Mechano-optical waveguide on-off intensity modulator.
High-extinction on-off modulators are essential for channel selection in integrated-optical sensor arrays. We report a standard SiON-technology-based electrostatically driven integrated mechano-optical waveguide on-off intensity modulator. On-off modulation is achieved by movement of an absorbing element into and out of the evanescent field of the guided mode. An extinction ratio of >37 dB at an actuation voltage of <30 V was achieved in a 6 mm x 4 mm device for a wavelength of 632.8 nm. Full wafer-scale fabrication is made possible by use of chemical mechanical polishing and aligned wafer bonding.
Veldhuis
G J
GJ
MESA Research Institute, University of Twente, P.O. Box 217, NL-7500-AE Enschede, The Netherlands.
Gui
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C
Nauta
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T
Koster
T M
TM
Berenschot
J W
JW
Lambeck
P V
PV
Gardeniers
J G
JG
Elwenspoek
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