Mold and metallization: nanocontact molding for the fabrication of metal structures.
Hagberg
Erik C
EC
IBM Almaden Research Center, 650 Harry Road, San Jose, CA 95120, USA.
Scott
J Campbell
JC
Shaw
Justine A
JA
von Werne
Timothy A
TA
Maegerlein
Janet A
JA
Carter
Kenneth R
KR
D003300:Copper / Q000737:chemistry*; D053768:Metal Nanoparticles / Q000737:chemistry*; D018625:Microscopy, Atomic Force; D008855:Microscopy, Electron, Scanning; D036103:Nanotechnology / Q000379:methods*; D011108:Polymers / Q000737:chemistry
D011108:Polymers; D003300:Copper