FFT-based analysis of periodic structures in microacoustic devices.
Periodic structures utilized as transducer or reflector elements play an important role in microacoustic wave devices. Such structures can be described using approximate analytical models. However, to obtain the accuracy required for reliable device simulation, numerical methods have to be employed. In this contribution, we present an efficient numerical approach to calculate the dispersion curves associated with microacoustic modes propagating in periodic structures; the method is demonstrated for the case of Love wave modes. The computational efficiency is related to the utilization of the FFT algorithm in a hybrid Method of Moments (MoM)/Mode-Matching analysis. From the obtained dispersion curves, characteristic parameters such as the stopband width can be obtained which can be used in a coupling-of-modes (COM) model of the structure.
Jakoby
B
B
Delft University of Technology, Electronic Instrumentation Lab./DIMES, Mekelweg 4, 2628 CD Delft, The Netherlands. bernhard.jakoby@de.bosch.com
Vellekoop
M J
MJ