Mass detection using capacitive resonant silicon resonator employing LC resonant circuit technique.
Capacitive resonant mass sensing using a single-crystalline silicon resonator with an electrical LC oscillator was demonstrated in ambient atmosphere. Using capacitive detection method, the detectable minimum mass of 1 x 10(-14) g was obtained in the self-oscillation of cantilever with a thickness of 250 nm. The noise amplitude of the sensor output corresponds to a vibration amplitude of 0.05 nm(Hz)(0.5) in the frequency domain compared with the actuation signal, which is equivalent to the detectable minimum capacitance variation of 2.4 x 10(-21) F. Using the capacitive detection method, mass/stress induced resonance frequency shift due to the adsorption of ethanol and moist vapor in a pure N(2) gas as a carrier is successfully demonstrated. These results show the high potential of capacitive silicon resonator for high mass/stress-sensitive sensor.
Kim
Sang-Jin
SJ
Graduate School of Engineering, Tohoku University, 6-6-01 Aza Aoba, Aramaki, Sendai, Japan. sjkim@mems.mech.tohoku.ac.jp
Ono
Takahito
T
Esashi
Masayoshi
M
D017076:Computer-Aided Design; D025802:Electric Capacitance; D004867:Equipment Design; D019544:Equipment Failure Analysis; D005740:Gases / Q000032:analysis / Q000737:chemistry*; D008839:Microelectrodes; D008970:Molecular Weight; D010992:Plethysmography, Impedance / Q000295:instrumentation* / Q000379:methods; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D012825:Silicon; D014159:Transducers
D005740:Gases; D012825:Silicon