title: Noninterferometric wide-field optical profilometry with nanometer depth resolution.
abstract: Applying the principle of differential confocal microscopy to wide-field optically sectioning microscopy, we develop a noninterferometric optical profilometer without scanning mechanisms. Depth resolution of 2 nm is achieved with a power-regulated tungsten-halogen lamp as the light source and a 14-bit CCD camera as the detector. The effects of inhomogeneous surface reflectivity are removed from topographic measurements by arithmetic division. The whole system can be constructed on a single silicon chip for use as a miniaturized optical profiler.
authors.forename: Chau-Hwang
authors.initials: CH
authors.lastname: Lee
authors.forename: Hong-Yao
authors.initials: HY
authors.lastname: Mong
authors.forename: Wan-Chen
authors.initials: WC
authors.lastname: Lin