title: Epitaxial growth of InN films by molecular-beam epitaxy using hydrazoic acid (HN3) as an efficient nitrogen source.
abstract: Epitaxial InN films have been successfully grown on c-plane GaN template by gas-source molecular-beam epitaxy with hydrazoic acid (HN3) as an efficient nitrogen source. Results in residual-gas analyzer show that the HN3 is highly dissociated to produce nitrogen radicals and can be controlled in the amounts of active nitrogen species by tuning HN3 pressure. A flat and high-purity InN epifilm has been realized at the temperature near 550 degrees C, and a growth rate of 200 nm/hr is also achieved. Moreover, the epitaxial relationship of the InN(002) on the GaN(002) is reflected in the X-ray diffraction, and the full-width at half-maximum of the InN(002) peak as narrow as 0.05 degrees is related to a high-quality crystallinity. An infrared photoluminescence (PL) emission peak at 0.705 eV and the integrated intensity increasing linearly with excitation power suggest that the observed PL can be attributed to a free-to-bound recombination.
authors.affiliation: Graduate Institute in Electro-Optical Engineering, Tatung University, Taipei 104, Taiwan.
authors.forename: J T
authors.initials: JT
authors.lastname: Chen
authors.forename: C L
authors.initials: CL
authors.lastname: Hsiao
authors.forename: H C
authors.initials: HC
authors.lastname: Hsu
authors.forename: C T
authors.initials: CT
authors.lastname: Wu
authors.forename: C L
authors.initials: CL
authors.lastname: Yeh
authors.forename: P C
authors.initials: PC
authors.lastname: Wei
authors.forename: L C
authors.initials: LC
authors.lastname: Chen
authors.forename: K H
authors.initials: KH
authors.lastname: Chen