New multichannel electron energy analyzer with cylindrically symmetrical electrostatic field.
This article discusses an electron energy analyzer with a cylindrically symmetrical electrostatic field, designed for rapid Auger analysis. The device was designed and built. The best parameters of the analyzer were estimated and then experimentally verified.
Cizmar
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Institute of Scientific Instruments, ASCR, Královopolská 147, Brno CZ-61264, Czech Republic. petr@cizmar.org
Müllerová
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Jacka
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Pratt
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A
D017076:Computer-Aided Design; D004583:Electrons; D004867:Equipment Design; D019544:Equipment Failure Analysis; D018499:Linear Energy Transfer; D011829:Radiation Dosage; D011874:Radiometry / Q000295:instrumentation* / Q000379:methods; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D055672:Static Electricity; D014159:Transducers