[Optimization of prevention for hydrogen chloride exposure during maintenance of tail gas burning tube in film area of chip manufacturing enterprises].
Jiang
Ying-jun
YJ
Liu
Mao
M
D006801:Humans; D006858:Hydrofluoric Acid; D016273:Occupational Exposure / Q000517:prevention & control*; D011482:Protective Devices
D006858:Hydrofluoric Acid