Analysis of temperature compensation in a plate thickness mode bulk acoustic wave resonator.
We analyze temperature-induced frequency shift in a thickness mode bulk acoustic wave resonator with a layer of another material for temperature compensation. The perturbation integral by Tiersten is used to calculate frequency shifts in the resonator under a temperature change. It is shown that, with a proper design of the compensation layer, temperature sensitivity of the resonator can be reduced or made zero.
Xue
Huan
H
Department of Mechanics, School of Civil Engineering and Mechanics, Huazhong University of Science and Technology, Wuhan 430074, China.
Hu
Yuantai
Y
Wang
Qing-Ming
QM
Yang
Jiashi
J
D000162:Acoustics / Q000295:instrumentation*; D016477:Artifacts; D003198:Computer Simulation; D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008962:Models, Theoretical; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D013696:Temperature; D014159:Transducers