title: Simulation and experimental characterization of a 2-D capacitive micromachined ultrasonic transducer array element.
abstract: In this letter, a 400-mumx400-mum 2-D capacitive micromachined ultrasonic transducer (cMUT) array element is experimentally characterised, and the results are found to be in good agreement with theoretical predictions. As a receiver, the transducer has a 1.8x10(-7) nm/ radical(Hz) displacement sensitivity, and, as a transmitter, it produces 16.4 kPa/V of output pressure at the transducer surface at 3 MHz. The transducer also has more than 100% fractional bandwidth around 3 MHz, which makes it suitable for ultrasound imaging.
authors.affiliation: Edward L. Ginzton Lab., Stanford Univ., CA.
authors.forename: O
authors.initials: O
authors.lastname: Oralkan
authors.forename: X
authors.initials: X
authors.lastname: Jin
authors.forename: F L
authors.initials: FL
authors.lastname: Degertekin
authors.forename: B T
authors.initials: BT
authors.lastname: Khuri-Yakub