Electron beam nanoprocessing of a carbon nanotube film using a variable pressure scanning electron microscope.
We demonstrate a novel method of processing carbon nanotubes using a variable pressure scanning electron microscope. Lines were processed in a nanotube film by electron beam irradiation in oxygen gas and nitrogen gas. The processing mechanism can be explained in terms of gas ion sputtering and chemical reaction. In this experiment, the narrowest line width of 120 nm was achieved in a nitrogen atmosphere.
Nanomaterials Laboratory, National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan.
Jun-Ichi
J
Niitsuma
Takashi
T
Sekiguchi
Xiao-Li
XL
Yuan
Yuji
Y
Awano
D003460:Crystallization / Q000379:methods*; D004583:Electrons; D046911:Macromolecular Substances / Q000737:chemistry; D008422:Materials Testing; D008567:Membranes, Artificial; D008855:Microscopy, Electron, Scanning / Q000379:methods*; D008968:Molecular Conformation; D036103:Nanotechnology / Q000379:methods*; D037742:Nanotubes, Carbon / Q000737:chemistry* / Q000648:ultrastructure*; D010316:Particle Size; D011312:Pressure; D013499:Surface Properties
D046911:Macromolecular Substances; D008567:Membranes, Artificial; D037742:Nanotubes, Carbon