Microfabrication of cavities in polydimethylsiloxane using DRIE silicon molds.
We present a novel method to create cavities in PDMS that is simple and exhibits wide process latitude allowing control over the radius of curvature to form shallow concave pits or deep spherical cavities.
Giang
Ut-Binh T
UB
Department of Biomedical Engineering, University of Rochester, RC Box 270168, Goergen Hall, Rochester, NY 14627, USA.
Lee
Dooyoung
D
King
Michael R
MR
DeLouise
Lisa A
LA
D004129:Dimethylpolysiloxanes / Q000737:chemistry*; D007477:Ions / Q000737:chemistry; D008855:Microscopy, Electron, Scanning; D012825:Silicon / Q000737:chemistry*; D012828:Silicones / Q000737:chemistry*
D004129:Dimethylpolysiloxanes; D007477:Ions; D012828:Silicones; C013830:baysilon; D012825:Silicon