Digital holographic microscopy in the deep (193 nm) ultraviolet.
We present a system based on digital holography suitable for the investigation of microscopic objects. To increase the resolution of the system a deep (193 nm) UV laser source has been used. A method for compensating aberrations due to the non-perfect optical elements used for the recording has been developed. The system allows the investigation of reflecting and transmitting samples.
Pedrini
Giancarlo
G
Institut für Technische Optik, Universität Stuttgart, Pfaffenwaldring 9, 70569 Stuttgart, Germany. pedrini@ito.uni-stuttgart.de
Zhang
Fucai
F
Osten
Wolfgang
W