title: A class of low voltage, elastomer-metal 'wet' actuators for use in high-density microfluidics.
abstract: We report a class of 'wet' MEMS elastomer-metal electrostatic actuators which can actuate in air, oil or water environments with no external fluidic connections, has actuation voltages lower than 15 V and is compatible with widespread PDMS microfluidics.
authors.affiliation: Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI, USA. tbansal@umich.edu
authors.forename: Tushar
authors.initials: T
authors.lastname: Bansal
authors.forename: Meng-Ping
authors.initials: MP
authors.lastname: Chang
authors.forename: Michel M
authors.initials: MM
authors.lastname: Maharbiz
mesh_terms: D001709:Biotechnology / Q000379:methods; D004129:Dimethylpolysiloxanes; D020724:Elastomers / Q000737:chemistry*; D004867:Equipment Design; D008670:Metals; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation*; D044085:Microfluidics; D008856:Microscopy, Fluorescence; D008863:Microspheres; D015233:Models, Statistical; D011108:Polymers / Q000737:chemistry; D055672:Static Electricity
chemical_list: D004129:Dimethylpolysiloxanes; D020724:Elastomers; D008670:Metals; D011108:Polymers