Active-edge planar radiation sensors.
Many systems in medicine, biology, high-energy physics, and astrophysics require large area radiation sensors. In most of these applications, minimizing the amount of dead area or dead material is crucial. We have developed a new type of silicon radiation sensor in which the device is active to within a few microns of the mechanical edge. Their perimeter is made by a plasma etcher rather than a diamond saw. Their edges can be defined and also passivated by growing, in an intermediate step, a field oxide on the side surfaces. In this paper, the basic architecture and results from a synchrotron beam test are presented.
Kenney
C J
CJ
Molecular Biology Consortium, 2201 Campbell Park Drive, Chicago, IL 60612 USA.
Segal
J D
JD
Westbrook
E
E
Parker
Sherwood
S
Hasi
J
J
Da Via
C
C
Watts
S
S
Morse
J
J