Polarization modulation imaging ellipsometer.
The polarization modulation technique was successfully combined with parallel synchronous detection using a switching light source and a CCD camera to realize full-frame measurement of ellipsometric parameters. The detected thickness of a monolayer film of n-octadecylsiloxane agreed well with theoretical and reported experimental values. The thickness resolution for imaging and the temporal noise in parallel thickness measurements were smaller than +/-0.1 nm and smaller than +/-0.02 nm, respectively.
Otsuki
Soichi
S
Health Technology Research Center., National Institute of Advanced Industrial Science and Technology, Kagawa, Japan. otsuki-s@aist.go.jp
Ishikawa
Mitsuru
M
D055592:Biophysical Phenomena; D001703:Biophysics; D004867:Equipment Design; D008027:Light; D018715:Microscopy, Video; D015233:Models, Statistical; D055095:Optics and Photonics; D012029:Refraction, Ocular; D012031:Refractometry; D013499:Surface Properties; D013672:Technology; D013997:Time Factors; D014466:Ultraviolet Rays