Coherent anti-Stokes Raman scattering microspectroscopy of silicon components with a photonic-crystal fiber frequency shifter.
Coherent anti-Stokes Raman scattering (CARS) microspectroscopy of silicon components is demonstrated with pump and probe fields delivered by a mode-locked Cr:forsterite laser and the frequency-shifted soliton output of a photonic-crystal fiber as a Stokes field. CARS microspectroscopy is shown to allow a visualization of microscale features and defects on the surface of silicon wafers, offering much promise for online diagnostics of electronic and photonic silicon chip components.
Physics Department, M. V. Lomonosov Moscow State University, Russia.
V P
VP
Mitrokhin
A B
AB
Fedotov
A A
AA
Ivanov
M V
MV
Alfimov
A M
AM
Zheltikov