title: Optical characterization of hybrid antireflective coatings using spectrophotometric and ellipsometric measurements.
abstract: A hybrid antireflective coating combining homogeneous layers and linear gradient refractive index layers has been deposited using different techniques. The samples were analyzed optically based on spectrophotometric and spectroscopic ellipsometry measurements under different angles of incidence in order to precisely characterize the coatings. The Lorentz-Lorenz model has been used to calculate the refractive index of material mixtures in gradient and constant index layers of the coating. The obtained refractive index profiles have been compared with the targeted ones to detect errors in processes of deposition.
authors: Ruder Bosković Institute, Bijenicka 54, 10000 Zagreb, Croatia. janicki@irb.hr
authors: Vesna
authors: V
authors: Janicki
authors: Jordi
authors: J
authors: Sancho-Parramon
authors: Olaf
authors: O
authors: Stenzel
authors: Marc
authors: M
authors: Lappschies
authors: Björn
authors: B
authors: Görtz
authors: Christoph
authors: C
authors: Rickers
authors: Christina
authors: C
authors: Polenzky
authors: Uwe
authors: U
authors: Richter