title: Suspended mechanical structures based on elastic silicon nanowire arrays.
abstract: We demonstrate a bottom-up/top-down combined method for the fabrication of horizontally suspended, well-oriented and size-controlled Si nanowire arrays. Mechanical beamlike structures composed of multiple ordered arrays consecutively linked by transversal microspacers are obtained by this method. Such structures are used to investigate the mechanical elasticity of the nanowire arrays by atomic force microscopy. Our results point out important differences in the morphology and mechanical behavior of the fabricated nanowire-based structures with respect to equivalent bulk material structures.
authors: Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.
authors: Alvaro San
authors: AS
authors: Paulo
authors: Noel
authors: N
authors: Arellano
authors: Jose A
authors: JA
authors: Plaza
authors: Rongrui
authors: R
authors: He
authors: Carlo
authors: C
authors: Carraro
authors: Roya
authors: R
authors: Maboudian
authors: Roger T
authors: RT
authors: Howe
authors: Jeff
authors: J
authors: Bokor
authors: Peidong
authors: P
authors: Yang
mesh_terms: D003460:Crystallization / Q000379:methods*; D004548:Elasticity; D004559:Electric Wiring; D046911:Macromolecular Substances / Q000737:chemistry; D008422:Materials Testing; D019563:Mechanics; D008968:Molecular Conformation; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D036103:Nanotechnology / Q000379:methods*; D010316:Particle Size; D012666:Semiconductors; D012825:Silicon / Q000737:chemistry*; D013314:Stress, Mechanical; D013499:Surface Properties
chemical_list: D046911:Macromolecular Substances; D012825:Silicon