Fabry-Perot diaphragm fiber-optic sensor.
The general theory of a diaphragm fiber-optic sensor (DFOS) is proposed. We use a critical test to determine if a DFOS is based on Fabry-Perot interference or intensity modulation. By use of the critical test, this is the first design, to the best of our knowledge, of a purely Fabry-Perot DFOS, fabricated with microelectromechanical system technology, and characterized as an audible microphone and ultrasonic hydrophone with orders of improvement in signal-to-noise ratio.
Chin
Ken K
KK
Department of Physics, New Jersey Institute of Technology, Newark, New Jersey 07102, USA. chin@njit.edu
Sun
Yan
Y
Feng
Guanhua
G
Georgiou
George E
GE
Guo
Kangzhu
K
Niver
Edip
E
Roman
Harry
H
Noe
Karen
K