Evanescent imaging with induced polarization by using a solid immersion lens.
Image contrast enhancement, high lateral resolution, and height information are obtained with induced polarization evanescent imaging using a solid immersion lens. Experiments are conducted by imaging features on a patterned Si substrate. Imaging theory is used to predict optimum orientation of high-spatial-frequency samples, and a topographical image is derived from the induced polarization image through a calibration procedure. A numerical aperture of 1.5 is used in the experiment. Height accuracy of +/-2 nm is demonstrated with a known sample.
Chen
Tao
T
College of Optical Sciences, University of Arizona, Tucson 85721, USA.
Milster
Tom D
TD
Yang
Seung-Hune
SH
Hansen
Delbert
D