Applications of a microlens array and a photomask to the laser microfabrication of a periodic photopolymer rod array.
We report the simultaneous multipoint fabrication of polymer rods by the femtosecond laser processing of a negative photoresist using a microlens array (MLA). The rods were periodically arranged in the form of an array corresponding to the MLA and free-standing on a glass substrate. The use of a photomask enabled us to define the contour of the rod array. Furthermore, sample translation techniques were demonstrated for the effective fabrication of large-area structures.
Matsuo
Shigeki
S
Department of Ecosystem Engineering, The University of Tokushima, Japan. matsuos@eco.tokushima-u.ac.jp
Miyamoto
Takashi
T
Tomita
Takuro
T
Hashimoto
Shuichi
S