Development of dedicated STEM with high stability.
We developed a dedicated scanning transmission electron microscope with high-stability. The mechanical and electronic stabilities of the microscope were substantially improved, e.g. the specimen drift rate was found to be <0.2 nm min(-1). The Fourier transform of an ADF image showed spots of 0.105 nm at an acceleration voltage of 200 kV without spherical aberration corrector. The stabilized STEM instrument allows us to acquire distortion-free STEM images and high-signal to noise ratio analyses. We have shown the outline of the instrument and preliminary results.
Kimoto
Koji
K
National Institute for Materials Science, 1-1 Namiki, Tsukukba, Ibaraki 305-0044, Japan. kimoto.koji@nims.go.jp
Nakamura
Kuniyasu
K
Aizawa
Shinji
S
Isakozawa
Shigeto
S
Matsui
Yoshio
Y