title: Nanocrystalline diamond thin films deposited from C60 monoenergetic fullerene ion beam.
abstract: Carbon films 250 division by 500 nm in thickness deposited on Si wafers from mass-selected flow of accelerated C60 ions with energies of 5.0 +/- 0.1 keV at temperatures of 300 K and 673 K are characterized by TEM and nanoindentation. On the TEM images of the films deposited at 673 K, nanocrystalline graphite with the typical grain size of -6 nm is observed. The films deposited at 300 K are transparent in visible light. TEM study of these films has revealed structural elements with lattice spacing close to that of diamond and the grain size of about 4 nm. Nanohardness and elastic modulus of the films prepared at a substrate temperature of 300 K were 23.1 +/- 0.2 GPa and 200 +/- 1 GPa, respectively. Possible mechanisms of the carbon films structure formation are suggested in the framework of a hydrodynamic shock wave model.
authors: National Technical Institute, Kharkiv 61002, Ukraine.
authors: V E
authors: VE
authors: Pukha
authors: A N
authors: AN
authors: Stetsenko
authors: S N
authors: SN
authors: Dub
authors: J K
authors: JK
authors: Lee
mesh_terms: D002244:Carbon / Q000737:chemistry; D002627:Chemistry, Physical / Q000379:methods; D003460:Crystallization; D018130:Diamond / Q000737:chemistry*; D037741:Fullerenes / Q000737:chemistry*; D007477:Ions; D046529:Microscopy, Electron, Transmission; D008956:Models, Chemical; D053758:Nanoparticles / Q000737:chemistry*; D049329:Nanostructures / Q000737:chemistry; D036103:Nanotechnology / Q000379:methods*; D012825:Silicon / Q000737:chemistry; D013499:Surface Properties; D013696:Temperature
chemical_list: D037741:Fullerenes; D007477:Ions; D002244:Carbon; D018130:Diamond; C069837:fullerene C60; D012825:Silicon