Coherent anti-Stokes Raman scattering microspectroscopy of silicon components with a photonic-crystal fiber frequency shifter.
Coherent anti-Stokes Raman scattering (CARS) microspectroscopy of silicon components is demonstrated with pump and probe fields delivered by a mode-locked Cr:forsterite laser and the frequency-shifted soliton output of a photonic-crystal fiber as a Stokes field. CARS microspectroscopy is shown to allow a visualization of microscale features and defects on the surface of silicon wafers, offering much promise for online diagnostics of electronic and photonic silicon chip components.
Mitrokhin
V P
VP
Physics Department, M. V. Lomonosov Moscow State University, Russia.
Fedotov
A B
AB
Ivanov
A A
AA
Alfimov
M V
MV
Zheltikov
A M
AM