title: Control of voice coil motor nanoscanners for an atomic force microscopy system using a loop shaping technique.
abstract: The voice coil motor nanoscanner has the advantages of large working range, easy control, and low cost compared to the conventional lead zirconate titanate driven nanoscanner. However, it has a small damping problem which causes mechanical vibration. The mechanical vibration reduces the accuracy as well as servobandwidth, which deteoriates the atomic force microscopy (AFM) image of the samples. In order to solve the vibration problem, the loop shaping technique [for vertical (z)] and input prefilter [for lateral (xy)] are applied. Experimental results of the proposed techniques are presented for vertical (z) and lateral (xy) scanner. Finally, the AFM images are provided to investigate its effect.
authors.affiliation: Department of Mechatronics, Gwangju Institute of Science and Technology, 1 Oryong-dong, Buk-gu, Gwangju 500-712, Republic of Korea.
authors.forename: Woosub
authors.initials: W
authors.lastname: Youm
authors.forename: Jongkyu
authors.initials: J
authors.lastname: Jung
authors.forename: Sungq
authors.initials: S
authors.lastname: Lee
authors.forename: Kyihwan
authors.initials: K
authors.lastname: Park
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D008280:Magnetics / Q000295:instrumentation*; D008846:Micromanipulation / Q000295:instrumentation* / Q000379:methods; D018625:Microscopy, Atomic Force / Q000295:instrumentation* / Q000379:methods; D036103:Nanotechnology / Q000295:instrumentation* / Q000379:methods; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D014159:Transducers; D014732:Vibration