Ultrathin fullerene films as high-resolution molecular resists for low-voltage electron-beam lithography.
Gibbons
Francis P
FP
Nanoscale Physics Research Laboratory, School of Physics and Astronomy, The University of Birmingham, Edgbaston, Birmingham B15 2TT, UK. francis@nprl.ph.bham.ac.uk
Robinson
Alex P G
AP
Palmer
Richard E
RE
Manickam
Mayanditheuar
M
Preece
Jon A
JA
D004581:Electronics; D037741:Fullerenes
D037741:Fullerenes