title: Ultrahigh-Resolution X-ray Tomography.
abstract: Ultrahigh-resolution three-dimensional images of a microscopic test object were made with soft x-rays collected with a scanning transmission x-ray microscope. The test object consisted of two different patterns of gold bars on silicon nitride windows that were separated by approximately 5 micrometers. Depth resolution comparable to the transverse resolution was achieved by recording nine two-dimensional images of the object at angles between -50 and +55 degrees with respect to the beam axis. The projections were then combined tomographically to form a three-dimensional image by means of an algorithm using an algebraic reconstruction technique. A transverse resolution of approximately 1000 angstroms was observed. Artifacts in the reconstruction limited the overall depth resolution to approximately 6000 angstroms; however, some features were clearly reconstructed with a depth resolution of approximately 1000 angstroms.
authors.forename: W S
authors.initials: WS
authors.lastname: Haddad
authors.forename: I
authors.initials: I
authors.lastname: McNulty
authors.forename: J E
authors.initials: JE
authors.lastname: Trebes
authors.forename: E H
authors.initials: EH
authors.lastname: Anderson
authors.forename: R A
authors.initials: RA
authors.lastname: Levesque
authors.forename: L
authors.initials: L
authors.lastname: Yang