title: C/Si multilayer mirrors for the 25-30-nm wavelength region.
abstract: We report a new material combination, C/Si, for normal-incidence multilayer mirrors in the wavelength region 25-30 nm. The multilayers, fabricated by ion-beam-sputtering deposition, were characterized by near-normal-incidence reflectance measurements by using a discharge source and a grazing-incidence monochromator. The highest measured near-normal-incidence reflectance was R = 23% (25.6 nm), R = 20% (28.3 nm), R = 25% (30.4 nm) at incident angles of 10 degrees , 12 degrees , and 4 degrees , respectively. The multilayers were also characterized by transmission electron microscopy, which revealed sharp layer interfaces and low interfacial roughness.
authors.forename: M
authors.initials: M
authors.lastname: Grigonis
authors.forename: E J
authors.initials: EJ
authors.lastname: Knystautas