Imaging thin films of nanoporous low-k dielectrics: comparison between ultramicrotomy and focused ion beam preparations for transmission electron microscopy.
Ultramicrotomy, the technique of cutting nanometers-thin slices of material using a diamond knife, was applied to prepare transmission electron microscope (TEM) specimens of nanoporous poly(methylsilsesquioxane) (PMSSQ) thin films. This technique was compared to focused ion beam (FIB) cross-section preparation to address possible artifacts resulting from deformation of nanoporous microstructure during the sample preparation. It was found that ultramicrotomy is a successful TEM specimen preparation method for nanoporous PMSSQ thin films when combined with low-energy ion milling as a final step. A thick, sacrificial carbon coating was identified as a method of reducing defects from the FIB process which included film shrinkage and pore deformation.
Thompson
Leslie E
LE
IBM Almaden Research Center, 650 Harry Road, San Jose, CA 95120-6099, USA.
Rice
Philip M
PM
Delenia
Eugene
E
Lee
Victor Y
VY
Brock
Phillip J
PJ
Magbitang
Teddie P
TP
Dubois
Geraud
G
Volksen
Willi
W
Miller
Robert D
RD
Kim
Ho-Cheol
HC
D016616:Cryoultramicrotomy / Q000379:methods*; D007091:Image Processing, Computer-Assisted; D007477:Ions; D008853:Microscopy / Q000379:methods*; D008854:Microscopy, Electron / Q000379:methods*; D053758:Nanoparticles
D007477:Ions