Evaluation of both image resolution and contrast-to-noise ratio in scanning electron microscopy.
The contrast-to-gradient (CG) resolution has been defined as a weighted harmonic mean of the local resolution, i.e. the length defining the object's local fine structure at each pixel position. The newly defined resolution Res is defined as 2 sigma/ sqrt 2, where 2 sigma is a sharpness factor of the image pattern obtained by the conversion 2 sigma = ARCG + B using default constants A and B. In the present study, we have extended the algorithm to change the constants from default values to calibrated ones using standard images that are same in both pattern and contrast-to-noise ratio (CNR) as the original SEM image to be evaluated. The calibrated image resolution with a weak noise dependency is evaluated with the CNR as a given parameter.
Ishitani
Tohru
T
Research and Development Division, Nanotechnology Products Business Group, Hitachi High-Technologies Corp., 882 Ichige, Hitachinaka-shi, Ibaraki-ken 312-8504, Japan. ishitani-tohru@naka.hitachi-hitec.com
Sato
Mitsugu
M