50-W average-power, 480-fs KrF excimer laser with gated gain amplification.
We have developed a 50-W average-power KrF excimer laser with a pulse width of 480 fs by using the method of gated gain amplification at a 200-Hz repetition rate.
Nabekawa
Y
Y
Yashitomi
D
D
Sekikawa
T
T
Watanabe
S
S