title: Scanning probe lithography of polymers: tailoring morphology and functionality at the nanometer scale.
abstract: This article reviews the patterning of the polymer via scanning probe lithography (SPL). Several different lithographies are characterized by the source of the patterned material, whether a mechanical, electrical, or thermal field is used, and whether the lithography modifies morphology, functionality, or both. The merits of the different strategies are discussed with respect to the fabrication goals.
authors.affiliation: Chemistry Division, Naval Research Laboratory, Washington D.C. 20375, USA.
authors.forename: Woo-Kyung
authors.initials: WK
authors.lastname: Lee
authors.forename: Paul E
authors.initials: PE
authors.lastname: Sheehan