title: Sputter deposition of self-organized nanoclusters through porous anodic alumina templates.
abstract: Silver nanoparticles were sputter deposited through self organized hexagonally ordered porous anodic alumina templates that were fabricated using a two-step anodization process. The average pore diameter of the template was 90 nm and the interpore spacing was 120 nm. Atomic force microscope studies of the sputter-deposited silver nanoparticle array on a Si substrate indicate an approximate replication of the porous anodic alumina mask. The nature of the deposition depends strongly on the process parameters such as sputtering voltage, ambient pressure and substrate temperature. We report a detailed study of the sputtering conditions that lead to an optimal deposition through the template.
authors: Department of Condensed Matter Physics and Materials Science, Tata Institute of Fundamental Research, Mumbai 400005, India.
authors: Smita
authors: S
authors: Gohil
authors: Ramesh
authors: R
authors: Chandra
authors: Bhagyashree
authors: B
authors: Chalke
authors: Sangita
authors: S
authors: Bose
authors: Pushan
authors: P
authors: Ayyub
mesh_terms: D000537:Aluminum Oxide / Q000737:chemistry*; D020099:Coated Materials, Biocompatible / Q000737:chemistry; D006358:Hot Temperature; D018625:Microscopy, Atomic Force; D008855:Microscopy, Electron, Scanning; D053758:Nanoparticles / Q000737:chemistry* / Q000648:ultrastructure; D036103:Nanotechnology / Q000379:methods*; D010316:Particle Size; D016062:Porosity; D012825:Silicon / Q000737:chemistry; D012834:Silver / Q000737:chemistry; D013499:Surface Properties
chemical_list: D020099:Coated Materials, Biocompatible; D012834:Silver; D000537:Aluminum Oxide; D012825:Silicon