title: Development of a precision indentation and scratching system with a tool force and displacement control module.
abstract: This article presents a tip-based micropatterning system with a precision device for measuring the machine force and the tool path. The machine force is obtained by a tool control module with a leaf spring and a capacitive displacement sensor. It is controlled to provide a force that ranges from 80 microN to 8 N. The force sensing unit, which is part of the module, is mounted on a PZT (PbZrTi) driven in-feed motion stage with a resolution of 1 nm. The work piece is set on an X-Y motion stage, and the position can be controlled with a tool path accuracy of 5 nm. Micropatterning and precision indentation experiments were performed, while the machined surfaces were examined by atomic force microscopy. From these results, the feasibility of the system for precise force-displacement control was verified for application in tip-based precision machining.
authors.affiliation: Graduate School, School of Precision Mechanical Engineering, Hanyang University, Seoul, Korea. jaejun.park@gmail.com
authors.forename: Jae-Jun
authors.initials: JJ
authors.lastname: Park
authors.forename: Kihwan
authors.initials: K
authors.lastname: Kwon
authors.forename: Jinhyeok
authors.initials: J
authors.lastname: Bang
authors.forename: Nahmgyoo
authors.initials: N
authors.lastname: Cho
authors.forename: Chang-Soo
authors.initials: CS
authors.lastname: Han
authors.forename: Nak-Sam
authors.initials: NS
authors.lastname: Choi