Nanoscale imaging of buried structures with elemental specificity using resonant x-ray diffraction microscopy.
We report the first demonstration of resonant x-ray diffraction microscopy for element specific imaging of buried structures with a pixel resolution of approximately 15 nm by exploiting the abrupt change in the scattering cross section near electronic resonances. We performed nondestructive and quantitative imaging of buried Bi structures inside a Si crystal by directly phasing coherent x-ray diffraction patterns acquired below and above the Bi M5 edge. We anticipate that resonant x-ray diffraction microscopy will be applied to element and chemical state specific imaging of a broad range of systems including magnetic materials, semiconductors, organic materials, biominerals, and biological specimens.
Song
Changyong
C
Department of Physics and Astronomy, University of California, Los Angeles, California 90095, USA.
Bergstrom
Raymond
R
Ramunno-Johnson
Damien
D
Jiang
Huaidong
H
Paterson
David
D
de Jonge
Martin D
MD
McNulty
Ian
I
Lee
Jooyoung
J
Wang
Kang L
KL
Miao
Jianwei
J
D000465:Algorithms; D001729:Bismuth / Q000737:chemistry; D008853:Microscopy / Q000379:methods; D036103:Nanotechnology / Q000379:methods*; D012825:Silicon / Q000737:chemistry; D014961:X-Ray Diffraction / Q000379:methods*
D001729:Bismuth; D012825:Silicon