title: Carbon buffer layers for smoothing superpolished glass surfaces as substrates for molybdenum /silicon multilayer soft-x-ray mirrors.
abstract: Zerodur and BK7 glass substrates (developed by Fa. Glaswerke Schott, D-55014 Mainz, Germany) from Carl Zeiss Oberkochen polished to a standard surface roughness of varsigma = 0.8 nm rms were coated with a C layer by electron-beam evaporation in the UHV. The roughness of the C-layer surfaces is reduced to 0.6 nm rms. A normal-incidence reflectance of 50% at a wavelength of 13 nm was measured for a Mo/Si multilayer soft-x-ray mirror with 30 double layers (N = 30) deposited onto the BK7/C substrate, whereas a similar Mo/Si multilayer (N = 30) evaporated directly onto the bare BK7 surface turned out to show a reflectance of only 42%.
authors.forename: H J
authors.initials: HJ
authors.lastname: Stock
authors.forename: F
authors.initials: F
authors.lastname: Hamelmann
authors.forename: U
authors.initials: U
authors.lastname: Kleineberg
authors.forename: D
authors.initials: D
authors.lastname: Menke
authors.forename: B
authors.initials: B
authors.lastname: Schmiedeskamp
authors.forename: K
authors.initials: K
authors.lastname: Osterried
authors.forename: K F
authors.initials: KF
authors.lastname: Heidemann
authors.forename: U
authors.initials: U
authors.lastname: Heinzmann