Cancellation of the zeroth order in a phase mask by mode interplay in a high index contrast binary grating.
A new grating phase mask is designed that allows the cancellation of the zeroth transmitted order in a diffraction configuration where the grating period is smaller than twice the exposure wavelength. An analytical treatment based on the true-mode method delivers the structure parameters, achieving 100% interference contrast. This modal approach is used to describe the modal operation of the giant reflection to zero-order device.
Gamet
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Laboratoire Hubert Curien UMR CNRS 5516 (formerly TSI), Jean Monnet University, 18, Rue B. Lauras, F-42000 Saint-Etienne, France.
Tishchenko
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AV
Parriaux
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