title: Synthesis and electrical properties of (Bi(1/2)Na(1/2))TiO3 (BNT) ferroelectric thin films by liquid sprayed mist chemical vapor deposition technique.
abstract: This study aims to synthesize lead-free ferroelectric material, (Bi(1/2)Na(1/2))TiO3 using the Liquid Sprayed Mist Chemical Vapor Deposition (LSMCVD) technique. The mist of precursor solution was vaporized and deposited on two different substrates of Si(100) and (111)Pt/TiO2/SiO2/Si(100) in an oxygen atmosphere. The deposition temperature and time were varied in the range of 400-600 degrees C and 30-90 min. (Bi(1/2)Na(1/2))TiO3 thin film had preferred orientations of (110). The thickness of the thin film deposited was 35-162 nm. The remnant polarization (2Pr) and the dielectric constant were 4.6-16.8 microC/cm2, 325-350, respectively.
authors.affiliation: Department of New Materials Engineering, Research Center of Advanced Materials Development, Chonbuk National University, 1-664-14 Dukjin-dong, Dukjin-gu, Chonju, Chonbuk 561-756, South Korea.
authors.forename: Bok-Hee
authors.initials: BH
authors.lastname: Kim
authors.forename: Sang-Hee
authors.initials: SH
authors.lastname: Kim
authors.forename: Jong-Hwan
authors.initials: JH
authors.lastname: Kim
authors.forename: Kun-Jae
authors.initials: KJ
authors.lastname: Lee
authors.forename: Yong-Ho
authors.initials: YH
authors.lastname: Choa
authors.forename: Youn-Kyu
authors.initials: YK
authors.lastname: Choi
authors.forename: Spencer S
authors.initials: SS
authors.lastname: Kim
mesh_terms: D002384:Catalysis; D003460:Crystallization; D004058:Diffusion; D004553:Electric Conductivity; D008839:Microelectrodes; D018625:Microscopy, Atomic Force; D008956:Models, Chemical; D053758:Nanoparticles / Q000737:chemistry*; D012825:Silicon / Q000737:chemistry; D013499:Surface Properties; D013696:Temperature; D014025:Titanium / Q000737:chemistry*; D014835:Volatilization; D014961:X-Ray Diffraction
chemical_list: C009495:titanium dioxide; D014025:Titanium; D012825:Silicon