title: Design and fabrication of binary slanted surface-relief gratings for a planar optical interconnection.
abstract: We propose the use of binary slanted surface-relief gratings with parallel-groove walls as input and output couplers in a planar optical interconnect. Parametric optimization of cascaded output couplers is employed to design an interconnect consisting of N output couplers producing a uniform intensity distribution with a high efficiency that may be realized in one lithographic etching step. The sensitivity of a N = 4 interconnect to various fabrication errors is analyzed. We demonstrate the operation of a slanted surface-relief grating manufactured with electron-beam lithography and reactive-ion etching for an operating wavelength of lambda = 0.633 mum.
authors.forename: J M
authors.initials: JM
authors.lastname: Miller
authors.forename: N
authors.initials: N
authors.lastname: de Beaucoudrey
authors.forename: P
authors.initials: P
authors.lastname: Chavel
authors.forename: J
authors.initials: J
authors.lastname: Turunen
authors.forename: E
authors.initials: E
authors.lastname: Cambril