Waveguide-coupled AlGaAs / GaAs microcavity ring and disk resonators with high f inesse and 21.6-nm f ree spectral range.
We report the realization and demonstration of novel semiconductor waveguide-coupled microcavity ring and disk resonators. For a 10.5-microm-diameter disk resonator, we measure a finesse of 120, a resonant linewidth of 0.18 nm, and a free-spectral range of 21.6 nm in the 1.55-mum-wavelength region. We present the nanofabrication methods and the experimental results for 10.5- and 20.5-mum-diameter ring and disk resonators to show the feasibility of such devices.
Rafizadeh
D
D
Zhang
J P
JP
Hagness
S C
SC
Taflove
A
A
Stair
K A
KA
Ho
S T
ST
Tiberio
R C
RC