Beam-induced damage to thin specimens in an intense electron probe.
We have investigated the changes produced in single-element and two-layer transmission electron microscope (TEM) specimens irradiated by an intense nanometer-sized electron probe, such as that produced in a field-emission or aberration-corrected TEM. These changes include hole formation and the accumulation of material within the irradiated area. The results are discussed in terms of mechanisms, including electron-beam sputtering and surface diffusion. Strategies for minimizing the effect of the beam are considered.
Egerton
Raymond F
RF
Physics Department, University of Alberta, Edmonton, AB T6G 2J1, Canada. regerton@ualberta.ca
Wang
Feng
F
Crozier
Peter A
PA
D002244:Carbon; D007287:Inorganic Chemicals / Q000737:chemistry; D007700:Kinetics; D008854:Microscopy, Electron / Q000379:methods*; D008855:Microscopy, Electron, Scanning; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity
D007287:Inorganic Chemicals; D002244:Carbon