Ultra-large-scale directed assembly of single-walled carbon nanotube devices.
One of the biggest limitations of conventional carbon nanotube device fabrication techniques is the inability to scale up the processes to fabricate a large number of devices on a single chip. In this report, we demonstrate the directed and precise assembly of single-nanotube devices with an integration density of several million devices per square centimeter, using a novel aspect of nanotube dielectrophoresis. We show that the dielectrophoretic force fields change incisively as nanotubes assemble into the contact areas, leading to a reproducible directed assembly which is self-limiting in forming single-tube devices. Their functionality has been tested by random sampling of device characteristics using microprobes.
Vijayaraghavan
Aravind
A
Institut für Nanotechnologie, Forschungszentrum Karlsruhe, D-76021 Karlsruhe, Germany.
Blatt
Sabine
S
Weissenberger
Daniel
D
Oron-Carl
Matti
M
Hennrich
Frank
F
Gerthsen
Dagmar
D
Hahn
Horst
H
Krupke
Ralph
R
D003460:Crystallization / Q000379:methods*; D004553:Electric Conductivity; D004579:Electron Transport; D004867:Equipment Design; D019544:Equipment Failure Analysis; D046911:Macromolecular Substances / Q000737:chemistry; D008422:Materials Testing; D008839:Microelectrodes; D008968:Molecular Conformation; D036103:Nanotechnology / Q000379:methods*; D037742:Nanotubes, Carbon / Q000737:chemistry* / Q000648:ultrastructure*; D010316:Particle Size; D013499:Surface Properties
D046911:Macromolecular Substances; D037742:Nanotubes, Carbon