Feasibility of multi-walled carbon nanotube probes in AFM anodization lithography.
Multi-walled carbon nanotube (CNT) tips were used in atomic force microscope (AFM) anodization lithography to investigate their advantages over conventional tips. The CNT tip required a larger threshold voltage than the mother silicon tip due to the Schottky barrier at the CNT-Si interface. Current-to-voltage curves distinguished the junction property between CNTs and mother tips. The CNT-platinum tip, which is more conductive than the CNT-silicon tip, showed promising results for AFM anodization lithography. Finally, the nanostructures with high aspect ratio were fabricated using a pulsed bias voltage technique as well as the CNT tip.
Sun Choi
Ji
J
Department of Chemistry, Hanyang University, Seoul 133-791, Korea.
Bae
Sukjong
S
Jung Ahn
Sang
S
Hyun Kim
Dal
D
Young Jung
Ki
K
Han
Cheolsu
C
Choo Chung
Chung
C
Lee
Haiwon
H