title: Measurement of ion energy distributions using a combined energy and mass analyzer.
abstract: A method is described for measuring ion energy distributions using a commercially available, combined energy analyzer/mass spectrometer. The distributions were measured at an electrode located adjacent to pulsed, electron beam-generated plasmas produced in argon. The method uses energy-dependent tuning and was tested for various plasma conditions. The results indicate an improved collection efficiency of low-energy ions when compared to conventional approaches in measuring ion energy distributions.
authors.affiliation: Plasma Physics Division, US Naval Research Laboratory, Washington, DC 20375, USA.
authors.forename: S G
authors.initials: SG
authors.lastname: Walton
authors.forename: R F
authors.initials: RF
authors.lastname: Fernsler
authors.forename: D
authors.initials: D
authors.lastname: Leonhardt
mesh_terms: D017076:Computer-Aided Design; D004566:Electrodes; D004735:Energy Transfer; D004867:Equipment Design; D019544:Equipment Failure Analysis; D005740:Gases / Q000737:chemistry*; D006358:Hot Temperature; D007477:Ions; D013058:Mass Spectrometry / Q000295:instrumentation* / Q000379:methods; D011874:Radiometry / Q000295:instrumentation* / Q000379:methods; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity
chemical_list: D005740:Gases; D007477:Ions