title: Single-mode optical waveguides fabricated from fluorinated polyimides.
abstract: Buried channel optical waveguides were fabricated from fluorinated polyimides. They operated in single mode and showed an optical loss of less than 0.3 and 0.7 dB/cm for TE and TM polarizations, respectively, at a wavelength of 1.3 mum. Moreover, these waveguides had high heat and moisture resistance; the optical loss did not significantly change after heating at 380 degrees C for 1 h or after exposure to 85% relative humidity at 85 degrees C for over 200 h.
authors.forename: J
authors.initials: J
authors.lastname: Kobayashi
authors.forename: T
authors.initials: T
authors.lastname: Matsuura
authors.forename: S
authors.initials: S
authors.lastname: Sasaki
authors.forename: T
authors.initials: T
authors.lastname: Maruno