title: Waveguide-coupled AlGaAs / GaAs microcavity ring and disk resonators with high f inesse and 21.6-nm f ree spectral range.
abstract: We report the realization and demonstration of novel semiconductor waveguide-coupled microcavity ring and disk resonators. For a 10.5-microm-diameter disk resonator, we measure a finesse of 120, a resonant linewidth of 0.18 nm, and a free-spectral range of 21.6 nm in the 1.55-mum-wavelength region. We present the nanofabrication methods and the experimental results for 10.5- and 20.5-mum-diameter ring and disk resonators to show the feasibility of such devices.
authors.forename: D
authors.initials: D
authors.lastname: Rafizadeh
authors.forename: J P
authors.initials: JP
authors.lastname: Zhang
authors.forename: S C
authors.initials: SC
authors.lastname: Hagness
authors.forename: A
authors.initials: A
authors.lastname: Taflove
authors.forename: K A
authors.initials: KA
authors.lastname: Stair
authors.forename: S T
authors.initials: ST
authors.lastname: Ho
authors.forename: R C
authors.initials: RC
authors.lastname: Tiberio