Video-rate optical low-coherence reflectometry based on a linear smart detector array.
A low-coherence reflectometer based on a conventional Michelson interferometer and a novel silicon detector chip that allows parallel heterodyne detection is presented. Cross-sectional images of 64x256 pixels covering an area of 1.92 mm x 1.3 mm are acquired at video rate and with a sensitivity close to the shot-noise limit. Applications in surface profiling and thickness measurement are demonstrated.
Bourquin
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Monterosso
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Seitz
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Salathé
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RP