Fabrication and properties of free-standing c60 membranes.
Van der Waals forces that bind C(60) molecular solids are found to be sufficiently strong to allow the reproducible fabrication of free-standing C(60) membranes on (100) silicon wafers. Membranes, 2000 to 6000 angstroms thick, were fabricated by a modified silicon micro-machining process and were found to be smooth, flat, and mechanically robust. An important aspect of the silicon-compatible fabrication procedure is the demonstration that C(60) films can be uniformly and nondestructively thinned in a CF(4) plasma. Young's modulus and fracture strength measurements were made on membranes with areas larger than 6 millimeters by 6 millimeters. It may be possible to use C(60), membranes for physical property measurements and applications.
Eom
C B
CB
Hebard
A F
AF
Trimble
L E
LE
Celler
G K
GK
Haddon
R C
RC