Femtosecond laser-assisted three-dimensional microfabrication in silica.
We demonstrate direct three-dimensional (3-D) microfabrication inside a volume of silica glass. The whole fabrication process was carried out in two steps:(i) writing of the preprogrammed 3-D pattern inside silica glass by focused femtosecond (fs) laser pulses and (ii) etching of the written structure in a 5% aqueous solution of HF acid. This technique allows fabrication of 3-D channels as small as 10mum in diameter inside the volume with any angle of interconnection and a high aspect ratio (10mum -diameter channels in a 100mum -thick silica slab).
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A
Marcinkevi Ius
S
S
Juodkazis
M
M
Watanabe
M
M
Miwa
S
S
Matsuo
H
H
Misawa
J
J
Nishii