Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane.
The (1120) textured polycrystalline ZnO films with a high shear mode electromechanical coupling coefficient k15 are obtained by sputter deposition. An over-moded resonator, a layered structure of metal electrode film/(1120) textured ZnO piezoelectric film/metal electrode film/silica glass substrate was used to characterize k15 by a resonant spectrum method. The (1120) textured ZnO piezoelectric films with excellent crystallite c-axis alignment showed an electromechanical coupling coefficient k15 of 0.24. This value was 92% of k15 value in single-crystal (k15 = 0.26).
Yanagitani
Takahiko
T
Mishima
Natsuki
N
Matsukawa
Mami
M
Watanabe
Yoshiaki
Y
D003198:Computer Simulation; D017076:Computer-Aided Design; D003460:Crystallization; D004548:Elasticity; D017097:Electric Impedance; D004581:Electronics; D019563:Mechanics; D008567:Membranes, Artificial; D008962:Models, Theoretical; D013312:Stress, Physiological; D014159:Transducers; D014465:Ultrasonics; D015034:Zinc Oxide / Q000737:chemistry*
D008567:Membranes, Artificial; D015034:Zinc Oxide