Performance of high-density cast silicon carbide in the extreme ultraviolet.
The normal-incidence reflectance of high-density cast silicon carbide (SiC) is evaluated in the extreme ultraviolet (EUV) spectral region. High reflectivity in the EUV is achieved. High reflectivity and the relatively low-cost manufacturing process make high-density cast SiC a promising mirror material for EUV applications.
Keski-Kuha
R A
RA
Fleetwood
C M
CM
Robichaud
J
J