Two-chamber integrated multichannel narrowband filter prepared by a multistep etching method.
A new, to the best of our knowledge, method, which combines the multistep ion-etching method with a traditional narrowband filter coating technique, is developed to prepare a two-chamber integrated multichannel filter. The influence of film deposition and etch technique on the shape and height of the narrow transmittance peaks is analyzed. A 32-channel narrowband integrated filter is fabricated with a homemade ion-etching machine and a coating machine. Every channel is distinctly separated and the FWHM is 1% of its central wavelength. The feasibility of the technique will be useful in the fabrication of a higher integrated multichannel narrowband filter.
Jiao
Hongfei
H
Institute of Precise Optical Engineering and Technology, Tongji University, Shanghai 200092, China.
Wu
Yonggang
Y
Tian
Guoxun
G
Wang
Shaowei
S
Cao
Hong
H
Zhang
Li
L
Fu
Lianxiao
L