title: Integrated optical micromachined pressure sensor with spectrally encoded output and temperature compensation.
abstract: A promising type of optical pressure sensor combines an integrated optical interferometer with a micromachined diaphragm on a shared silicon substrate. We have demonstrated a sensor of this type that uses an unbalanced Mach-Zehnder waveguide interferometer together with a broadband source to produce a spectrally encoded measurement. This spectral encoding mechanism is advantageous as it is not readily degraded by transmission through optical fibers. We have also demonstrated a means to obtain a temperature-compensated pressure measurement by interrogating both polarization eigenmodes of the interferometer.
authors.affiliation: Department of Electrical and Computer Engineering and Computer Science, University of Cincinnati, Cincinnati, Ohio 45221-0030, USA.
authors.forename: G N
authors.initials: GN
authors.lastname: De Brabander
authors.forename: G
authors.initials: G
authors.lastname: Beheim
authors.forename: J T
authors.initials: JT
authors.lastname: Boyd