title: Vibration response of microcantilevers bounded by a confined fluid.
abstract: Hydrodynamic predictions of fluid velocity and pressure distribution are made for fluid in a confined space bounded by a vibrating microcantilever and a fixed surface. The results are used to quantify damping factors and predict frequency response amplitudes of a microcantilever vibrating near a fixed surface. The theoretical predictions of vibration response compare favorably with experimental data.
authors.affiliation: Department of Mechanical, Aerospace, and Biomedical Engineering, University of Tennessee, Knoxville, TN 37996, USA. ddareing@utk.edu
authors.forename: Don W
authors.initials: DW
authors.lastname: Dareing
authors.forename: Dechang
authors.initials: D
authors.lastname: Yi
authors.forename: Thomas
authors.initials: T
authors.lastname: Thundat