Optically addressed microelectromechanical systems driven with high-frequency modulated light.
We propose and analyze a new mode of operation for an optically addressed deformable mirror device. The device consists of an array of metallized membrane mirrors supported above an optically addressed photoconductive substrate. A conductive transparent electrode is deposited on the backside of the substrate. A variable polarity voltage is applied between the membrane and the back electrode of the device accompanied with high-frequency modulated light. The membrane is deformed when a modulated light illuminates the backside of the device. This occurs due to impedance and bias redistribution between the two cascaded impedances. This operating mechanism of a microelectromechanical systems device is suitable for detecting moving targets.
Khoury
Jed
J
Air Force Research Laboratory, Optoelectronic Technology Branch, Hanscom Air Force Base, Bedford, Massachussettes 01731, USA. jed.khoury@hanscom.af.mil
Woods
Charles L
CL
Haji-Saeed
Bahareh
B
Sengupta
Sandip K
SK
Goodhue
William D
WD
Kierstead
John
J