title: Evanescent imaging with induced polarization by using a solid immersion lens.
abstract: Image contrast enhancement, high lateral resolution, and height information are obtained with induced polarization evanescent imaging using a solid immersion lens. Experiments are conducted by imaging features on a patterned Si substrate. Imaging theory is used to predict optimum orientation of high-spatial-frequency samples, and a topographical image is derived from the induced polarization image through a calibration procedure. A numerical aperture of 1.5 is used in the experiment. Height accuracy of +/-2 nm is demonstrated with a known sample.
authors.affiliation: College of Optical Sciences, University of Arizona, Tucson 85721, USA.
authors.forename: Tao
authors.initials: T
authors.lastname: Chen
authors.forename: Tom D
authors.initials: TD
authors.lastname: Milster
authors.forename: Seung-Hune
authors.initials: SH
authors.lastname: Yang
authors.forename: Delbert
authors.initials: D
authors.lastname: Hansen