title: Integrated nanoelectronics for the future.
authors.affiliation: Component Research, Technology and Manufacturing Group, Intel Corporation, 5200 NE Elam Young Parkway, Hillsboro, Oregon 97124, USA. robert.s.chau@intel.com
authors.forename: Robert
authors.initials: R
authors.lastname: Chau
authors.forename: Brian
authors.initials: B
authors.lastname: Doyle
authors.forename: Suman
authors.initials: S
authors.lastname: Datta
authors.forename: Jack
authors.initials: J
authors.lastname: Kavalieros
authors.forename: Kevin
authors.initials: K
authors.lastname: Zhang