title: Integrated electrodes on a silicon based ion channel measurement platform.
abstract: We demonstrate the microfabrication of a low-noise silicon based device with integrated silver/silver chloride electrodes used for the measurement of single ion channel proteins. An aperture of 150 microm diameter was etched in a silicon substrate using a deep silicon reactive ion etcher and passivated with 30 nm of polytetrafluoroethylene via chemical vapor deposition. The average recorded noise in measurements of lipid bilayers was reduced by a factor of four through patterning of a 75 microm thick SU-8 layer around the aperture. Integrated electrodes were fabricated on both sides of the device and used for repeatable, stable, giga-seal bilayer formations as well as characteristic measurements of the transmembrane protein OmpF porin.
authors.affiliation: Arizona State University, Center for Solid State Electronics Research, Tempe, AZ 85287, USA. seth.wilk@asu.edu
authors.forename: S J
authors.initials: SJ
authors.lastname: Wilk
authors.forename: L
authors.initials: L
authors.lastname: Petrossian
authors.forename: M
authors.initials: M
authors.lastname: Goryll
authors.forename: T J
authors.initials: TJ
authors.lastname: Thornton
authors.forename: S M
authors.initials: SM
authors.lastname: Goodnick
authors.forename: J M
authors.initials: JM
authors.lastname: Tang
authors.forename: R S
authors.initials: RS
authors.lastname: Eisenberg
mesh_terms: D032701:Biomimetics / Q000295:instrumentation / Q000379:methods; D015374:Biosensing Techniques / Q000295:instrumentation* / Q000379:methods; D004563:Electrochemistry / Q000295:instrumentation* / Q000379:methods; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007473:Ion Channels / Q000737:chemistry*; D008051:Lipid Bilayers / Q000737:chemistry*; D008839:Microelectrodes; D018272:Porins / Q000737:chemistry*; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D012825:Silicon / Q000737:chemistry*; D018511:Systems Integration
chemical_list: D007473:Ion Channels; D008051:Lipid Bilayers; C109237:OmpF protein; D018272:Porins; D012825:Silicon