title: Influence of crystal structure on the light scatter of zirconium oxide films.
abstract: The relationship of light scatter by a thin film to thin-film morphology is examined. Light scatter by reactively evaporated ZrO(2) thin films is analyzed by using in situ total internal reflection microscopy and angle-resolved scatterometry. Film crystal structure is analyzed by transmission electron microscopy and x-ray diffraction. Relations between film crystal structure and film scatter are established by using this information. Surface topography is analyzed by the use of scanning force microscopy. Results of a spectrophotometric determination of the film refractive index are reported. The film scatter is found to be sensitive to the crystal phase of the film, which is a function of substrate deposition temperature. A simple method of separating bulk from surface scatter is described.
authors.forename: D
authors.initials: D
authors.lastname: Reicher
authors.forename: K
authors.initials: K
authors.lastname: Jungling