title: Mechanical properties of micro probe and tube array for neural penetrating devices.
abstract: This paper describes the fabrication of Si micro probe and SiO(2) micro tube array and their mechanical properties. The device is successfully fabricated with high-density array. One of the requirements of the penetrating device is to have the enough mechanical strength to be able to penetrate into the tissue. Hence mechanical properties are investigated and discussed using the results on bending obtained by experiments and simulation of finite element method. The device was penetrated by simple in-vitro experiments using a gelatin.
authors.affiliation: Department of Electrical and Electronic Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan. takei@dev.eee.tut.ac.jp
authors.forename: Kuniharu
authors.initials: K
authors.lastname: Takei
authors.forename: Takahiro
authors.initials: T
authors.lastname: Kawashima
authors.forename: Kazuaki
authors.initials: K
authors.lastname: Sawada
authors.forename: Makoto
authors.initials: M
authors.lastname: Ishida
mesh_terms: D000818:Animals; D001921:Brain / Q000502:physiology*; D006801:Humans; D009415:Nerve Net / Q000502:physiology*; D009482:Neurophysiology / Q000295:instrumentation* / Q000379:methods; D012825:Silicon / Q000737:chemistry*; D012822:Silicon Dioxide / Q000737:chemistry*
chemical_list: D012822:Silicon Dioxide; D012825:Silicon