Measurement range analysis in moiré evaluation Fizeau interferometry.
Fizeau interferograms are evaluated by two-beam phase-stepping algorithms. The sinusoidal intensity profile pattern needed for the application of these algorithms is obtained by low-pass filtering the moiré pattern provided by the superposition of the interferogram onto a Ronchi grid. The phase modulation is performed by the in-plane displacement of the grid by means of a motorized stage. In this research the measurement range of the evaluation method as a function of the maximum derivative of height surfaces is calculated. A spherical surface is measured in different configurations in order to verify the obtained results.
Dorrío
B V
BV
López
C
C
Doval
A F
AF
Alén
J M
JM
Bugaríin
J
J
Fernández
A
A
Blanco-García
J
J
Fernández
J L
JL
Pérez-Amor
M
M