Flexible hollow waveguides for delivery of excimer-laser light.
A hollow waveguide consisting of a glass tube with a thin aluminum film on the inner surface is proposed for delivery of excimer-laser light. The waveguide, fabricated by a chemical-vapor-deposition method, shows low losses for KrF excimer laser light: the straight loss of a 1-mm-bore waveguide was 0.4 dB:m.
Matsuura
Y
Y
Department of Electrical Communications, Tohoku University, Sendai 980-8579, Japan.
Miyagi
M
M