High-throughput combinatorial study of local stress in thin film composition spreads.
We investigate the stresses in thin films with sub-millimeter lateral spatial resolution using a dense array of prefabricated cantilever beams prepared by microelectromechanical-system techniques. Stress induced deflection of the cantilever is interrogated by an optical (laser/position sensitive detector) measurement system. Composition spread films are deposited on the cantilever array using a three gun on-axis magnetron cosputtering system. The position dependent composition is inferred using rate calibrations and verified by electron microprobe/energy dispersive spectroscopy. We demonstrate the function of this system using an Fe-Ni-Al composition spread with approximately 1 at. % resolution. This approach allows for measurement of the composition dependence of other electromechanical properties such as the martensitic phase transition temperature of traditional and ferromagnetic shape-memory alloys, as well as the properties of hydrogen storage materials and the magnetic response of magnetostrictive materials.
Woo
Noble C
NC
Department of Chemistry and Chemical Biology, Cornell University, Ithaca, New York 14853, USA. ncw3@cornell.edu
Ng
Bryan G
BG
van Dover
R Bruce
RB
D020650:Combinatorial Chemistry Techniques / Q000295:instrumentation* / Q000379:methods; D004548:Elasticity; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008422:Materials Testing / Q000295:instrumentation* / Q000379:methods; D008567:Membranes, Artificial; D008846:Micromanipulation / Q000295:instrumentation* / Q000379:methods; D013314:Stress, Mechanical; D014159:Transducers
D008567:Membranes, Artificial