title: Hard-molded 51 cm long waveguide array with a 150 GHz bandwidth for board-level optical interconnects.
abstract: We demonstrated a 51 cm long waveguide array on a poly(methyl methacrylate) sheet fabricated by silicon hard-molding technology. To reduce the silicon sidewall roughness, a wet-oxidation followed by a buffered oxidation etchant etching process is adopted, achieving a surface roughness of 1.2 nm. The waveguide obtained a total insertion loss of -15.1 dB and an adjacent channel cross talk below -31 dB. The 3 dB optical bandwidth is determined to be 150 GHz by the optical autocorrelation method.
authors.affiliation: Microelectronic Research Center, University of Texas at Austin, 78758, USA.
authors.forename: Xiaolong
authors.initials: X
authors.lastname: Wang
authors.forename: Li
authors.initials: L
authors.lastname: Wang
authors.forename: Wei
authors.initials: W
authors.lastname: Jiang
authors.forename: Ray T
authors.initials: RT
authors.lastname: Chen