Use of mass transport to reduce surface roughness in replicated gallium phosphide refractive microlenses.
Mass-transport smoothing has been used to reduce the surface roughness of a gallium phosphide (GaP) microlens from 50.0 nm (rms) to 6.5 nm (rms) while preserving the original surface figure. The initial GaP surface was fabricated by dry-etch transfer of a polymer microlens into a GaP substrate. This result demonstrates that mass transport can significantly improve the performance of economically feasible high-refractive-index micro-optical elements having arbitrary surface profiles.
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TA
Ballen
J R
JR
Leger
D E
DE
Glumac
L S
LS
Swanson
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E
Gage