Confocal microscopy with a volume holographic filter.
We describe a modified confocal microscope in which depth discrimination results from matched filtering by a volume hologram instead of a pinhole filter. The depth resolution depends on the numerical aperture of the objective lens and the thickness of the hologram, and the dynamic range is determined by the diffraction efficiency. We calculate the depth response of the volume holographic confocal microscope, verify it experimentally, and present the scanned image of a silicon wafer with microfabricated surface structures.
Barbastathis
G
G
Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, 405 North Mathews Avenue, Urbana, Illinois 61801, USA.
Balberg
M
M
Brady
D J
DJ