title: Functional integrated optical elements for beam shaping with coherence scrambling property, realized by interference lithography.
abstract: Many applications, such as semiconductor lithography and material processing, require the shaping of laser beams to provide a homogenous field illumination. We present the conception, implementation, and experimental verification of a combined single-element homogenizer. Additionally, for excimer laser applications, the concept is associated with a coherence scrambling capability. We used the technique of holographic interference lithography to integrate the multifunctional properties in a diffractive optical element. The wavelength difference between the recording process (457.9 nm) and the application (193 nm) results in a change of the imaging properties and requires a geometrical adaptation of the optical setup. The coherence scrambling effect of the setup is based on an off-axis design, including the beam shaping diffractive structure.
authors: Carl Zeiss AG, Jena, Germany. m.burkhardt@zeiss.de
authors: Matthias
authors: M
authors: Burkhardt
authors: Robert
authors: R
authors: Brunner