Sub-10 nm thick microporous membranes made by plasma-defined atomic layer deposition of a bridged silsesquioxane precursor.
Jiang
Ying-Bing
YB
Sandia National Laboratories, Department 1815, MS 1349, PO Box 5800, Albuquerque, New Mexico 87185, USA.
Xomeritakis
George
G
Chen
Zhu
Z
Dunphy
Darren
D
Kissel
David J
DJ
Cecchi
Joseph L
JL
Brinker
C Jeffrey
CJ
D005740:Gases / Q000737:chemistry; D046529:Microscopy, Electron, Transmission; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D017646:Organosilicon Compounds / Q000737:chemistry*; D016062:Porosity
D005740:Gases; D017646:Organosilicon Compounds