title: Fabrication of nano- and micro-scale UV imprint stamp using diamond-like carbon coating technology.
abstract: Two-dimensional (2-D) and three-dimensional (3-D) diamond-like carbon (DLC) stamps for ultraviolet nanoimprint lithography were fabricated with two methods: namely, a DLC coating process, followed by focused ion beam lithography; and two-photon polymerization patterning, followed by nanoscale-thick DLC coating. We used focused ion beam lithography to fabricate 70 nm deep lines with a width of 100 nm, as well as 70 nm deep lines with a width of 150 nm, on 100 nm thick DLC layers coated on quartz substrates. We also used two-photon polymerization patterning and a DLC coating process to successfully fabricate 200 nm wide lines, as well as 3-D rings with a diameter of 1.35 microm and a height of 1.97 microm, and a 3-D cone with a bottom diameter of 2.88 microm and a height of 1.97 microm. The wafers were successfully printed on an UV-NIL using the DLC stamps without an anti-adhesive layer. The correlation between the dimensions of the stamp's features and the corresponding imprinted features was excellent.
authors.affiliation: Nano-Mechanical Systems Research Center Korea Institute of Machinery and Materials, Daejeon, Korea.
authors.forename: Eung-Sug
authors.initials: ES
authors.lastname: Lee
authors.forename: Jun-Ho
authors.initials: JH
authors.lastname: Jeong
authors.forename: Ki-Don
authors.initials: KD
authors.lastname: Kim
authors.forename: Young-Suk
authors.initials: YS
authors.lastname: Sim
authors.forename: Dae-Geun
authors.initials: DG
authors.lastname: Choi
authors.forename: Junhyuk
authors.initials: J
authors.lastname: Choi
authors.forename: Sang-Hu
authors.initials: SH
authors.lastname: Park
authors.forename: Tae-Woo
authors.initials: TW
authors.lastname: Lim
authors.forename: Dong-Yol
authors.initials: DY
authors.lastname: Yang
authors.forename: Nam-Goo
authors.initials: NG
authors.lastname: Cha
authors.forename: Jin-Goo
authors.initials: JG
authors.lastname: Park
authors.forename: Wi-Ro
authors.initials: WR
authors.lastname: Lee
mesh_terms: D001672:Biocompatible Materials; D002244:Carbon / Q000737:chemistry*; D018130:Diamond; D004867:Equipment Design; D007477:Ions; D008422:Materials Testing; D008855:Microscopy, Electron, Scanning; D036103:Nanotechnology / Q000295:instrumentation* / Q000379:methods*; D017785:Photons; D011108:Polymers / Q000737:chemistry; D000267:Tissue Adhesions; D014466:Ultraviolet Rays
chemical_list: D001672:Biocompatible Materials; D007477:Ions; D011108:Polymers; D002244:Carbon; D018130:Diamond