Mixed lagrange time delay estimation autoregressive Wiener filter application for real-time SEM image enhancement.
A new filter is developed for the enhancement of scanning electron microscope (SEM) images. A mixed Lagrange time delay estimation auto-regression (MLTDEAR)-based interpolator is used to provide an estimate of noise variance to a standard Wiener filter. A variety of images are captured and the performance of the filter is shown to surpass the conventional noise filters. As all the information required for processing is extracted from a single image, this method is not constrained by image registration requirements and thus can be applied in real-time in cases where specimen drift is presented in the SEM image.
Faculty of Engineering and Technology, Multimedia University, Melaka, Malaysia. kssim@mmu.edu.my
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D007089:Image Enhancement; D007091:Image Processing, Computer-Assisted; D008855:Microscopy, Electron, Scanning / Q000379:methods*; D012984:Software; D014934:Wood / Q000648:ultrastructure