title: Synthesis and characterization of diorganohydrazido(2-) tungsten complexes.
abstract: Diorganohydrazido(2-) complexes of tungsten (L)Cl4W(NNR2) [R2=Me2, Ph2, -(CH2)5-; L=CH3CN, pyridine] were synthesized by reacting the corresponding 1,1-diorganohydrazine with WCl6, followed by reaction with acetonitrile or pyridine. Crystallographic structure determination of (CH3CN)Cl4W(NNMe2) and (CH3CN)Cl4W(NNPh2) allows a comparison of the structural features of the diorganohydrazido(2-) functionality with varying substituents. Mass spectrometry, thermogravimetric analysis, and preliminary chemical vapor deposition experiments were performed to determine the viability of these complexes as single-source precursors for deposition of WNx and WNxCy films.
authors.affiliation: Department of Chemistry, University of Florida, Gainesville, FL 32611-7200, USA.
authors.forename: Jürgen
authors.initials: J
authors.lastname: Koller
authors.forename: Hiral M
authors.initials: HM
authors.lastname: Ajmera
authors.forename: Khalil A
authors.initials: KA
authors.lastname: Abboud
authors.forename: Timothy J
authors.initials: TJ
authors.lastname: Anderson
authors.forename: Lisa
authors.initials: L
authors.lastname: McElwee-White