title: Detection of defects in multiple-layer structures by using surface plasmon resonance.
abstract: A method for diagnosing a silver-dielectric interface is proposed. This method relies on surface plasmon resonance at the Ag-dielectric interface. It yields a good estimate of an air gap between a thin Ag film and a polymer (dielectric). Detection of an air gap thickness of approximately half of the incident probing beam wavelength was monitored. Probing a small air gap is also discussed in the case of poor adhesion at the Ag-polymer interface.
authors.forename: L
authors.initials: L
authors.lastname: Lévesque
authors.forename: B E
authors.initials: BE
authors.lastname: Paton