Elimination of cumulative effect of thickness errors in monochromatic monitoring of optical coating production: theory.
We propose an algorithm for correcting deposition termination levels that allows elimination of the cumulative effect of errors in previously deposited layers. For the application of this algorithm at least one monitoring signal extremum should be registered during a layer deposition. We also derive a theoretical relation for the estimation of errors in layer refractive indices based on the results of on-line monitoring measurements. At least two monitoring signal extrema are required for its application.
Tikhonravov
A V
AV
Research Computing Center, Moscow State University, Moscow, Russia. tikh@srcc.msu.ru
Trubetskov
M K
MK