GaBi alloy liquid metal ion source for microelectronics research.
A GaBi alloy liquid metal ion source has been studied. From an analysis of the source mass spectra as a function of emission current, a mechanism is suggested for the production of single- and double-charged ions. There is good agreement with the results of Swanson's investigations of a pure Bi source.
Bischoff
L
L
Research Center Dresden-Rossendorf Inc., Institute of Ion Beam Physics and Materials Research, D-01314 Dresden, Germany. l.bischoff@fz-rossendorf.de
Pilz
W
W
Ganetsos
Th
T
Forbes
R G
RG
Akhmadaliev
Ch
Ch