Rapid and scalable scans at 21 m/s in optical low-coherence reflectometry.
An optical low-coherence reflectometer is presented that uses a fiber Michelson interferometer with a rotating cube to generate rapid depth scans at a high repetition rate. A folded optical path geometry allows the reference arm to scale up the scan range, scan speed, and scan repetitiveness. Thickness measurements with a repetitiveness of 384 Hz and a longitudinal scanning speed of 21 m/s in air over a range of ~3 mm are demonstrated.
Ballif
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J
Gianotti
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R
Chavanne
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P
Wälti
R
R
Salathé
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