A simple polysilsesquioxane sealing of nanofluidic channels below 10 nm at room temperature.
We present a simple sealing method to fabricate nanofluidic channels, where plasma treated polysilsesquioxane (PSQ) thin film on a rigid support is used to bond to a hydrophilic glass surface permanently at room temperature. This method shows precise dimension control below 10 nm with easy experimental setup. Using this method, one dimensional confined shallow nanochannels with a depth as small as 8 nm and an aspect ratio of <4 x 10(-5), two dimensional confined nanochannel arrays, and integrated nano/microchannel devices with a micro-to-nano interface have been demonstrated. Smooth transfer of DNA fragments from microchannel to nanochannel through the interface area was observed.
Gu
Jian
J
Center for Applied Nanobioscience, The Biodesign Institute at Arizona State University, Tempe, AZ 85287, USA. Jian.Gu@asu.edu Frederic.Zenhausern@asu.edu
Gupta
Ravi
R
Chou
Chia-Fu
CF
Wei
Qihuo
Q
Zenhausern
Frederic
F
D004867:Equipment Design; D019544:Equipment Failure Analysis; D008027:Light; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation* / Q000379:methods; D049329:Nanostructures / Q000737:chemistry* / Q000528:radiation effects / Q000648:ultrastructure*; D036103:Nanotechnology / Q000295:instrumentation* / Q000379:methods; D017646:Organosilicon Compounds / Q000737:chemistry* / Q000528:radiation effects; D010316:Particle Size; D010777:Photochemistry / Q000379:methods; D013499:Surface Properties; D013696:Temperature
C512088:1,3-bis(1,1,3,3,5,5-hexaethoxy-1,3,5-trisilacyclohexyl)propane; D017646:Organosilicon Compounds