Imprinted optical pattern of low-softening phosphate glass.
Thermal imprinting of transparent tin phosphate glass was performed at 250 degrees C using a fine-patterned silica mold. The glass sample was prepared by a conventional melt-quenching method and polished with a roughness of < or =10 nm for imprinting experiments. The imprinting temperature is optimized based on experimental viscosity data. Scanning electron microscope and atomic force microscope observations revealed that a square grid pattern has a surface roughness of < or =10 nm and 5 microm x 5 microm squares with ~1 microm intervals and 90-100 nm depth. Diffraction spots due to the micropattern are demonstrated by illuminating He-Ne laser light.
Takebe
Hiromichi
H
Faculty of Engineering Sciences, Kyushu University, Kasuga, Fukuoka, Japan. takebe@asem.kyushu-u.ac.jp
Kuwabara
Makoto
M
Komori
Masaharu
M
Fukugami
Norihito
N
Soma
Munehisa
M
Kusuura
Takahisa
T