The fabrication and application of Zernike electrostatic phase plate.
The Zernike electrostatic phase plate (ZEPP) consisting of three ring electrodes and two insulating rings has been fabricated using Micro Electro-Mechanical System processes. The electrostatic field produced in the phase plate was measured by electrostatic force microscopy. The electrostatic field and focal length of the phase plate is calculated using electron optics principles. The comparison of the experimental electrostatic field and the theoretical calculated is discussed. Finally, we report the application of ZEPP to enhance contrast of the SiON(x)/SiO(2) interface in an NMOS semiconductor device. The quantitative analysis of the contrast enhancement versus the applied bias is discussed in detail.
Huang
Sen-Hui
SH
Department of Engineering and System Science, Center for Electron Microscopy, National Tsing-Hua University HsinChu 30043, Republic of China. d9511815@oz.nthu.edu.tw
Wang
Wan-Jhih
WJ
Chang
Chia-Seng
CS
Hwu
Yeu-Kuang
YK
Tseng
Fan-Gang
FG
Kai
Ji-Jung
JJ
Chen
Fu-Rong
FR