title: Intense xenon capillary discharge extreme-ultraviolet source in the 10-16-nm-wavelength region.
abstract: We have observed intense extreme-ultraviolet emission, within the 10-16-nm-wavelength range, emitted by a xenon capillary discharge plasma. Within a 0.3-nm bandwidth centered at 13.5 nm the axial emission intensity was comparable with that from the brightest laser-produced plasma sources, and a similar intensity was measured at approximately 11.3 nm. This source could thus be suitable for extreme-ultraviolet imaging applications, such as extreme-ultraviolet lithography.
authors: M A
authors: MA
authors: Klosner
authors: W T
authors: WT
authors: Silfvast