title: Atomic beam-induced fluorination of polyimide and its application to site-selective Cu metallization.
abstract: Metallization methods of polyimide by hyperthermal atomic oxygen and atomic fluorine beams were developed. An atomic fluorine beam with a translational energy of 6.2 eV modified the wettability of polyimide surfaces to provide an advancing water contact angle of 132 degrees. It was confirmed that in-air storage for 2 months did not alter the hydrophobic property created by the atomic fluorine beam. This stable beam-induced surface fluorination technique was then applied to site-selective electroless Cu plating on polyimide. It was demonstrated that changing the exposure sequence could create both positive- and negative-type plating processes.
authors.affiliation: Faculty of Engineering, Kobe University, Rokko-dai 1-1, Nada, Kobe 657-8501 Japan. tagawa@mech.kobe-u.ac.jp
authors.forename: Masahito
authors.initials: M
authors.lastname: Tagawa
authors.forename: Ken-ichi
authors.initials: K
authors.lastname: Maeda
authors.forename: Tadashi
authors.initials: T
authors.lastname: Kajita
authors.forename: Kumiko
authors.initials: K
authors.lastname: Yokota
authors.forename: Kensuke
authors.initials: K
authors.lastname: Akamatsu
authors.forename: Hidemi
authors.initials: H
authors.lastname: Nawafune