title: Dual-wavelength parallel interferometer with superhigh resolution.
abstract: A dual-wavelength parallel interferometer for subnanometer displacement measurement is introduced. A synthetic wavelength is used to subdivide the fringes formed by a single wavelength. An experimental setup that uses a heat-stabilizing dual-wavelength 633-nm He-Ne laser as the light source is established. The primary experimental result shows that a resolution of 0.210 nm over a 350-nm range has been achieved.
authors.forename: Yang
authors.initials: Y
authors.lastname: Zhao
authors.forename: Xiaohui
authors.initials: X
authors.lastname: Cheng
authors.forename: Dacheng
authors.initials: D
authors.lastname: Li