title: Binary-phase zone-plate arrays based on hybrid solgel glass.
abstract: An organically modified silane zirconate-based solgel material is used for the fabrication of binary-phase zone-plate arrays. The synthesized hybrid solgel material has a negative tone under UV exposure and can be patterned by a UV-lithography process. The transmittance of the material is nearly 100%, and the refractive index is 1.52. Two different diffractive lens arrays with focal lengths of 5 and 42 cm have been fabricated. The average roughness of the zone surface is less than 20 nm. The diffraction efficiencies of the lens arrays are measured as a function of modulation depth and exposure dose. A diffraction efficiency of 30% is achieved.
authors: J T
authors: JT
authors: Rantala
authors: P
authors: P
authors: Ayräs
authors: R
authors: R
authors: Levy
authors: S
authors: S
authors: Honkanen
authors: M R
authors: MR
authors: Descour
authors: N
authors: N
authors: Peyghambarian