Synthesis of metal chalcogenide nanodot arrays using block copolymer-derived nanoreactors.
Soluble metal chalcogenide precursors are used to fabricate arrays of metal chalcogenide nanodots by spin-coating. Nanodots are formed after thermal decomposition of the precursors, which are collected in patterned nanowell arrays. These arrays are derived from block copolymer patterns and may consist of the polymer itself or result from etching to transfer the pattern to an inorganic substrate. Etching provides enhanced control over nanowell shape and the morphology of the resulting metal chalcogenide array.
Milliron
Delia J
DJ
IBM Almaden Research Center, 650 Harry Road, San Jose, California 95120, USA. milliron@us.ibm.com
Caldwell
Marissa A
MA
Wong
H-S Philip
HS
D000965:Antimony / Q000737:chemistry; D005857:Germanium / Q000737:chemistry; D053768:Metal Nanoparticles / Q000737:chemistry*; D008670:Metals / Q000737:chemistry; D018625:Microscopy, Atomic Force; D046529:Microscopy, Electron, Transmission; D053758:Nanoparticles / Q000737:chemistry*; D036103:Nanotechnology / Q000379:methods*; D011108:Polymers / Q000737:chemistry*; D045663:Quantum Dots; D012643:Selenium / Q000737:chemistry; D012822:Silicon Dioxide / Q000737:chemistry
D008670:Metals; D011108:Polymers; D005857:Germanium; D012822:Silicon Dioxide; D000965:Antimony; D012643:Selenium