Synthesis and electrical properties of (Bi(1/2)Na(1/2))TiO3 (BNT) ferroelectric thin films by liquid sprayed mist chemical vapor deposition technique.
This study aims to synthesize lead-free ferroelectric material, (Bi(1/2)Na(1/2))TiO3 using the Liquid Sprayed Mist Chemical Vapor Deposition (LSMCVD) technique. The mist of precursor solution was vaporized and deposited on two different substrates of Si(100) and (111)Pt/TiO2/SiO2/Si(100) in an oxygen atmosphere. The deposition temperature and time were varied in the range of 400-600 degrees C and 30-90 min. (Bi(1/2)Na(1/2))TiO3 thin film had preferred orientations of (110). The thickness of the thin film deposited was 35-162 nm. The remnant polarization (2Pr) and the dielectric constant were 4.6-16.8 microC/cm2, 325-350, respectively.
Kim
Bok-Hee
BH
Department of New Materials Engineering, Research Center of Advanced Materials Development, Chonbuk National University, 1-664-14 Dukjin-dong, Dukjin-gu, Chonju, Chonbuk 561-756, South Korea.
Kim
Sang-Hee
SH
Kim
Jong-Hwan
JH
Lee
Kun-Jae
KJ
Choa
Yong-Ho
YH
Choi
Youn-Kyu
YK
Kim
Spencer S
SS
D002384:Catalysis; D003460:Crystallization; D004058:Diffusion; D004553:Electric Conductivity; D008839:Microelectrodes; D018625:Microscopy, Atomic Force; D008956:Models, Chemical; D053758:Nanoparticles / Q000737:chemistry*; D012825:Silicon / Q000737:chemistry; D013499:Surface Properties; D013696:Temperature; D014025:Titanium / Q000737:chemistry*; D014835:Volatilization; D014961:X-Ray Diffraction
C009495:titanium dioxide; D014025:Titanium; D012825:Silicon