title: GaBi alloy liquid metal ion source for microelectronics research.
abstract: A GaBi alloy liquid metal ion source has been studied. From an analysis of the source mass spectra as a function of emission current, a mechanism is suggested for the production of single- and double-charged ions. There is good agreement with the results of Swanson's investigations of a pure Bi source.
authors: Research Center Dresden-Rossendorf Inc., Institute of Ion Beam Physics and Materials Research, D-01314 Dresden, Germany. l.bischoff@fz-rossendorf.de
authors: L
authors: L
authors: Bischoff
authors: W
authors: W
authors: Pilz
authors: Th
authors: T
authors: Ganetsos
authors: R G
authors: RG
authors: Forbes
authors: Ch
authors: Ch
authors: Akhmadaliev