title: Simulation of dynamics-coupling in piezoelectric tube scanners by reduced order finite element analysis.
abstract: Piezoelectric tube scanners are widely used in scanning probe microscopes to position the sample or the probe. Fast and accurate scanning requires the suppression of dominant low-frequency resonances as well as the compensation of dynamics-coupling effects. The present article gives a detailed description of the fully coupled tube scanner dynamics over a wide frequency range modeled by finite element (FE) analysis using the commercially available software package ANSYS. The effect of a sample mass attached to the top of the tube is investigated by considering its added mass and local stiffening. A model order reduction scheme is applied to obtain a low order model that describes the lateral and vertical deflections as well as the voltage induced on quadrant electrodes. Comparison to experimental data demonstrates a good agreement for both the full FE model and reduced order model.
authors.affiliation: Institute for Systems Theory and Automatic Control, University of Stuttgart, Pfaffenwaldring 9, 70550 Stuttgart, Germany. maess@ist.uni-stuttgart.de
authors.forename: Johannes
authors.initials: J
authors.lastname: Maess
authors.forename: Andrew J
authors.initials: AJ
authors.lastname: Fleming
authors.forename: Frank
authors.initials: F
authors.lastname: Allgöwer