title: Real-time gray-scale photolithography for fabrication of continuous microstructure.
abstract: A novel real-time gray-scale photolithography technique for the fabrication of continuous microstructures that uses a LCD panel as a real-time gray-scale mask is presented. The principle of design of the technique is explained, and computer simulation results based on partially coherent imaging theory are given for the patterning of a microlens array and a zigzag grating. An experiment is set up, and a microlens array and a zigzag grating on panchromatic silver halide sensitized gelatin with trypsinase etching are obtained.
authors.forename: Qinjun
authors.initials: Q
authors.lastname: Peng
authors.forename: Yongkang
authors.initials: Y
authors.lastname: Guo
authors.forename: Shijie
authors.initials: S
authors.lastname: Liu
authors.forename: Zheng
authors.initials: Z
authors.lastname: Cui