title: A pyrazolate-based metalorganic tantalum precursor that exhibits high thermal stability and its use in the atomic layer deposition of ta(2)o(5).
authors: Laboratory of Inorganic and Analytical Chemistry, Department of Chemical Technology, Helsinki University of Technology, P.O. Box 6100, FI-02015 Espoo, Finland.
authors: Charles L
authors: CL
authors: Dezelah
authors: Monika K
authors: MK
authors: Wiedmann
authors: Kenichiro
authors: K
authors: Mizohata
authors: Ronald J
authors: RJ
authors: Baird
authors: Lauri
authors: L
authors: Niinistö
authors: Charles H
authors: CH
authors: Winter