title: Charge transport of alkanethiol self-assembled monolayers in micro-via hole devices.
abstract: In this paper we fabricated 13440 microscale via hole structure devices using different length of alkanethiol self-assembled monolayers and characterized their electronic transport properties. Statistically averaged transport parameters such as current density, transport barrier height, effective electron mass, and transport decay coefficient were obtained from the great number of these devices. The yield of working microdevices was found as 1.5%. Temperature variable current-voltage characteristics for alkanethiol micro-via hole devices showed typical tunneling behavior when properly fabricated.
authors.affiliation: Department of Materials Science and Engineering, Gwangju Institute of Science and Technology, Gwangju, 500712, Korea.
authors.forename: Tae-Wook
authors.initials: TW
authors.lastname: Kim
authors.forename: Gunuk
authors.initials: G
authors.lastname: Wang
authors.forename: Hyunwook
authors.initials: H
authors.lastname: Song
authors.forename: Nak-Jin
authors.initials: NJ
authors.lastname: Choi
authors.forename: Hyoyoung
authors.initials: H
authors.lastname: Lee
authors.forename: Takhee
authors.initials: T
authors.lastname: Lee
mesh_terms: D004553:Electric Conductivity; D004563:Electrochemistry; D004566:Electrodes; D004581:Electronics; D004583:Electrons; D004867:Equipment Design; D053768:Metal Nanoparticles / Q000737:chemistry*; D008904:Miniaturization; D015233:Models, Statistical; D036103:Nanotechnology / Q000379:methods*; D012666:Semiconductors; D013438:Sulfhydryl Compounds / Q000737:chemistry*; D013696:Temperature
chemical_list: D013438:Sulfhydryl Compounds