title: Gallium oxide thin films from the AACVD of [Ga(NMe2)3]2 and donor functionalised alcohols.
abstract: Thin films of Ga(2)O(3) have been produced from [Ga(NMe(2))(3)](2) and ROH (R = CH(2)CH(2)NMe(2), CH(CH(2)NMe(2))(2), CH(CH(3))CH(2)NMe(2), CH(2)CH(2)OMe and C(CH(3))(2)CH(2)OMe) by aerosol assisted chemical vapour deposition on glass. Transparent, unreflective films were obtained at a deposition temperature of 550 degrees C using toluene as solvent. The gallium oxide films were analyzed by Scanning electron microscopy (SEM), Raman spectroscopy, wavelength dispersive analysis of X-rays (WDX) and X-ray photoelectron spectroscopy (XPS). The gallium oxide films obtained were X-ray amorphous. Gas-sensing experiments indicated that the films showed an n-type response to ethanol at a variety of temperatures.
authors.affiliation: Department of Chemistry, Materials Chemistry Centre, University College London, 20 Gordon Street, London, UK.
authors.forename: Siama
authors.initials: S
authors.lastname: Basharat
authors.forename: Claire J
authors.initials: CJ
authors.lastname: Carmalt
authors.forename: Russell
authors.initials: R
authors.lastname: Binions
authors.forename: Robert
authors.initials: R
authors.lastname: Palgrave
authors.forename: Ivan P
authors.initials: IP
authors.lastname: Parkin