title: Ngnochannel array glass.
abstract: The fabrication and characterization of a glass containing a regular parallel array of submicrometer channels or capillaries are described. The capillaries are arranged in a two-dimensional hexagonal close packing configuration with channel diameters as small as 33 nanometers and packing densities as high as 3 x 10(10) channels per square centimeter. The high-temperature stability of the nanochannel glass array is well suited as a host or template for the formation of quantum confined semiconductor structures or as a mask for massively parallel patterned lithographic applications.
authors.forename: R J
authors.initials: RJ
authors.lastname: Tonucci
authors.forename: B L
authors.initials: BL
authors.lastname: Justus
authors.forename: A J
authors.initials: AJ
authors.lastname: Campillo
authors.forename: C E
authors.initials: CE
authors.lastname: Ford