title: Zone-doubling technique to produce ultrahigh-resolution x-ray optics.
abstract: A method for the fabrication of ultrahigh-resolution Fresnel zone plate lenses for x-ray microscopy is demonstrated. It is based on the deposition of a zone plate material (Ir) onto the sidewalls of a prepatterned template structure (Si) using an atomic layer deposition technique. This results in a doubling of the effective zone density, thus improving the achievable resolution of x-ray microscopes. Test structures with lines and spaces down to 15 nm were resolved in a scanning transmission x-ray microscope at 1 keV photon energy.
authors.affiliation: Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland and EMPA, CH-8600 Dübendorf, Switzerland.
authors.forename: K
authors.initials: K
authors.lastname: Jefimovs
authors.forename: J
authors.initials: J
authors.lastname: Vila-Comamala
authors.forename: T
authors.initials: T
authors.lastname: Pilvi
authors.forename: J
authors.initials: J
authors.lastname: Raabe
authors.forename: M
authors.initials: M
authors.lastname: Ritala
authors.forename: C
authors.initials: C
authors.lastname: David