title: An off-axis magnetron-sputtering system for in situ studies of artificial superlattices growth by synchrotron radiation scattering.
abstract: A sputtering chamber for the growth of artificial superlattices of oxide-based materials is described. The chamber is designed to fit into a standard Huber eight-circle diffractometer. The chamber serves for investigation with synchrotron radiation of growth characteristics of oxide-based artificial superlattices in situ. Two Be windows of large area in the vacuum chamber enable measurement of reflections of X-rays at entrance and exit angles up to approximately 50 degrees . Large perpendicular momentum transfers are practical with this apparatus. The possibility of investigating X-ray scattering in situ is demonstrated by observation of the effects of the modulation length and the stacking period on the growth characteristics of BaTiO(3)/LaNiO(3) artificial superlattices.
authors.affiliation: Department of Mechanical Engineering, Chienkuo Technology University, Changhua 50094, Taiwan.
authors.forename: Yuan Chang
authors.initials: YC
authors.lastname: Liang
authors.forename: Hsin Yi
authors.initials: HY
authors.lastname: Lee
authors.forename: Heng Jui
authors.initials: HJ
authors.lastname: Liu
authors.forename: Yung Wei
authors.initials: YW
authors.lastname: Hsieh
authors.forename: Yung Ching
authors.initials: YC
authors.lastname: Liang
mesh_terms: D003460:Crystallization / Q000379:methods*; D003461:Crystallography / Q000379:methods*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008280:Magnetics / Q000295:instrumentation*; D008968:Molecular Conformation; D010087:Oxides / Q000737:chemistry*; D053838:Scattering, Small Angle; D017356:Synchrotrons / Q000295:instrumentation*
chemical_list: D010087:Oxides