Near-infrared thermography using a charge-coupled device camera: application to microsystems.
Using near-infrared thermography microscopy and a low-cost charge-coupled device (CCD) camera, we have designed a system which is able to deliver quantitative submicronic thermal images. Using a theoretical model based on Planck's law and CCD sensor properties allowed us to determine a minimal theoretical detection temperature and an optimal temperature sensitivity of our system. In order to validate this method, we show a good relationship between a theoretical study and a thermal measurement of a microsample.
Teyssieux
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Institut FEMTO-ST, CNRS UMR 6174, 32 Avenue de l'Observatoire, F-25044 Besançon Cedex, France. damien.teyssieux@femto-st.fr
Thiery
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Cretin
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