title: New technology for high throughput THz BioMEMS.
abstract: We propose a new technology for high throughput bioMEMS based on a mixed technology polymer on silicon. This technology is compatible with microelectronic processes, the electromagnetic propagation, the microfluidic circulation and the biological solutions. We use a new process and a new polymer deposited by a "cold" plasma technique. We can use it for a surface functionalization or for the encapsulation with plasma assisted wafer bonding.
authors.affiliation: Microsyst. Microfluidics & Thz Group, Lille Univ., Villeneuve d'Ascq, France.
authors.forename: V
authors.initials: V
authors.lastname: Mille
authors.forename: N E
authors.initials: NE
authors.lastname: Bourzgui
authors.forename: C
authors.initials: C
authors.lastname: Vivien
authors.forename: P
authors.initials: P
authors.lastname: Supiot
authors.forename: B
authors.initials: B
authors.lastname: Bocquet
mesh_terms: D001698:Biomedical Engineering; D015374:Biosensing Techniques / Q000295:instrumentation*; D001709:Biotechnology; D055590:Electromagnetic Phenomena; D004867:Equipment Design; D046210:Microfluidic Analytical Techniques; D011108:Polymers; D012825:Silicon; D013499:Surface Properties
chemical_list: D011108:Polymers; D012825:Silicon