title: Nanoparticle scanning and detection on flat and structured surfaces using fluorescence microscopy.
abstract: A new technique is proposed for the scanning and detection of nanoparticles on flat substrates and three-dimensional structures using fluorescence microscopy. This technique is utilized for particle removal measurements especially in semiconductor and hard disk manufacturing. This fluorescent particle scanning technique enables nanoscale particle detection. The technique shows that single particles down to 63 nm could be detected and counted. The technique is also capable of detecting particles in trenches that are as deep as 500 microm.
authors.affiliation: NSF Nanoscale Science and Engineering Center for High-rate Nanomanufacturing, Northeastern University, Boston, Massachusetts 02115, USA.
authors.forename: Rasim
authors.initials: R
authors.lastname: Guldiken
authors.forename: Prashanth
authors.initials: P
authors.lastname: Makaram
authors.forename: Kaveh
authors.initials: K
authors.lastname: Bakhtari
authors.forename: Jingoo
authors.initials: J
authors.lastname: Park
authors.forename: Ahmed A
authors.initials: AA
authors.lastname: Busnaina