A class of low voltage, elastomer-metal 'wet' actuators for use in high-density microfluidics.
We report a class of 'wet' MEMS elastomer-metal electrostatic actuators which can actuate in air, oil or water environments with no external fluidic connections, has actuation voltages lower than 15 V and is compatible with widespread PDMS microfluidics.
Bansal
Tushar
T
Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI, USA. tbansal@umich.edu
Chang
Meng-Ping
MP
Maharbiz
Michel M
MM
D001709:Biotechnology / Q000379:methods; D004129:Dimethylpolysiloxanes; D020724:Elastomers / Q000737:chemistry*; D004867:Equipment Design; D008670:Metals; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation*; D044085:Microfluidics; D008856:Microscopy, Fluorescence; D008863:Microspheres; D015233:Models, Statistical; D011108:Polymers / Q000737:chemistry; D055672:Static Electricity
D004129:Dimethylpolysiloxanes; D020724:Elastomers; D008670:Metals; D011108:Polymers