Micromachined silicon nitride deformable mirrors for focus control.
We have built a 1000mum-diameter silicon nitride deformable mirror for focus-control applications, using micro-optoelectromechanical systems technology. We achieved variable focal lengths from 36 to 360 mm while maintaining zero primary spherical aberration, using a maximum control voltage of 100 V. Active control of spherical aberration of approximately two waves at 660 nm was demonstrated.
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PA
Himmer
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DL
Dickensheets
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Friholm