Miniaturized time-scanning Fourier transform spectrometer based on silicon technology.
We present a miniaturized Fourier transform spectrometer (FTS) based on optical microelectromechanical system technology. The FTS is a Michelson interferometer with one scanning mirror. A new type of electrostatic comb drive actuator moves the mirror. We have measured a nonlinearity of the driving system of +/-0.5 mum for a displacement of 38.5 mum . A method is presented to correct the spectrum to get rid of the nonlinearity. The driving reproducibility is +/-25 nm. The measured resolution of the spectrometer after the phase correction is 6 nm at a wavelength of 633 nm.
Manzardo
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Herzig
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Marxer
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CR
de Rooij
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