title: Carbon nanotubes for microelectronics?
abstract: Despite all prophecies of its end, silicon-based microelectronics still follows Moore's Law and continues to develop rapidly. However, the inherent physical limits will eventually be reached. Carbon nanotubes offer the potential for further miniaturization as long as it is possible to selectively deposit them with defined properties.
authors.affiliation: Infineon Technologies AG, Corporate Research, Otto-Hahn-Ring 6, 81739 Munich, Germany. Andrew.Graham@infineon.com
authors.forename: Andrew P
authors.initials: AP
authors.lastname: Graham
authors.forename: Georg S
authors.initials: GS
authors.lastname: Duesberg
authors.forename: Robert V
authors.initials: RV
authors.lastname: Seidel
authors.forename: Maik
authors.initials: M
authors.lastname: Liebau
authors.forename: Eugen
authors.initials: E
authors.lastname: Unger
authors.forename: Werner
authors.initials: W
authors.lastname: Pamler
authors.forename: Franz
authors.initials: F
authors.lastname: Kreupl
authors.forename: Wolfgang
authors.initials: W
authors.lastname: Hoenlein
mesh_terms: D004058:Diffusion; D004559:Electric Wiring; D004563:Electrochemistry; D006108:Graphite; D046911:Macromolecular Substances; D008422:Materials Testing; D008956:Models, Chemical; D036103:Nanotechnology / Q000295:instrumentation* / Q000379:methods; D037742:Nanotubes, Carbon / Q000737:chemistry*; D012825:Silicon; D013499:Surface Properties
chemical_list: D046911:Macromolecular Substances; D037742:Nanotubes, Carbon; D006108:Graphite; D012825:Silicon