Interferometric measurement of phase change on reflection.
We show an interferometric method for measuring phase change with known uncertainty. Because this measurement uses the backreflection from a sample, the height is intrinsically removed, and only the phase change is measured. The uncertainty in the phase change measurement is +/-3.8 degrees and is dominated by the background subtraction method. We also investigate the effect of the phase change on the interferometric radius measurement. The theoretical worst-case error in the interferometric radius measurement due to the phase change is 30 nm.
Medicus
Kate M
KM
Department of Physics and Optical Sciences, University of North Carolina at Charlotte, Charlotte, NC 28223, USA. k.medicus@mitutoyo.nl
Chaney
Marcus
M
Brodziak
John E
JE
Davies
Angela
A