title: Micromachined Fabry-Pérot interferometer with embedded nanochannels for nanoscale fluid dynamics.
abstract: We describe a microfabricated Fabry-Pérot interferometer with nanochannels of various heights between 6 and 20 nm embedded in its cavity. By multiple beam interferometry, the device enables the study of liquid behavior in the nanochannels without using fluorescent substances. During filling studies of ethanol and water, an intriguing filling mode for partially wetting water was observed, tentatively attributed to the entrapment of a large amount of gas inside the channels.
authors.affiliation: MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands.
authors.forename: Koen M
authors.initials: KM
authors.lastname: van Delft
authors.forename: Jan C T
authors.initials: JC
authors.lastname: Eijkel
authors.forename: Dragana
authors.initials: D
authors.lastname: Mijatovic
authors.forename: Tamara S
authors.initials: TS
authors.lastname: Druzhinina
authors.forename: Helmut
authors.initials: H
authors.lastname: Rathgen
authors.forename: Niels R
authors.initials: NR
authors.lastname: Tas
authors.forename: Albert
authors.initials: A
authors.lastname: van den Berg
authors.forename: Frieder
authors.initials: F
authors.lastname: Mugele