Guided growth of large-scale, horizontally aligned arrays of single-walled carbon nanotubes and their use in thin-film transistors.
A convenient process for generating large-scale, horizontally aligned arrays of pristine, single-walled carbon nanotubes (SWNTs) is described. The approach uses guided growth, by chemical vapor deposition (CVD), of SWNTs on miscut single-crystal quartz substrates. Studies of the growth reveal important relationships between the density and alignment of the tubes, the CVD conditions, and the morphology of the quartz. Electrodes and dielectrics patterned on top of these arrays yield thin-film transistors that use the SWNTs as effective thin-film semiconductors. The ability to build high-performance devices of this type suggests significant promise for large-scale aligned arrays of SWNTs in electronics, sensors, and other applications.
Kocabas
Coskun
C
Department of Physics, University of Illinois at Urbana/Champaign, USA.
Hur
Seung-Hyun
SH
Gaur
Anshu
A
Meitl
Matthew A
MA
Shim
Moonsub
M
Rogers
John A
JA
D016880:Anisotropy; D003460:Crystallization; D004563:Electrochemistry; D004583:Electrons; D018625:Microscopy, Atomic Force; D018613:Microscopy, Confocal; D036103:Nanotechnology / Q000295:instrumentation* / Q000379:methods*; D037742:Nanotubes, Carbon / Q000737:chemistry*; D012666:Semiconductors; D012825:Silicon / Q000737:chemistry; D012822:Silicon Dioxide / Q000737:chemistry; D013059:Spectrum Analysis, Raman; D013696:Temperature; D014173:Transistors, Electronic
D037742:Nanotubes, Carbon; D012822:Silicon Dioxide; D012825:Silicon