Uncooled IR imaging using optomechanical detectors.
In this study, we present an uncooled infrared imaging detector using knife-edge filter optical readout method. The tilt angle change of each cantilever in a focal plane array (FPA) can be simultaneously detected with a resolution of 10(-5) degrees. A deformation magnifying substrate-free microcantilever unit is specially designed. The multi-fold legs of microcantilever are interval metal coated to form a thermal deformation magnifying structure. Thermal and thermomechanical performance of this microcantilever unit are modeled and analyzed. An FPA with 100 x 100 pixels is fabricated and thermal images of human body are obtained by this detector.
Miao
Zhengyu
Z
CAS Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230027, China.
Zhang
Qingchuan
Q
Chen
Dapeng
D
Guo
Zheying
Z
Dong
Fengliang
F
Xiong
Zhiming
Z
Wu
Xiaoping
X
Li
Chaobo
C
Jiao
Binbin
B
D004867:Equipment Design; D006801:Humans; D007259:Infrared Rays; D019563:Mechanics; D008853:Microscopy / Q000295:instrumentation / Q000379:methods*; D055095:Optics and Photonics / Q000295:instrumentation; D013816:Thermodynamics; D013817:Thermography / Q000295:instrumentation / Q000379:methods