Suspended mechanical structures based on elastic silicon nanowire arrays.
We demonstrate a bottom-up/top-down combined method for the fabrication of horizontally suspended, well-oriented and size-controlled Si nanowire arrays. Mechanical beamlike structures composed of multiple ordered arrays consecutively linked by transversal microspacers are obtained by this method. Such structures are used to investigate the mechanical elasticity of the nanowire arrays by atomic force microscopy. Our results point out important differences in the morphology and mechanical behavior of the fabricated nanowire-based structures with respect to equivalent bulk material structures.
Paulo
Alvaro San
AS
Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.
Arellano
Noel
N
Plaza
Jose A
JA
He
Rongrui
R
Carraro
Carlo
C
Maboudian
Roya
R
Howe
Roger T
RT
Bokor
Jeff
J
Yang
Peidong
P
D003460:Crystallization / Q000379:methods*; D004548:Elasticity; D004559:Electric Wiring; D046911:Macromolecular Substances / Q000737:chemistry; D008422:Materials Testing; D019563:Mechanics; D008968:Molecular Conformation; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D036103:Nanotechnology / Q000379:methods*; D010316:Particle Size; D012666:Semiconductors; D012825:Silicon / Q000737:chemistry*; D013314:Stress, Mechanical; D013499:Surface Properties
D046911:Macromolecular Substances; D012825:Silicon