Characterization of electromechanical coupling coefficients of piezoelectric films using composite resonators.
By analyzing the resonance frequency spectrum of a composite resonator consisting of a piezoelectric ceramic film deposited on a substrate plate, the thickness extensional mode electromechanical coupling coefficient of the film, k(t)(2), can be directly calculated from the effective coupling factor values, k(eff )(2), for two special modes of the resonator. The effects of the mechanical loss in the piezoelectric films on the measurement are investigated by numerical simulation, and some guidelines for improving the accuracy of the k(t)(2) measurement are reported.
Wang
Z
Z
Dept. of Phys., Concordia Univ., Montreal, Que.
Zhang
Y
Y
Cheeke
J N
JN