Fabrication of nano- and micro-scale UV imprint stamp using diamond-like carbon coating technology.
Two-dimensional (2-D) and three-dimensional (3-D) diamond-like carbon (DLC) stamps for ultraviolet nanoimprint lithography were fabricated with two methods: namely, a DLC coating process, followed by focused ion beam lithography; and two-photon polymerization patterning, followed by nanoscale-thick DLC coating. We used focused ion beam lithography to fabricate 70 nm deep lines with a width of 100 nm, as well as 70 nm deep lines with a width of 150 nm, on 100 nm thick DLC layers coated on quartz substrates. We also used two-photon polymerization patterning and a DLC coating process to successfully fabricate 200 nm wide lines, as well as 3-D rings with a diameter of 1.35 microm and a height of 1.97 microm, and a 3-D cone with a bottom diameter of 2.88 microm and a height of 1.97 microm. The wafers were successfully printed on an UV-NIL using the DLC stamps without an anti-adhesive layer. The correlation between the dimensions of the stamp's features and the corresponding imprinted features was excellent.
Lee
Eung-Sug
ES
Nano-Mechanical Systems Research Center Korea Institute of Machinery and Materials, Daejeon, Korea.
Jeong
Jun-Ho
JH
Kim
Ki-Don
KD
Sim
Young-Suk
YS
Choi
Dae-Geun
DG
Choi
Junhyuk
J
Park
Sang-Hu
SH
Lim
Tae-Woo
TW
Yang
Dong-Yol
DY
Cha
Nam-Goo
NG
Park
Jin-Goo
JG
Lee
Wi-Ro
WR
D001672:Biocompatible Materials; D002244:Carbon / Q000737:chemistry*; D018130:Diamond; D004867:Equipment Design; D007477:Ions; D008422:Materials Testing; D008855:Microscopy, Electron, Scanning; D036103:Nanotechnology / Q000295:instrumentation* / Q000379:methods*; D017785:Photons; D011108:Polymers / Q000737:chemistry; D000267:Tissue Adhesions; D014466:Ultraviolet Rays
D001672:Biocompatible Materials; D007477:Ions; D011108:Polymers; D002244:Carbon; D018130:Diamond