title: Generation of large-diameter diffractive elements with laser pattern generation.
abstract: We describe the design and construction of a high-precision laser writing machine for the direct generation of large-diameter rotationally symmetric diffractive optics with continuous profiles in photoresist. The photoresist profile can be used as a replication master surface or etched into a silica substrate. Machine design methodology, as well as qualification of performance, is provided. Test results for an f/2 100-mm clear-aperture diffractive lens directly etched into a silica substrate are presented. Diffraction efficiency as a function of zone spacing and wave-front performance are given.
authors.forename: J P
authors.initials: JP
authors.lastname: Bowen
authors.forename: R L
authors.initials: RL
authors.lastname: Michaels
authors.forename: C G
authors.initials: CG
authors.lastname: Blough