Sub-10 nm thick microporous membranes made by plasma-defined atomic layer deposition of a bridged silsesquioxane precursor.
Sandia National Laboratories, Department 1815, MS 1349, PO Box 5800, Albuquerque, New Mexico 87185, USA.
Ying-Bing
YB
Jiang
George
G
Xomeritakis
Zhu
Z
Chen
Darren
D
Dunphy
David J
DJ
Kissel
Joseph L
JL
Cecchi
C Jeffrey
CJ
Brinker
D005740:Gases / Q000737:chemistry; D046529:Microscopy, Electron, Transmission; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D017646:Organosilicon Compounds / Q000737:chemistry*; D016062:Porosity
D005740:Gases; D017646:Organosilicon Compounds