50-W average-power, 480-fs KrF excimer laser with gated gain amplification.
We have developed a 50-W average-power KrF excimer laser with a pulse width of 480 fs by using the method of gated gain amplification at a 200-Hz repetition rate.
Y
Y
Nabekawa
D
D
Yashitomi
T
T
Sekikawa
S
S
Watanabe