title: Correlation of reaction sites during the chlorine extraction by hydrogen atom from ClSi(100)-2x1.
abstract: The Cl abstraction by gas-phase H atoms from a Cl-terminated Si(100) surface was investigated by scanning tunneling microscopy (STM), high-resolution core level photoemission spectroscopy, and computer simulation. The core level measurements indicate that some additional reactions occur besides the removal of Cl. The STM images show that the Cl-extracted sites disperse randomly in the initial phase of the reaction, but form small clusters as more Cl is removed, indicating a correlation between Cl-extracted sites. These results suggest that the hot-atom process may occur during the atom-adatom collision.
authors.affiliation: Institute of Physics, National Chiao-Tung University, 1001 Ta-Hsueh Road, Hsinchu 300, Taiwan.
authors.forename: Ming-Feng
authors.initials: MF
authors.lastname: Hsieh
authors.forename: Jen-Yang
authors.initials: JY
authors.lastname: Chung
authors.forename: Deng-Sung
authors.initials: DS
authors.lastname: Lin
authors.forename: Shiow-Fon
authors.initials: SF
authors.lastname: Tsay