title: Feasibility of multi-walled carbon nanotube probes in AFM anodization lithography.
abstract: Multi-walled carbon nanotube (CNT) tips were used in atomic force microscope (AFM) anodization lithography to investigate their advantages over conventional tips. The CNT tip required a larger threshold voltage than the mother silicon tip due to the Schottky barrier at the CNT-Si interface. Current-to-voltage curves distinguished the junction property between CNTs and mother tips. The CNT-platinum tip, which is more conductive than the CNT-silicon tip, showed promising results for AFM anodization lithography. Finally, the nanostructures with high aspect ratio were fabricated using a pulsed bias voltage technique as well as the CNT tip.
authors.affiliation: Department of Chemistry, Hanyang University, Seoul 133-791, Korea.
authors.forename: Ji
authors.initials: J
authors.lastname: Sun Choi
authors.forename: Sukjong
authors.initials: S
authors.lastname: Bae
authors.forename: Sang
authors.initials: S
authors.lastname: Jung Ahn
authors.forename: Dal
authors.initials: D
authors.lastname: Hyun Kim
authors.forename: Ki
authors.initials: K
authors.lastname: Young Jung
authors.forename: Cheolsu
authors.initials: C
authors.lastname: Han
authors.forename: Chung
authors.initials: C
authors.lastname: Choo Chung
authors.forename: Haiwon
authors.initials: H
authors.lastname: Lee