title: Excimer laser micromachining for rapid fabrication of diffractive optical elements.
abstract: We demonstrate the fabrication of binary, multilevel, and blazed diffractive structures by a fast and flexible direct-write process by using an excimer-laser-based tabletop micromachining workstation with an integrated optical surface profiler.
authors.forename: G P
authors.initials: GP
authors.lastname: Behrmann
authors.forename: M T
authors.initials: MT
authors.lastname: Duignan