Investigation of the scaling rules determining the performance of film bulk acoustic resonators operating as mass sensors.
Solidly mounted (SMR-type) thin film bulk acoustic resonators operating at 2.2, 4.1, and 8.0 GHz and with lateral extents from 30 to 500 microm were fabricated and their performance as mass sensors was evaluated theoretically as well as experimentally. It was found that increasing the frequency leads to a principally improved performance of these devices. Problems arising for the horizontal as well as the vertical dimension and structure are investigated.
Weber
Jan
J
Siemens AG, Corporate Technology, München, Germany. phd-ferro2-ctmm2@mchp.siemens.de
Link
Mathias
M
Primig
Robert
R
Pitzer
Dana
D
Wersing
Wolfram
W
Schreiter
Matthias
M
D000162:Acoustics / Q000295:instrumentation*; D003198:Computer Simulation; D017076:Computer-Aided Design; D004563:Electrochemistry / Q000295:instrumentation* / Q000379:methods; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008365:Manometry / Q000295:instrumentation* / Q000379:methods; D008567:Membranes, Artificial; D008962:Models, Theoretical; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D014159:Transducers
D008567:Membranes, Artificial