title: Thin-film photodetectors for the vacuum ultraviolet spectral region.
abstract: We report on thin-film photodetectors optimized for detecting the vacuum UV and rejection of the visible spectrum of electromagnetic radiation. The devices are made of hydrogenated amorphous silicon and silicon carbide on a glass substrate. At room temperature the photodetectors exhibit quantum efficiencies of 52% at lambda = 58.4 nm, 1% at lambda = 400 nm, and 0.1% at lambda = 650 nm. The response time for UV pulses from an N(2) laser gives signals of 6-mus full width at half-maximum and 500-ns rise time.
authors.forename: G
authors.initials: G
authors.lastname: De Cesare
authors.forename: F
authors.initials: F
authors.lastname: Irrera
authors.forename: F
authors.initials: F
authors.lastname: Palma
authors.forename: G
authors.initials: G
authors.lastname: Naletto
authors.forename: P
authors.initials: P
authors.lastname: Nicolosi
authors.forename: E
authors.initials: E
authors.lastname: Jannitti