title: Uncooled IR imaging using optomechanical detectors.
abstract: In this study, we present an uncooled infrared imaging detector using knife-edge filter optical readout method. The tilt angle change of each cantilever in a focal plane array (FPA) can be simultaneously detected with a resolution of 10(-5) degrees. A deformation magnifying substrate-free microcantilever unit is specially designed. The multi-fold legs of microcantilever are interval metal coated to form a thermal deformation magnifying structure. Thermal and thermomechanical performance of this microcantilever unit are modeled and analyzed. An FPA with 100 x 100 pixels is fabricated and thermal images of human body are obtained by this detector.
authors.affiliation: CAS Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230027, China.
authors.forename: Zhengyu
authors.initials: Z
authors.lastname: Miao
authors.forename: Qingchuan
authors.initials: Q
authors.lastname: Zhang
authors.forename: Dapeng
authors.initials: D
authors.lastname: Chen
authors.forename: Zheying
authors.initials: Z
authors.lastname: Guo
authors.forename: Fengliang
authors.initials: F
authors.lastname: Dong
authors.forename: Zhiming
authors.initials: Z
authors.lastname: Xiong
authors.forename: Xiaoping
authors.initials: X
authors.lastname: Wu
authors.forename: Chaobo
authors.initials: C
authors.lastname: Li
authors.forename: Binbin
authors.initials: B
authors.lastname: Jiao
mesh_terms: D004867:Equipment Design; D006801:Humans; D007259:Infrared Rays; D019563:Mechanics; D008853:Microscopy / Q000295:instrumentation / Q000379:methods*; D055095:Optics and Photonics / Q000295:instrumentation; D013816:Thermodynamics; D013817:Thermography / Q000295:instrumentation / Q000379:methods