Open-loop control of a MEMS deformable mirror for large-amplitude wavefront control.
A method is introduced for predicting control voltages that will generate a prescribed surface shape on a MEMS deformable mirror. The algorithm is based upon an analytical elastic model of the mirror membrane and an empirical electromechanical model of its actuators. It is computationally simple and inherently fast. Shapes at the limit of achievable mirror spatial frequencies with up to 1.5 microm amplitudes have been achieved with less than 15 nm rms error.
Stewart
Jason B
JB
Department of Electrical and Computer Engineering, Boston University, Massachusetts 02215, USA. jstew@bu.edu
Diouf
Alioune
A
Zhou
Yaopeng
Y
Bifano
Thomas G
TG
D000465:Algorithms; D016477:Artifacts; D004548:Elasticity; D004566:Electrodes; D055590:Electromagnetic Phenomena; D019544:Equipment Failure Analysis; D005246:Feedback; D008904:Miniaturization / Q000295:instrumentation* / Q000379:methods; D009038:Motion; D055095:Optics and Photonics / Q000295:instrumentation; D012680:Sensitivity and Specificity; D055672:Static Electricity