title: MoRu-Be multilayer-coated grating with 10.4% normal-incidence efficiency near the 11.4-nm wavelength.
abstract: A MoRu-Be multilayer coating was applied to a diffraction grating to enhance the grating's normal-incidence efficiency near 11.4 nm wavelength. The holographic grating substrate had a blazed groove profile with 2400 grooves/mm and a microroughness of 0.8 nm. The efficiency in the second diffraction order, measured with synchrotron radiation, was 10.4% at a wavelength of 11.37 nm.
authors.forename: C
authors.initials: C
authors.lastname: Montcalm
authors.forename: S
authors.initials: S
authors.lastname: Bajt
authors.forename: J F
authors.initials: JF
authors.lastname: Seely