Silane removal at ambient temperature by using alumina-supported metal oxide adsorbents.
Copper, zinc, and cerium oxide adsorbents supported on alumina were used to remove silane gas (SiH4). The adsorbents were prepared using a coprecipitation method and characterized by the inductively coupled plasma mass spectrometry, X-ray powder diffractometer, and Brunauer-Emmett-Teller method (BET). The silane removal efficiency and adsorption capacity of the adsorbents were investigated in this study. Test results showed that the adsorbents containing active species had a removal efficiency >99.9% for SiH4 before breakthrough. Adsorbents containing mixed oxides (CuO-CeO2/ Al2O3 and CuO-ZnO/Al2O3), which showed well-dispersed active species and high BET surface areas, had a greater adsorption capacity than the adsorbents containing single metal oxide. However, when the CuO-ZnO/ Al2O3 adsorbents contain >40 wt% of active metal oxides, the increase of active species lowered the BET surface area leading to a decrease of the adsorption capacity. Additionally, when the content of the active metal oxides was between 20% and 40%, the CuO-ZnO/Al2O3 adsorbents demonstrated higher adsorption capacity.
Hsu
Jung-Nan
JN
Energy and Environment Research Laboratories, Industrial Technology and Research Institute, Hsinchu, Taiwan, Republic of China.
Tsai
Chuen-Jinn
CJ
Chiang
Cindy
C
Li
Shou-Nan
SN
D000042:Absorption; D000395:Air Pollutants, Occupational / Q000032:analysis*; D000397:Air Pollution / Q000517:prevention & control*; D000465:Algorithms; D000537:Aluminum Oxide / Q000737:chemistry*; D008670:Metals / Q000737:chemistry; D010087:Oxides / Q000737:chemistry; D016062:Porosity; D012821:Silanes; D013696:Temperature
D000395:Air Pollutants, Occupational; D008670:Metals; D010087:Oxides; D012821:Silanes; D000537:Aluminum Oxide