title: Deconvolution of local surface response from topography in nanometer profilometry with a dual-scan method.
abstract: In profilometric measurements, by scanning the sample twice with a fixed vertical offset, one can separate the signal that comes from surface heterogeneity from the topographic signal. Using differential confocal microscopy, a newly developed open-loop nanometer profilometric technique, we demonstrated this dual-scan method on composite samples and obtained 10-nm depth resolution. This technique can also be applied to other profilometric techniques such as atomic force microscopy and scanning tunneling microscopy.
authors: C W
authors: CW
authors: Tsai
authors: C H
authors: CH
authors: Lee
authors: J
authors: J
authors: Wang