title: Two-chamber integrated multichannel narrowband filter prepared by a multistep etching method.
abstract: A new, to the best of our knowledge, method, which combines the multistep ion-etching method with a traditional narrowband filter coating technique, is developed to prepare a two-chamber integrated multichannel filter. The influence of film deposition and etch technique on the shape and height of the narrow transmittance peaks is analyzed. A 32-channel narrowband integrated filter is fabricated with a homemade ion-etching machine and a coating machine. Every channel is distinctly separated and the FWHM is 1% of its central wavelength. The feasibility of the technique will be useful in the fabrication of a higher integrated multichannel narrowband filter.
authors.affiliation: Institute of Precise Optical Engineering and Technology, Tongji University, Shanghai 200092, China.
authors.forename: Hongfei
authors.initials: H
authors.lastname: Jiao
authors.forename: Yonggang
authors.initials: Y
authors.lastname: Wu
authors.forename: Guoxun
authors.initials: G
authors.lastname: Tian
authors.forename: Shaowei
authors.initials: S
authors.lastname: Wang
authors.forename: Hong
authors.initials: H
authors.lastname: Cao
authors.forename: Li
authors.initials: L
authors.lastname: Zhang
authors.forename: Lianxiao
authors.initials: L
authors.lastname: Fu