Linear combinatorial approach to thin film research.
We describe high-throughput experimentation of film synthesis by use of a linear tape transport system (similar to a web-coating system). Metal tape is fed continuously in a reel-to-reel transport system inside the vacuum deposition chamber. Ion-beam assisted deposition (IBAD) texturing is used to enable the growth of epitaxial films on flexible, polycrystalline metal tapes which further enhances the capability of this research. The tape that is continuously fed can be used as a sample itself, via the use of IBAD-textured templates on the tape, or can be a carrier of other smaller substrates (even nonflexible ones). Characterization of samples is done by means of in situ monitoring as well as ex situ sequential analysis. We utilize in situ reflection high-energy electron diffraction for high-throughput analysis of samples. Epitaxial films are deposited on heated samples by evaporation and by pulsed laser deposition. Here, we explain the techniques and the methodologies developed for this type of combinatorial experimentation and show some examples of the material research completed.
Superconductivity Technology Center, Los Alamos National Laboratory, Los Alamos, New Mexico 87545, USA. vlado@lanl.gov
Vladimir
V
Matias
Brady J
BJ
Gibbons
D020650:Combinatorial Chemistry Techniques / Q000295:instrumentation* / Q000379:methods; D003460:Crystallization / Q000295:instrumentation* / Q000379:methods; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008422:Materials Testing / Q000295:instrumentation* / Q000379:methods; D008567:Membranes, Artificial; D012106:Research / Q000295:instrumentation*; D012107:Research Design; D012371:Robotics / Q000295:instrumentation* / Q000379:methods; D013048:Specimen Handling / Q000295:instrumentation* / Q000379:methods
D008567:Membranes, Artificial