title: Rapid fabrication of diffractive optical elements by use of image-based excimer laser ablation.
abstract: We describe a method of fabricating multilevel diffractive optics by excimer laser ablation. A portion of a chrome mask containing many patterns is illuminated by 193-nm laser light and imaged by an objective lens onto a poly(imide) substrate. Ablation of an entire single pattern is achieved in a single laser pulse. Multiple pulses are used to vary the ablation depth, and multiple patterns are used to create a variety of multilevel optics. We have successfully fabricated arrays of eight-level diffractive microlenses with varying focal lengths and decenters. The optics performed with diffraction-limited focusing and near-theoretical diffraction efficiency (92%).
authors.forename: X
authors.initials: X
authors.lastname: Wang
authors.forename: J R
authors.initials: JR
authors.lastname: Leger
authors.forename: R H
authors.initials: RH
authors.lastname: Rediker