Behavior characteristics of nano-stage according to hinge structure.
Nano-stages are used in many ultra-precision systems, such as scanning probe microscope (SPM), optical fiber aligners, ultra-precision cutting, measuring and optical systems. Generally, ultra-precision machining and measuring are achieved using a nano-scale motion stage actuated using Piezo-electric actuators (PZT), and the importance of and demands for the motion stage increase with the need to improve system performance and accuracy. However, it is difficult to find solutions because the performance and characteristics of nano-scale motion stages are determined by various factors, such as the hinge structure, actuator, and method of system control. This paper focuses on improving of leafspring and planar joint hinges, and suggests a composite joint hinge stage.
Oh
Hyun-Seong
HS
Department of Mechanical and Precision Engineering, Pusan National University, Pusan 609-735, Korea.
Lee
Sung-Jun
SJ
Kim
Yong-Woo
YW
Lee
Deug-Woo
DW
D003198:Computer Simulation; D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008846:Micromanipulation / Q000295:instrumentation* / Q000379:methods; D008962:Models, Theoretical; D036103:Nanotechnology / Q000295:instrumentation* / Q000379:methods