title: Investigation of the scaling rules determining the performance of film bulk acoustic resonators operating as mass sensors.
abstract: Solidly mounted (SMR-type) thin film bulk acoustic resonators operating at 2.2, 4.1, and 8.0 GHz and with lateral extents from 30 to 500 microm were fabricated and their performance as mass sensors was evaluated theoretically as well as experimentally. It was found that increasing the frequency leads to a principally improved performance of these devices. Problems arising for the horizontal as well as the vertical dimension and structure are investigated.
authors.affiliation: Siemens AG, Corporate Technology, München, Germany. phd-ferro2-ctmm2@mchp.siemens.de
authors.forename: Jan
authors.initials: J
authors.lastname: Weber
authors.forename: Mathias
authors.initials: M
authors.lastname: Link
authors.forename: Robert
authors.initials: R
authors.lastname: Primig
authors.forename: Dana
authors.initials: D
authors.lastname: Pitzer
authors.forename: Wolfram
authors.initials: W
authors.lastname: Wersing
authors.forename: Matthias
authors.initials: M
authors.lastname: Schreiter
mesh_terms: D000162:Acoustics / Q000295:instrumentation*; D003198:Computer Simulation; D017076:Computer-Aided Design; D004563:Electrochemistry / Q000295:instrumentation* / Q000379:methods; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008365:Manometry / Q000295:instrumentation* / Q000379:methods; D008567:Membranes, Artificial; D008962:Models, Theoretical; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D014159:Transducers
chemical_list: D008567:Membranes, Artificial