Correlation of reaction sites during the chlorine extraction by hydrogen atom from ClSi(100)-2x1.
The Cl abstraction by gas-phase H atoms from a Cl-terminated Si(100) surface was investigated by scanning tunneling microscopy (STM), high-resolution core level photoemission spectroscopy, and computer simulation. The core level measurements indicate that some additional reactions occur besides the removal of Cl. The STM images show that the Cl-extracted sites disperse randomly in the initial phase of the reaction, but form small clusters as more Cl is removed, indicating a correlation between Cl-extracted sites. These results suggest that the hot-atom process may occur during the atom-adatom collision.
Hsieh
Ming-Feng
MF
Institute of Physics, National Chiao-Tung University, 1001 Ta-Hsueh Road, Hsinchu 300, Taiwan.
Chung
Jen-Yang
JY
Lin
Deng-Sung
DS
Tsay
Shiow-Fon
SF