Gold-catalyzed oxide nanopatterns for the directed assembly of Ge island arrays on Si.
The heteroepitaxial growth of Ge on Au-patterned Si(001) is investigated using in situ spectromicroscopy. Patterning of a hydrogen-terminated Si surface with a square array of Au dots followed by brief exposure to air leads to the spontaneous, local oxidation of Si. The resulting oxide nanopattern limits the surface migration of Au during annealing up to 600 degrees C, resulting in complete preservation of the Au pattern. Subsequent deposition of Ge induces a redistribution of Au across the surface even as the oxide nanopattern persists. As a result, the oxide pattern drives the growth of Ge islands into an ordered assembly, while Au decorates the surfaces of the Ge islands and modifies their shape.
Department of Materials Science and Engineering, University of California, Berkeley, and Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
Jeremy T
JT
Robinson
Fulvio
F
Ratto
Oussama
O
Moutanabbir
Stefan
S
Heun
Andrea
A
Locatelli
T Onur
TO
Mentes
Lucia
L
Aballe
Oscar D
OD
Dubon
D003460:Crystallization / Q000379:methods*; D005857:Germanium / Q000737:chemistry*; D006046:Gold / Q000737:chemistry*; D046911:Macromolecular Substances / Q000737:chemistry; D008422:Materials Testing; D008968:Molecular Conformation; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D036103:Nanotechnology / Q000379:methods; D010087:Oxides / Q000737:chemistry*; D010316:Particle Size; D012825:Silicon / Q000737:chemistry*; D013499:Surface Properties
D046911:Macromolecular Substances; D010087:Oxides; D005857:Germanium; D006046:Gold; D012825:Silicon