title: Comparative measurements of piezoelectric coefficient of PZT films by Berlincourt, interferometer, and vibrometer methods.
abstract: Chemical solution deposition (CSD) techniques were used to prepare lead zirconate (Zr) titanate (Ti) (PZT) thin films with Zr/Ti ratios of 30/70 and 52/48. Usually CSD processing is restricted to making crack-free, single-layer films of 70-nm thick, but modifications to the sol-gel process have permitted the fabrication of dense, crack-free, single layers up to 200 to 300 nm thick, which can be built-up into layers up to 3-microm thick. Thicker PZT films (> 2-microm single layer) can be produced by using a composite sol-gel/ceramic process. Knowledge of the electroactive properties of these materials is essential for modeling and design of novel micro-electromechanical systems (MEMS) devices, but accurate measurement of these properties is by no means straightforward. A novel, double-beam, common-path laser interferometer has been developed to measure the longitudinal (d33) piezoelectric coefficient in films; the results were compared with the values obtained by Berlin-court and laser scanning vibrometer methods. It was found that, for thin-film samples, the d(33,f) values obtained from the Berlincourt method are usually larger: than those obtained from the interferometer and the vibrometer methods; the reasons for this are discussed.
authors.affiliation: Department of Materials, Cranfield University, Bedfordshire, MK43 OAL, UK. z.huang@cranfield.ac.uk
authors.forename: Zhaorong
authors.initials: Z
authors.lastname: Huang
authors.forename: Qi
authors.initials: Q
authors.lastname: Zhang
authors.forename: Silvana
authors.initials: S
authors.lastname: Corkovic
authors.forename: Robert
authors.initials: R
authors.lastname: Dorey
authors.forename: Roger W
authors.initials: RW
authors.lastname: Whatmore
mesh_terms: D017097:Electric Impedance; D004563:Electrochemistry / Q000379:methods*; D004574:Electromagnetic Fields; D007368:Interferometry / Q000379:methods*; D008422:Materials Testing / Q000379:methods*; D008567:Membranes, Artificial; D049329:Nanostructures / Q000737:chemistry* / Q000528:radiation effects / Q000648:ultrastructure*; D010316:Particle Size; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D013314:Stress, Mechanical; D014732:Vibration
chemical_list: D008567:Membranes, Artificial