Thin-film photodetectors for the vacuum ultraviolet spectral region.
We report on thin-film photodetectors optimized for detecting the vacuum UV and rejection of the visible spectrum of electromagnetic radiation. The devices are made of hydrogenated amorphous silicon and silicon carbide on a glass substrate. At room temperature the photodetectors exhibit quantum efficiencies of 52% at lambda = 58.4 nm, 1% at lambda = 400 nm, and 0.1% at lambda = 650 nm. The response time for UV pulses from an N(2) laser gives signals of 6-mus full width at half-maximum and 500-ns rise time.
De Cesare
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G
Irrera
F
F
Palma
F
F
Naletto
G
G
Nicolosi
P
P
Jannitti
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E