title: Control of bio-MEMS surface chemical properties in micro fluidic devices for biological applications.
abstract: Surface chemistry of silicon/glass based bio-MEMS was controlled by depositing plasma polymerized acrylic acid (ppAc) films at two different electrode positions in a two-stage plasma reactor. AFM and XPS were used to characterize the surface roughness and surface chemistry of the films, respectively. The surface of bio-MEMS was highly functionalized with carboxylic/ester functionalities with a very good surface uniformity. The proportion of carbon atoms as C-OX, C(==O)OX functionalities was decreased and an increase in C==O functionalities was observed when the electrode position was increased from the mesh. These functionalized bio-MEMS devices have advantages in fabrication of reusable micro fluidic devices and the variation of fluid velocity by changing the surface properties may be used to develop a micro-mixing system to control the mixing ratio of different fluids for different biological and chemical applications.
authors.affiliation: Biological Research Center of Industrial Accelerators, Dongshin University, Naju, South Korea.
authors.forename: Marshal
authors.initials: M
authors.lastname: Dhayal
authors.forename: Chealho
authors.initials: C
authors.lastname: So
authors.forename: Jeong Sik
authors.initials: JS
authors.lastname: Choi
authors.forename: Jin
authors.initials: J
authors.lastname: Jun
mesh_terms: D000179:Acrylates / Q000737:chemistry; D002244:Carbon / Q000737:chemistry; D003460:Crystallization; D004563:Electrochemistry / Q000379:methods*; D004566:Electrodes; D004867:Equipment Design; D008422:Materials Testing; D044085:Microfluidics; D036103:Nanotechnology / Q000379:methods; D037742:Nanotubes, Carbon / Q000737:chemistry; D011108:Polymers / Q000737:chemistry; D012825:Silicon / Q000737:chemistry; D013052:Spectrometry, X-Ray Emission; D013499:Surface Properties; D014965:X-Rays
chemical_list: D000179:Acrylates; D037742:Nanotubes, Carbon; D011108:Polymers; D002244:Carbon; C036658:acrylic acid; D012825:Silicon