Micromachined Fabry-Pérot interferometer with embedded nanochannels for nanoscale fluid dynamics.
We describe a microfabricated Fabry-Pérot interferometer with nanochannels of various heights between 6 and 20 nm embedded in its cavity. By multiple beam interferometry, the device enables the study of liquid behavior in the nanochannels without using fluorescent substances. During filling studies of ethanol and water, an intriguing filling mode for partially wetting water was observed, tentatively attributed to the entrapment of a large amount of gas inside the channels.
van Delft
Koen M
KM
MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands.
Eijkel
Jan C T
JC
Mijatovic
Dragana
D
Druzhinina
Tamara S
TS
Rathgen
Helmut
H
Tas
Niels R
NR
van den Berg
Albert
A
Mugele
Frieder
F