High-aspect ratio metal tips attached to atomic force microscopy cantilevers with controlled angle, length, and radius for electrostatic force microscopy.
We demonstrate a method to fabricate a high-aspect ratio metal tip attached to microfabricated cantilevers with controlled angle, length, and radius, for use in electrostatic force microscopy. A metal wire, after gluing it into a guiding slot that is cut into the cantilever, is shaped into a long, thin tip using a focused ion beam. The high-aspect ratio results in considerable reduction of the capacitive force between tip body and sample when compared to a metal coated pyramidal tip.
Cockins
Lynda
L
Department of Physics, McGill University, 3600 Rue University, H3A 2T8 Montreal, Canada.
Miyahara
Yoichi
Y
Stomp
Romain
R
Grutter
Peter
P
D004867:Equipment Design; D019544:Equipment Failure Analysis; D007089:Image Enhancement / Q000295:instrumentation* / Q000379:methods; D008670:Metals; D018625:Microscopy, Atomic Force / Q000295:instrumentation* / Q000379:methods; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D055672:Static Electricity; D014159:Transducers
D008670:Metals