title: Directed growth of horizontally aligned gallium nitride nanowires for nanoelectromechanical resonator arrays.
abstract: We report the growth of horizontally aligned arrays and networks of GaN nanowires (NWs) as resonant components in nanoelectromechanical systems (NEMS). A combination of top-down selective area growth (SAG) and bottom-up vapor-liquid-solid (VLS) synthesis enables flexible fabrication of highly ordered nanowire arrays in situ with no postgrowth dispersion. Mechanical resonance of free-standing nanowires are measured, with quality factors (Q) ranging from 400 to 1000. We obtained a Young's modulus (E) of approximately 338 GPa from an array of NWs with varying diameters and lengths. The measurement allows detection of nanowire motion with a rotating frame and reveals dual fundamental resonant modes in two orthogonal planes. A universal ratio between the resonant frequencies of these two fundamental modes, irrespective of their dimensions, is observed and attributed to an isosceles cross section of GaN NWs.
authors.affiliation: Department of Electrical Engineering, Yale University, New Haven, Connecticut 06520, USA.
authors.forename: Tania
authors.initials: T
authors.lastname: Henry
authors.forename: Kyungkon
authors.initials: K
authors.lastname: Kim
authors.forename: Zaiyuan
authors.initials: Z
authors.lastname: Ren
authors.forename: Christopher
authors.initials: C
authors.lastname: Yerino
authors.forename: Jung
authors.initials: J
authors.lastname: Han
authors.forename: Hong X
authors.initials: HX
authors.lastname: Tang
mesh_terms: D002384:Catalysis; D004563:Electrochemistry / Q000379:methods; D005708:Gallium / Q000737:chemistry*; D053768:Metal Nanoparticles / Q000737:chemistry; D008855:Microscopy, Electron, Scanning; D015233:Models, Statistical; D053758:Nanoparticles / Q000737:chemistry*; D036103:Nanotechnology / Q000379:methods*; D043942:Nanotubes / Q000737:chemistry*; D053770:Nanowires / Q000737:chemistry*; D010316:Particle Size; D013499:Surface Properties
chemical_list: C473348:gallium nitride; D005708:Gallium