New technology for high throughput THz BioMEMS.
We propose a new technology for high throughput bioMEMS based on a mixed technology polymer on silicon. This technology is compatible with microelectronic processes, the electromagnetic propagation, the microfluidic circulation and the biological solutions. We use a new process and a new polymer deposited by a "cold" plasma technique. We can use it for a surface functionalization or for the encapsulation with plasma assisted wafer bonding.
Mille
V
V
Microsyst. Microfluidics & Thz Group, Lille Univ., Villeneuve d'Ascq, France.
Bourzgui
N E
NE
Vivien
C
C
Supiot
P
P
Bocquet
B
B
D001698:Biomedical Engineering; D015374:Biosensing Techniques / Q000295:instrumentation*; D001709:Biotechnology; D055590:Electromagnetic Phenomena; D004867:Equipment Design; D046210:Microfluidic Analytical Techniques; D011108:Polymers; D012825:Silicon; D013499:Surface Properties
D011108:Polymers; D012825:Silicon