Fabrication of 3D functionalized microstructure via scanning probe lithography and self-assembly methods.
A type of 2-dimensional planar pattern with spatial resolution can be easily produced using scanning probe lithography (SPL). However, it has not been used successfully for fabricating 3-dimensional (3D) structures due to the low aspect ratio of the resulting structure. Herein, we describe a method for fabricating a 3D functionalized structure via a combination of SPL and self-assembly techniques. In this study, a 3D structure was established on a Si surface with a passivated monolayer via SPL. The patterned layer was modified using a omega-functionalized organosilane. Lateral force microscopy (LFM) was applied to discriminate the chemical functionalities and gold nanoparticles were also used to clearly identify the modified layer.
School of Chemical and Biological Engineering, Institute of Chemical Processes, Seoul National University, Seoul 151-742, Korea.
Inhee
I
Choi
Sung Koo
SK
Kang
Jeongjin
J
Lee
Younghun
Y
Kim
Jongheop
J
Yi
D003460:Crystallization / Q000379:methods*; D046911:Macromolecular Substances / Q000737:chemistry; D008422:Materials Testing; D020527:Microscopy, Scanning Probe / Q000379:methods*; D008968:Molecular Conformation; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D036103:Nanotechnology / Q000379:methods*; D010316:Particle Size; D010781:Photography / Q000379:methods; D011108:Polymers / Q000737:chemistry*; D013499:Surface Properties
D046911:Macromolecular Substances; D011108:Polymers