Interference microscopy for three-dimensional imaging with wavelength-to-depth encoding.
A novel interference microscope for three-dimensional (3D) imaging based on a wavelength-to-depth encoding technique is presented. Wavelength-to-depth encoding is realized by use of a diffractive lens and wavelength tuning. A high depth resolution of 0.71 mum is obtained with 0.90-N.A. objective lenses. Experimental measurements of a four-level grating are presented, and the results are found to be comparable with those obtained with a Dektak profilometer and a similar interference microscope that uses mechanical depth scanning. The system is promising for fast, noncontact, high-resolution 3D imaging.
Li
G
G
Department of Electrical and Computer Engineering, University of California, San Diego, La Jolla, California 92093-0407, USA.
Sun
P C
PC
Lin
P C
PC
Fainman
Y
Y