Imaging and analysis of 3-D structure using a dual beam FIB.
The application of focused ion beam instrumentation in the generation of three-dimensional microstructural data is described. The methodologies used to acquire and manipulate this data are explained, and the technique is illustrated by a number of examples from the material sciences. The limitations of this method, and practical pointers to the generation of meaningful data, are also discussed.
McGrouther
D
D
Electron Microscope Unit, University of New South Wales, Sydney, New South Wales, Australia.
Munroe
P R
PR
D007091:Image Processing, Computer-Assisted / Q000295:instrumentation / Q000379:methods*; D021621:Imaging, Three-Dimensional / Q000295:instrumentation / Q000379:methods*; D008854:Microscopy, Electron / Q000295:instrumentation / Q000379:methods*; D049329:Nanostructures / Q000032:analysis / Q000648:ultrastructure