Nanochannels in SU-8 with floor and ceiling metal electrodes and integrated microchannels.
Sacrificially etched 2-D nanofluidic channels and nanospaces with integrated floor and ceiling electrodes and arbitrary channel geometries have been demonstrated with channel heights from 20 nm to 400 nm, widths from 800 nm to 40 microm, and lengths up to 3 mm, using SU-8 as the channel structural material.
Nichols
Kevin P
KP
Mesoscale Chemical Systems, MESA+ Institute for Nanotechnology, University of Twente, Postbus 217, 7500 AE Enschede, The Netherlands. k.p.nichols@utwente.nl
Eijkel
Jan C T
JC
Gardeniers
Han J G E
HJ
D002857:Chromium / Q000737:chemistry*; D004566:Electrodes; D006046:Gold / Q000737:chemistry*; D057927:Hydrophobic and Hydrophilic Interactions; D044085:Microfluidics / Q000295:instrumentation*; D036103:Nanotechnology / Q000295:instrumentation*; D013499:Surface Properties; D013696:Temperature
D002857:Chromium; D006046:Gold