromolecular Substances / Q000737:chemistry; D008280:Magnetics; D008422:Materials Testing; D019563:Mechanics; D008968:Molecular Conformation; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D036103:Nanotechnology / Q000379:methods*; D010316:Particle Size; D013499:Surface Properties; D014025:Titanium / Q000737:chemistry*
chemical_list: D046911:Macromolecular Substances; C481719:lead titanate; D007854:Lead; D014025:Titanium