A new multi-site probe array with monolithically integrated parylene flexible cable for neural prostheses.
This work presents a new multi-site probe array applied with parylene technology, used for neural prostheses to record high-level cognitive neural signals. Instead of inorganic materials (e.g. silicon dioxide, silicon nitride), the electrodes and conduction traces on probes are insulated by parylene, which is a polymer material with high electrical resistivity, mechanical flexibility, biocompatibility and easy deposition process. As a result, the probes exhibit better electrical and mechanical properties. The all dry process is demonstrated to fabricate these probe arrays with monolithically integrated parylene flexible cables using double-side-polished (DSP) wafers. With the parylene flexible cables, the probes can be easily assembled to a high density 3-D array for chronic implantation.
Pang
Changlin
C
Caltech Micromachining Lab, California Institute of Technology, Pasadena, CA 91125 USA (phone: 626-395-2254; fax: 626-584-9104; e-mail: changlin@caltech.edu).
Cham
Jorge
J
Nenadic
Zoran
Z
Musallam
Sam
S
Tai
Yu-Chong
YC
Burdick
Joel
J
Andersen
Richard
R