title: Laser-induced chemistry for microelectronics.
abstract: Laser-controlled chemical reactions are being explored for use in all phases of the processing of semiconductor devices. Laser-induced chemical processing can produce submicrometer features without the aid of photolithography. Research is also providing new information on light-excited and light-enhanced interface reactions.
authors.forename: R M
authors.initials: RM
authors.lastname: Osgood
authors.forename: T F
authors.initials: TF
authors.lastname: Deutsch