title: Characterization of lead zirconate titanate--lanthanum ruthenate thin film structures prepared by chemical solution deposition.
abstract: In this work, the results of compositional and microstructural analysis of lead zirconate titanate--lanthanum ruthenate thin film structures prepared by chemical solution deposition are discussed. The cross-section transmission electron microscope (TEM) micrographs of the La-Ru-O film deposited on a SiO2/Si substrate and annealed at 700 degrees C revealed RuO2 crystals embedded in a glassy silicate matrix. When the La-Ru-O film was deposited on a Pt/TiO2/SiO2/Si substrate, RuO2 and La4Ru6O19 crystallized after annealing at 700 degrees C. After firing at 550 degrees C randomly oriented lead zirconate titanate (PZT) thin films crystallized on the La-Ru-O/SiO2/Si substrate, while on La-Ru-O/Pt/TiO2/SiO2/Si substrates PZT thin films with (111) preferred orientation were obtained. No diffusion of the Ru atoms in the PZT film was found. Ferroelectric response of PZT thin films on these substrates is shown in comparison with the PZT film deposited directly on the Pt/TiO2/SiO2/Si substrate without a La-Ru-O layer.
authors: JoZef Stefan Institute, 1000 Ljubljana, Slovenia. andreja.bencan@ijs.si
authors: Andreja
authors: A
authors: Bencan
authors: Barbara
authors: B
authors: Malic
authors: Goran
authors: G
authors: Drazic
authors: Miso
authors: M
authors: Vukadinović
authors: Marija
authors: M
authors: Kosec