title: Fabrication and properties of free-standing c60 membranes.
abstract: Van der Waals forces that bind C(60) molecular solids are found to be sufficiently strong to allow the reproducible fabrication of free-standing C(60) membranes on (100) silicon wafers. Membranes, 2000 to 6000 angstroms thick, were fabricated by a modified silicon micro-machining process and were found to be smooth, flat, and mechanically robust. An important aspect of the silicon-compatible fabrication procedure is the demonstration that C(60) films can be uniformly and nondestructively thinned in a CF(4) plasma. Young's modulus and fracture strength measurements were made on membranes with areas larger than 6 millimeters by 6 millimeters. It may be possible to use C(60), membranes for physical property measurements and applications.
authors.forename: C B
authors.initials: CB
authors.lastname: Eom
authors.forename: A F
authors.initials: AF
authors.lastname: Hebard
authors.forename: L E
authors.initials: LE
authors.lastname: Trimble
authors.forename: G K
authors.initials: GK
authors.lastname: Celler
authors.forename: R C
authors.initials: RC
authors.lastname: Haddon