High-throughput combinatorial study of local stress in thin film composition spreads.
We investigate the stresses in thin films with sub-millimeter lateral spatial resolution using a dense array of prefabricated cantilever beams prepared by microelectromechanical-system techniques. Stress induced deflection of the cantilever is interrogated by an optical (laser/position sensitive detector) measurement system. Composition spread films are deposited on the cantilever array using a three gun on-axis magnetron cosputtering system. The position dependent composition is inferred using rate calibrations and verified by electron microprobe/energy dispersive spectroscopy. We demonstrate the function of this system using an Fe-Ni-Al composition spread with approximately 1 at. % resolution. This approach allows for measurement of the composition dependence of other electromechanical properties such as the martensitic phase transition temperature of traditional and ferromagnetic shape-memory alloys, as well as the properties of hydrogen storage materials and the magnetic response of magnetostrictive materials.
Department of Chemistry and Chemical Biology, Cornell University, Ithaca, New York 14853, USA. ncw3@cornell.edu
Noble C
NC
Woo
Bryan G
BG
Ng
R Bruce
RB
van Dover
D020650:Combinatorial Chemistry Techniques / Q000295:instrumentation* / Q000379:methods; D004548:Elasticity; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008422:Materials Testing / Q000295:instrumentation* / Q000379:methods; D008567:Membranes, Artificial; D008846:Micromanipulation / Q000295:instrumentation* / Q000379:methods; D013314:Stress, Mechanical; D014159:Transducers
D008567:Membranes, Artificial