An off-axis magnetron-sputtering system for in situ studies of artificial superlattices growth by synchrotron radiation scattering.
A sputtering chamber for the growth of artificial superlattices of oxide-based materials is described. The chamber is designed to fit into a standard Huber eight-circle diffractometer. The chamber serves for investigation with synchrotron radiation of growth characteristics of oxide-based artificial superlattices in situ. Two Be windows of large area in the vacuum chamber enable measurement of reflections of X-rays at entrance and exit angles up to approximately 50 degrees . Large perpendicular momentum transfers are practical with this apparatus. The possibility of investigating X-ray scattering in situ is demonstrated by observation of the effects of the modulation length and the stacking period on the growth characteristics of BaTiO(3)/LaNiO(3) artificial superlattices.
Liang
Yuan Chang
YC
Department of Mechanical Engineering, Chienkuo Technology University, Changhua 50094, Taiwan.
Lee
Hsin Yi
HY
Liu
Heng Jui
HJ
Hsieh
Yung Wei
YW
Liang
Yung Ching
YC
D003460:Crystallization / Q000379:methods*; D003461:Crystallography / Q000379:methods*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008280:Magnetics / Q000295:instrumentation*; D008968:Molecular Conformation; D010087:Oxides / Q000737:chemistry*; D053838:Scattering, Small Angle; D017356:Synchrotrons / Q000295:instrumentation*
D010087:Oxides