title: Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5 16.0-nm wavelength region.
abstract: The efficiency of an ion-etched laminar holographic grating was measured at near-normal incidence in the 14.5-16.0-nm wavelength range. The grating had an electron-beam-evaporated Mo/Si multilayer coating matched to the grating groove depth. The efficiency peaked at 16.3% in the first inside order at 15.12 nm and 15.0% in the first outside order at 14.94 nm. These are believed to be the highest efficiencies obtained to date from a multilayer-coated laminar grating at near-normal incidence in the EUV (lambda<30.0nm) . Zero and even orders were almost completely suppressed. The grating groove efficiency in the first order approached the theoretical limit of 40.5%.
authors.forename: M P
authors.initials: MP
authors.lastname: Kowalski
authors.forename: R G
authors.initials: RG
authors.lastname: Cruddace
authors.forename: J F
authors.initials: JF
authors.lastname: Seely
authors.forename: J C
authors.initials: JC
authors.lastname: Rife
authors.forename: K F
authors.initials: KF
authors.lastname: Heidemann
authors.forename: U
authors.initials: U
authors.lastname: Heinzmann
authors.forename: U
authors.initials: U
authors.lastname: Kleineberg
authors.forename: K
authors.initials: K
authors.lastname: Osterried
authors.forename: D
authors.initials: D
authors.lastname: Menke
authors.forename: W R
authors.initials: WR
authors.lastname: Hunter