title: Preparation of (001)-oriented Pb(Zr,Ti)O3 thin films and their piezoelectric applications.
abstract: Preparation of (001)-oriented Pb(Zr,Ti)O(3) (PZT) thin films and their applications to a sensor and actuators were investigated. These thin films, which have a composition close to the morphotropic phase boundary, were epitaxially grown on (100)MgO single-crystal substrates by RF magnetron sputtering. These (001)-oriented PZT thin films could be obtained on various kinds of substrates, such as glass and Si, by introducing (100)-oriented MgO buffer layers. In addition, the (001) oriented PZT thin films could be obtained on Si substrates without buffer layers by optimizing the sputtering conditions. All of these thin films showed excellent piezoelectric properties without the need for poling treatment. The PZT thin films on the MgO substrates had a high piezoelectric coefficient, d(31), of -100 pm/V, and an extremely low relative dielectric constant, epsilon(r), of 240. The PZT thin films on Si substrate had a very high d(31) of -150 pm/V and an epsilon(r) = 700. These PZT thin films were applied to an angular rate sensor with a tuning fork in a car navigation system, to a dual-stage actuator for positioning the magnetic head of a high-density hard disk drive, and to an actuator for an inkjet printer head for industrial on-demand printers.
authors.affiliation: Advanced Technology Research Laboratories, Matsushita Electric Industrial Company Ltd., Seika-cho, Soraku-gun, Kyoto, Japan. fujii.e710@jp.panasonic.com
authors.forename: Eiji
authors.initials: E
authors.lastname: Fujii
authors.forename: Ryoichi
authors.initials: R
authors.lastname: Takayama
authors.forename: Kouji
authors.initials: K
authors.lastname: Nomura
authors.forename: Akiko
authors.initials: A
authors.lastname: Murata
authors.forename: Taku
authors.initials: T
authors.lastname: Hirasawa
authors.forename: Atsushi
authors.initials: A
authors.lastname: Tomozawa
authors.forename: Satoru
authors.initials: S
authors.lastname: Fujii
authors.forename: Takeshi
authors.initials: T
authors.lastname: Kamada
authors.forename: Hideo
authors.initials: H
authors.lastname: Torii
mesh_terms: D004563:Electrochemistry / Q000295:instrumentation / Q000379:methods; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007854:Lead / Q000737:chemistry*; D008422:Materials Testing; D008567:Membranes, Artificial; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D014025:Titanium / Q000737:chemistry*; D014159:Transducers; D014463:Ultrasonography / Q000295:instrumentation* / Q000379:methods; D015040:Zirconium / Q000737:chemistry*
chemical_list: D008567:Membranes, Artificial; C065536:lead titanate zirconate; D007854:Lead; D015040:Zirconium; D014025:Titanium