AES investigation of inhomogenous metal-insulator samples.
In this article, the secondary electron-emission properties of both vertically and laterally inhomogeneous samples are discussed. To study the effect of surface coverage, the total electron-emission yield of tungsten and niobium samples was measured as a function of primary electron energy and oxide thickness. A method is suggested to avoid charging difficulties during AES measurements of samples that consist of both metal and various insulator parts.
Dobos
Gábor
G
Budapest University of Technology and Economics, Department of Atomic Physics, Surface Physics Laboratory, Budafoki Street 8, Budapest, H-1111, Hungary. dobosg@eik.bme.hu
Vida
György
G
Tóth
Zoltán
Z
Josepovits
Katalin
K
D004583:Electrons; D008670:Metals / Q000737:chemistry*; D008854:Microscopy, Electron / Q000379:methods*; D009556:Niobium / Q000737:chemistry*; D010087:Oxides; D015203:Reproducibility of Results; D013499:Surface Properties; D014414:Tungsten / Q000737:chemistry*
D008670:Metals; D010087:Oxides; D009556:Niobium; D014414:Tungsten