title: Effective-viscosity approach for nonlocal electron kinetics in inductively coupled plasmas.
abstract: In inductively coupled plasmas, nonlocal electron kinetics lead to the anomalous skin effect. We show that this can be approximately described through a fluid equation for electron momentum including a viscosity term with an effective-viscosity coefficient. The solution of this momentum equation coupled with the Maxwell equations is in good agreement with results from a particle-in-cell simulation over a wide range of conditions, reproducing the nonmonotonic structure of the anomalous skin with sometimes local negative power absorption.
authors.affiliation: Laboratoire Plasma et Conversion d'Energie (LAPLACE, CNRS-UPS), Bâtiment 3R2, Université de Toulouse, 118 Route de Narbonne, 31062 Toulouse Cedex 9, France. gerjan.hagelaar@laplace.univ-tlse.fr
authors.forename: G J M
authors.initials: GJ
authors.lastname: Hagelaar