title: Microfluidic flow rate detection based on integrated optical fiber cantilever.
abstract: We demonstrate an integrated microfluidic flow sensor with ultra-wide dynamic range, suitable for high throughput applications such as flow cytometry and particle sorting/counting. A fiber-tip cantilever transduces flow rates to optical signal readout, and we demonstrate a dynamic range from 0 to 1500 microL min(-1) for operation in water. Fiber-optic sensor alignment is guided by preformed microfluidic channels, and the dynamic range can be adjusted in a one-step chemical etch. An overall non-linear response is attributed to the far-field angular distribution of single-mode fiber output.
authors: Rowland Institute, Harvard University, 100 Edwin H. Land Blvd, Cambridge, MA 02142, USA. lien@rowland.harvard.edu
authors: Victor
authors: V
authors: Lien
authors: Frank
authors: F
authors: Vollmer
mesh_terms: D003198:Computer Simulation; D017076:Computer-Aided Design; D005336:Fiber Optic Technology / Q000295:instrumentation* / Q000379:methods; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation* / Q000379:methods; D008962:Models, Theoretical; D055100:Optical Fibers; D012031:Refractometry / Q000295:instrumentation* / Q000379:methods; D018511:Systems Integration