Measurement of ion energy distributions using a combined energy and mass analyzer.
A method is described for measuring ion energy distributions using a commercially available, combined energy analyzer/mass spectrometer. The distributions were measured at an electrode located adjacent to pulsed, electron beam-generated plasmas produced in argon. The method uses energy-dependent tuning and was tested for various plasma conditions. The results indicate an improved collection efficiency of low-energy ions when compared to conventional approaches in measuring ion energy distributions.
Walton
S G
SG
Plasma Physics Division, US Naval Research Laboratory, Washington, DC 20375, USA.
Fernsler
R F
RF
Leonhardt
D
D
D017076:Computer-Aided Design; D004566:Electrodes; D004735:Energy Transfer; D004867:Equipment Design; D019544:Equipment Failure Analysis; D005740:Gases / Q000737:chemistry*; D006358:Hot Temperature; D007477:Ions; D013058:Mass Spectrometry / Q000295:instrumentation* / Q000379:methods; D011874:Radiometry / Q000295:instrumentation* / Q000379:methods; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity
D005740:Gases; D007477:Ions