title: Resonator combined with a piezoelectric actuator for chemical analysis by force microscopy.
abstract: A high frequency silicon resonator for dynamic scanning force microscopy is combined with an integrated piezoelectric actuation element for large displacements. A high resonance frequency is required for imaging on the nanometer scale, and a large displacement is needed for the chemical analysis of the material at the end of the probe. The small piezoelectric resonator is formed at the end of a long piezoelectric actuator using a silicon micromachining technology. The resonator can be oscillated at 96.4 kHz, and the actuator generates a maximum displacement of 15 microm at the end of the probe. The dynamic-mode scanning force microscopy capability, using the integrated piezoelectric resonator, is demonstrated on a 2 microm pitch Au grating.
authors.affiliation: Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan. kawai@mems.mech.tohoku.ac.jp
authors.forename: Yusuke
authors.initials: Y
authors.lastname: Kawai
authors.forename: Takahito
authors.initials: T
authors.lastname: Ono
authors.forename: Masayoshi
authors.initials: M
authors.lastname: Esashi
authors.forename: Ernst
authors.initials: E
authors.lastname: Meyer
authors.forename: Christoph
authors.initials: C
authors.lastname: Gerber
mesh_terms: D002623:Chemistry Techniques, Analytical / Q000295:instrumentation* / Q000379:methods; D004867:Equipment Design; D019544:Equipment Failure Analysis; D018625:Microscopy, Atomic Force / Q000295:instrumentation* / Q000379:methods; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D014159:Transducers; D014732:Vibration