title: Interferometric measurement of phase change on reflection.
abstract: We show an interferometric method for measuring phase change with known uncertainty. Because this measurement uses the backreflection from a sample, the height is intrinsically removed, and only the phase change is measured. The uncertainty in the phase change measurement is +/-3.8 degrees and is dominated by the background subtraction method. We also investigate the effect of the phase change on the interferometric radius measurement. The theoretical worst-case error in the interferometric radius measurement due to the phase change is 30 nm.
authors: Department of Physics and Optical Sciences, University of North Carolina at Charlotte, Charlotte, NC 28223, USA. k.medicus@mitutoyo.nl
authors: Kate M
authors: KM
authors: Medicus
authors: Marcus
authors: M
authors: Chaney
authors: John E
authors: JE
authors: Brodziak
authors: Angela
authors: A
authors: Davies