Geometrical cross-sectional imaging by a heterodyne wavelength-scanning interference confocal microscope.
We developed a heterodyne interference confocal microscope, using wavelength modulation of a laser diode to realize quick separate measurement of the refractive indices and geometrical thicknesses of multiple layers. This microscope requires only a single axial movement of the specimen. We can display the geometrical cross sections of the interfaces and the refractive indices of a three-layered object.
Fukano
T
T
Yamaguchi
I
I