Enlarged atomic force microscopy scanning scope: novel sample-holder device with millimeter range.
We propose a homemade sample-holder unit used for nanopositionning in two dimensions with a millimeter traveling range. For each displacement axis, the system includes a long range traveling stage and a piezoelectric actuator for accurate positioning. Specific electronics is integrated according to metrological considerations, enhancing the repeatability performances. The aim of this work is to demonstrate that near-field microscopy at the scale of a chip is possible. For this we chose to characterize highly integrated optical structures. For this purpose, the sample holder was integrated into an atomic force microscope. A millimeter scale topographical image demonstrates the overall performances of the combined system.
Sinno
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A
LISV, University of Versailles, 45 Avenue des Etats Unis, 78035 Versailles, France.
Ruaux
P
P
Chassagne
L
L
Topçu
S
S
Alayli
Y
Y
Lerondel
G
G
Blaize
S
S
Bruyant
A
A
Royer
P
P