Multichannel Mueller matrix ellipsometer for real-time spectroscopy of anisotropic surfaces and films.
A multichannel ellipsometer in the dual-rotating-compensator configuration has been developed for potential applications in real-time Mueller matrix spectroscopy of anisotropic surfaces and films. This instrument provides spectra (1.7-5.3 eV) in all 16 elements of the unnormalized Mueller matrix M of a film-substrate system with a minimum overall data acquisition time of t(a) = 0.25 s. We have applied this instrument first for high-precision determination of spectra in M with t(a) = 2.5 s for a microscopically sculptured film.
Lee
J
J
Materials Research Laboratory, Pennsylvania State University, University Park, Pennsylvania 16802, USA.
Koh
J
J
Collins
R W
RW