title: Portable x-ray fluorescence spectrometer for coating thickness measurement.
abstract: A handheld x-ray spectrometer has been realized and tested. The purpose of the device is to measure the thickness of coated samples in the range of 1-1500 nm in an industrial environment. Accuracy of approximately 3% has been achieved in this range with a measurement time of 1 min. Automated software has been implemented to allow utilization by a nonspecialist operator. An automated calibration procedure, based on measurements of reference samples, is used.
authors.affiliation: Centre Spatial de Liège, University of Liège, Avenue de Pre-Ally, Liege Science Park, 4031 Angleur, Belgium. a.carapelle@ulg.be
authors.forename: Alain
authors.initials: A
authors.lastname: Carapelle
authors.forename: Karl
authors.initials: K
authors.lastname: Fleury-Frenette
authors.forename: Jean-Paul
authors.initials: JP
authors.lastname: Collette
authors.forename: Henri-Pierre
authors.initials: HP
authors.lastname: Garnir
authors.forename: Philippe
authors.initials: P
authors.lastname: Harlet
mesh_terms: D020099:Coated Materials, Biocompatible / Q000737:chemistry*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008422:Materials Testing / Q000295:instrumentation*; D008904:Miniaturization; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D013052:Spectrometry, X-Ray Emission / Q000295:instrumentation*
chemical_list: D020099:Coated Materials, Biocompatible