title: Microfabrication of cavities in polydimethylsiloxane using DRIE silicon molds.
abstract: We present a novel method to create cavities in PDMS that is simple and exhibits wide process latitude allowing control over the radius of curvature to form shallow concave pits or deep spherical cavities.
authors.affiliation: Department of Biomedical Engineering, University of Rochester, RC Box 270168, Goergen Hall, Rochester, NY 14627, USA.
authors.forename: Ut-Binh T
authors.initials: UB
authors.lastname: Giang
authors.forename: Dooyoung
authors.initials: D
authors.lastname: Lee
authors.forename: Michael R
authors.initials: MR
authors.lastname: King
authors.forename: Lisa A
authors.initials: LA
authors.lastname: DeLouise
mesh_terms: D004129:Dimethylpolysiloxanes / Q000737:chemistry*; D007477:Ions / Q000737:chemistry; D008855:Microscopy, Electron, Scanning; D012825:Silicon / Q000737:chemistry*; D012828:Silicones / Q000737:chemistry*
chemical_list: D004129:Dimethylpolysiloxanes; D007477:Ions; D012828:Silicones; C013830:baysilon; D012825:Silicon