title: Automated three-dimensional X-ray analysis using a dual-beam FIB.
abstract: We present a fully automated method for three-dimensional (3D) elemental analysis demonstrated using a ceramic sample of chemistry (Ca)MgTiO(x). The specimen is serially sectioned by a focused ion beam (FIB) microscope, and energy-dispersive X-ray spectrometry (EDXS) is used for elemental analysis of each cross-section created. A 3D elemental model is reconstructed from the stack of two-dimensional (2D) data. This work concentrates on issues arising from process automation, the large sample volume of approximately 17 x 17 x 10 microm(3), and the insulating nature of the specimen. A new routine for post-acquisition data correction of different drift effects is demonstrated. Furthermore, it is shown that EDXS data may be erroneous for specimens containing voids, and that back-scattered electron images have to be used to correct for these errors.
authors.affiliation: Research Institute for Electron Microscopy, Graz University of Technology, Steyrergasse 17, A-8010 Graz, Austria.
authors.forename: Miroslava
authors.initials: M
authors.lastname: Schaffer
authors.forename: Julian
authors.initials: J
authors.lastname: Wagner
authors.forename: Bernhard
authors.initials: B
authors.lastname: Schaffer
authors.forename: Mario
authors.initials: M
authors.lastname: Schmied
authors.forename: Hans
authors.initials: H
authors.lastname: Mulders