Fabrication of nanopores in silicon chips using feedback chemical etching.
Park
Sang Ryul
SR
Department of Physics, Brown University, Providence, RI 02912, USA.
Peng
Hongbo
H
Ling
Xinsheng S
XS
D003460:Crystallization / Q000379:methods*; D004563:Electrochemistry / Q000379:methods*; D046911:Macromolecular Substances / Q000737:chemistry; D008422:Materials Testing; D008968:Molecular Conformation; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D036103:Nanotechnology / Q000379:methods*; D010316:Particle Size; D016062:Porosity; D012825:Silicon / Q000737:chemistry*; D013499:Surface Properties
D046911:Macromolecular Substances; D012825:Silicon