title: Diffraction of evanescent waves and nanomechanical displacement detection.
abstract: Sensitive displacement detection has emerged as a significant technological challenge in mechanical resonators with nanometer-scale dimensions. A novel nanomechanical displacement detection scheme based upon the scattering of focused evanescent fields is proposed. The sensitivity of the proposed approach is studied using diffraction theory of evanescent waves. Diffraction theory results are compared with numerical simulations.
authors.affiliation: Department of Aerospace and Mechanical Engineering, Boston University, Boston, Massachusetts 02215, USA.
authors.forename: Devrez M
authors.initials: DM
authors.lastname: Karabacak
authors.forename: Kamil L
authors.initials: KL
authors.lastname: Ekinci
authors.forename: Choon How
authors.initials: CH
authors.lastname: Gan
authors.forename: Gregory J
authors.initials: GJ
authors.lastname: Gbur
authors.forename: M Selim
authors.initials: MS
authors.lastname: Unlü
authors.forename: Stephen B
authors.initials: SB
authors.lastname: Ippolito
authors.forename: Bennett B
authors.initials: BB
authors.lastname: Goldberg
authors.forename: P Scott
authors.initials: PS
authors.lastname: Carney