Numerical modeling of dust particle configurations in a cylindrical radio-frequency plasma reactor.
In the present work, first, plasma phase variables in a cylindrical radio-frequency (rf) plasma reactor are numerically solved using the local field approximation model. Then, equilibrium configurations of a few interacting (sub-)micron-sized dust particles are obtained by integrating the particles equations for their motion and charge, accounting for the various forces acting on each particle in a three-dimensional Lagrangian framework. Direct comparison of the results with experiment demonstrates excellent qualitative agreement. Based on the ion focus phenomenon, a physical model is formulated and proven successful in simulating the vertically aligned structures.
Davoudabadi
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Department of Mechanical and Industrial Engineering, University of Illinois at Chicago, 842 West Taylor Street, Chicago, Illinois 60607, USA.
Mashayek
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