Improvement of the ultraviolet-proof property of silica glass fibers for ArF excimer-laser applications.
The effects of preirradiation by ArF excimer laser and thermal annealing on the transmission properties of a silica fiber were investigated. The durability of the fiber when it was exposed to ArF excimer laser irradiation was improved by preirradiation at room temperature and subsequent thermal annealing at 600 degrees C.
Saito
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K
Ikushima
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AJ
Kotani
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T
Miura
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