title: Mechano-optical waveguide on-off intensity modulator.
abstract: High-extinction on-off modulators are essential for channel selection in integrated-optical sensor arrays. We report a standard SiON-technology-based electrostatically driven integrated mechano-optical waveguide on-off intensity modulator. On-off modulation is achieved by movement of an absorbing element into and out of the evanescent field of the guided mode. An extinction ratio of >37 dB at an actuation voltage of <30 V was achieved in a 6 mm x 4 mm device for a wavelength of 632.8 nm. Full wafer-scale fabrication is made possible by use of chemical mechanical polishing and aligned wafer bonding.
authors: MESA Research Institute, University of Twente, P.O. Box 217, NL-7500-AE Enschede, The Netherlands.
authors: G J
authors: GJ
authors: Veldhuis
authors: C
authors: C
authors: Gui
authors: T
authors: T
authors: Nauta
authors: T M
authors: TM
authors: Koster
authors: J W
authors: JW
authors: Berenschot
authors: P V
authors: PV
authors: Lambeck
authors: J G
authors: JG
authors: Gardeniers
authors: M
authors: M
authors: Elwenspoek