Compact ellipsometer employing a static polarimeter module with arrayed polarizer and wave-plate elements.
A portable ellipsometer with a compact static polarimeter using an arrayed polarizer, an arrayed wave plate, and a CCD image sensor is developed. A high level of repeatability at a measurement speed of 0.3 s is demonstrated by measurement of SiO(2) films ranging from 2 to 300 nm in thickness deposited on an Si wafer. There is the potential to realize an ultracompact ellipsometer module by integrating the optical source and receiver, suitable for deployment in a variety of manufacturing equipment and measurement instruments.
Sato
Takashi
T
Photonic Lattice, Inc., Aoba Incubation Square, Aoba, Aramaki, Aoba-ku, Sendai 980-0845, Japan. sato@photonic-lattice.com
Araki
Takeshi
T
Sasaki
Yoshihiro
Y
Tsuru
Toshihide
T
Tadokoro
Toshiyasu
T
Kawakami
Shojiro
S