Design and dynamic evaluation for a linear ultrasonic stage using the thin-disc structure actuator.
The design of a novel, single-axis ultrasonic actuating stage has been proposed. It consists of a movable plate, an edge-driving ultrasonic actuator as an actuating device, and a magnetic Magi encoder as a position sensor. The stage is impelled using a friction-contact mechanism by the ultrasonic actuator with long distance movement. Very high actuating and braking abilities are obtained. The stable and precise positioning control of the stage was achieved by using a neural-fuzzy controller. This simple and inexpensive structure of the single-axis stage demonstrates that the mechanical design of ultrasonic actuating concept could be done flexibly according to the requirements for various applications.
Wen
Fuhliang
F
Department of Mechanical and Computer-Aided Engineering, Graduate School of Automation and Mechatronics, St. John's University, 499 Sec. 4 Tam King Road, Tamsui, Taipei 25135, Taiwan. ericwen@mail.sju.edu.tw
Yen
C-Y
CY
D003198:Computer Simulation; D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D016014:Linear Models; D008567:Membranes, Artificial; D008846:Micromanipulation / Q000295:instrumentation* / Q000379:methods; D009038:Motion; D014159:Transducers; D014465:Ultrasonics
D008567:Membranes, Artificial