title: Design and test of 3 GHz, fundamental mode surface transverse wave resonators on quartz.
abstract: Surface transverse wave (STW) resonators, based on the propagation of high velocity shear horizontal waves on Y-rotated quartz were designed, fabricated and tested. A model is presented to predict the resonant frequency of a 3-grating structure as a function of design parameters such as periodicities, metal thickness, and finger-to-gap ratio. Experimental devices have been fabricated by direct e-beam lithography with linewidth geometries in the range of 0.3-0.5 mum, and an operating frequency close to 3 GHz in fundamental mode. Two different designs using either a quasi synchronous structure (type 1) or a change of periodicity inside the cavity (type 2) were tested. The best experimental factor of merit is close to the best results already published for quartz STW resonators.
authors.affiliation: Lab. de Phys. et Metrol. des Oscillateurs, CNRS, Besancon.
authors.forename: E
authors.initials: E
authors.lastname: Bigler
authors.forename: E
authors.initials: E
authors.lastname: Gavignet
authors.forename: S
authors.initials: S
authors.lastname: Ballandras
authors.forename: S
authors.initials: S
authors.lastname: Denissenko
authors.forename: E
authors.initials: E
authors.lastname: Cambril