title: Digital holographic microscopy in the deep (193 nm) ultraviolet.
abstract: We present a system based on digital holography suitable for the investigation of microscopic objects. To increase the resolution of the system a deep (193 nm) UV laser source has been used. A method for compensating aberrations due to the non-perfect optical elements used for the recording has been developed. The system allows the investigation of reflecting and transmitting samples.
authors.affiliation: Institut für Technische Optik, Universität Stuttgart, Pfaffenwaldring 9, 70569 Stuttgart, Germany. pedrini@ito.uni-stuttgart.de
authors.forename: Giancarlo
authors.initials: G
authors.lastname: Pedrini
authors.forename: Fucai
authors.initials: F
authors.lastname: Zhang
authors.forename: Wolfgang
authors.initials: W
authors.lastname: Osten