Azeotropes of trimethylchlorosilane and silicon tetrachloride.
D002712:Chlorides; D017655:Silicon Compounds; D014297:Trimethylsilyl Compounds
D002712:Chlorides; D017655:Silicon Compounds; D014297:Trimethylsilyl Compounds; C039293:trimethylchlorosilane; C039676:silicon tetrachloride