title: Imaging and analysis of 3-D structure using a dual beam FIB.
abstract: The application of focused ion beam instrumentation in the generation of three-dimensional microstructural data is described. The methodologies used to acquire and manipulate this data are explained, and the technique is illustrated by a number of examples from the material sciences. The limitations of this method, and practical pointers to the generation of meaningful data, are also discussed.
authors.affiliation: Electron Microscope Unit, University of New South Wales, Sydney, New South Wales, Australia.
authors.forename: D
authors.initials: D
authors.lastname: McGrouther
authors.forename: P R
authors.initials: PR
authors.lastname: Munroe
mesh_terms: D007091:Image Processing, Computer-Assisted / Q000295:instrumentation / Q000379:methods*; D021621:Imaging, Three-Dimensional / Q000295:instrumentation / Q000379:methods*; D008854:Microscopy, Electron / Q000295:instrumentation / Q000379:methods*; D049329:Nanostructures / Q000032:analysis / Q000648:ultrastructure