Analysis of a spatially dispersive displacement sensor utilizing an AlGaInP chip.
We present a demonstration and analysis of an industrialized design of a spatially dispersive displacement sensor, which is composed of an AlGaInP gain chip in visible range, optical assembly, and a spectrum analyzer. The sensor utilizes the spatial dispersion of focus from the optical assembly and wavelength spectrum's deviation induced by the displacement of the target. As a result, the sensor delivers a quick and simple way of measuring displacement. By adapting the magnification and resolution of the optical assembly, a displacement sensor with a middle measurement range, ~10 microm, was obtained. However, we should note that 25 nm resolution is limited by the bandwidth and temperature fluctuation of the gain chip.
Horng
Ji-Bin
JB
Laser Application Technology Center, Industrial Technology Reasearch Institute, Number 8, Gongyan Road, Liujia Shiang, Tainan County 734, Taiwan.
Liao
Jay
J
Tsai
Yao-Jun
YJ
Huang
Yen-Chen
YC
Hu
Chieh
C
Tsau
Seth
S
Su
Yan-Kuin
YK
Chou
Wei-Yang
WY