Theoretical investigation of surface acoustic wave in the new, three-layered structure: ZnO/AlN/diamond.
The new layered structure, ZnO/AlN/diamond, for surface acoustic wave (SAW) devices is investigated for gigahertz-band applications. This structure combines the advantages of both piezoelectric materials, with a high electromechanical coupling coefficient (K2) of ZnO and high acoustic velocity of AlN. Theoretical results show that Rayleigh mode SAWs with large phase velocities up to 12,200 m/s and large K2 from 1 to 3% were generated with this new structure.
El Hakiki
Mohamed
M
Elmazria
Omar
O
Alnot
Patrick
P
D000162:Acoustics; D017607:Aluminum Compounds / Q000737:chemistry*; D002516:Ceramics / Q000737:chemistry; D003198:Computer Simulation; D018130:Diamond / Q000737:chemistry*; D008422:Materials Testing; D008956:Models, Chemical; D012542:Scattering, Radiation; D015034:Zinc Oxide / Q000737:chemistry*
D017607:Aluminum Compounds; D018130:Diamond; C052045:aluminum nitride; D015034:Zinc Oxide