157-nm coherent light source as an inspection tool for F(2) laser lithography.
We have developed a 157-nm coherent light source by two-photon resonant four-wave mixing in Xe, with two tunable single-mode 1-kHz Ti:sapphire laser systems at 768 and 681 nm. This light source has been developed to determine the instrumental function of a vacuum ultraviolet spectrometer and to evaluate optical designs for ultra-line-narrowed F(2) laser lithography. The spectral linewidth of the source was less than 0.008 pm (FWHM), with an average power of 0.6 mW.
Suganuma
T
T
Kubo
H
H
Wakabayashi
O
O
Mizoguchi
H
H
Nakao
K
K
Nabekawa
Y
Y
Togashi
T
T
Watanabe
S
S