Ion-beam-assisted deposition of thin films.
Some effects on the properties of electron-beam evaporated thin films produced by ion bombardment of the growing film are reported. Substantial increases in the packing densities of SiO2 , TiO2 , and ZrO2 films have been produced as measured by the reduction in the adsorption of moisture when the films are exposed to a humid atmosphere. In a ZrO2-SiO2 multilayer interference filter, changes in the wavelength of the peak transmittance on exposure to the atmosphere have been reduced from 8 nm for films deposited without ion bombardment to <1 nm for ion-beam-assisted films.
Martin
P J
PJ
CSIRO Division of Applied Physics, Sydney, Australia 2070.
Macleod
H A
HA
Netterfield
R P
RP
Pacey
C G
CG
Sainty
W G
WG