title: Optically addressed microelectromechanical systems driven with high-frequency modulated light.
abstract: We propose and analyze a new mode of operation for an optically addressed deformable mirror device. The device consists of an array of metallized membrane mirrors supported above an optically addressed photoconductive substrate. A conductive transparent electrode is deposited on the backside of the substrate. A variable polarity voltage is applied between the membrane and the back electrode of the device accompanied with high-frequency modulated light. The membrane is deformed when a modulated light illuminates the backside of the device. This occurs due to impedance and bias redistribution between the two cascaded impedances. This operating mechanism of a microelectromechanical systems device is suitable for detecting moving targets.
authors.affiliation: Air Force Research Laboratory, Optoelectronic Technology Branch, Hanscom Air Force Base, Bedford, Massachussettes 01731, USA. jed.khoury@hanscom.af.mil
authors.forename: Jed
authors.initials: J
authors.lastname: Khoury
authors.forename: Charles L
authors.initials: CL
authors.lastname: Woods
authors.forename: Bahareh
authors.initials: B
authors.lastname: Haji-Saeed
authors.forename: Sandip K
authors.initials: SK
authors.lastname: Sengupta
authors.forename: William D
authors.initials: WD
authors.lastname: Goodhue
authors.forename: John
authors.initials: J
authors.lastname: Kierstead