MPSA effects on copper electrodeposition investigated by molecular dynamics simulations.
In superconformal filling of copper-chip interconnects, organic additives are used to fill high-aspect-ratio trenches or vias from the bottom up. In this study we report on the development of intermolecular potentials and use molecular dynamics simulations to provide insight into the molecular function of an organic additive (3-mercaptopropanesulfonic acid or MPSA) important in superconformal electrodeposition. We also investigate how the presence of sodium chloride affects the surface adsorption and surface action of MPSA as well as the charge distribution in the system. We find that NaCl addition decreases the adsorption strength of MPSA at a simulated copper surface and attenuates the copper-ion association with MPSA. The model also was used to simulate induced-charge effects and adsorption on a nonplanar electrode surface.
Guymon
Clint G
CG
Department of Chemical Engineering, Brigham Young University, Provo, Utah 84602, USA.
Harb
John N
JN
Rowley
Richard L
RL
Wheeler
Dean R
DR