Piezoelectric properties of (K,Na)NbO3 thin films deposited on (001)SrRuO3/Pt/MgO substrates.
(K(x),Na(1-x))NbO(3) (KNN) thin films were deposited on (001)SrRuO(3)/(001)Pt/(001)MgO substrates by RF-magnetron sputtering, and their piezoelectric properties were investigated. The x-ray diffraction measurements indicated that the KNN thin films were epitaxially grown with the c-axis orientation in the perovskite tetragonal system. The lattice constant of the c-axis increased with increasing concentrations of potassium. The KNN thin films showed typical ferroelectric behavior; the relative dielectric constant epsilon(r) was 270 to approximately 320. The piezoelectric properties were measured from the tip displacement of the KNN/MgO unimorph cantilevers; the transverse piezoelectric coefficient epsilon*(31) (= d(31)/s(E)(11)) of KNN (x = 0) thin films was calculated to be -0.9 C/m(2). On the other hand, doping of potassium caused an increase in the piezoelectric properties, and the KNN (x = 0.16) films showed a relatively large transverse piezoelectricity of epsilon*(31) = -2.4 C/m(2).
Kanno
Isaku
I
Department of Micro Engineering, Kyoto University, Yoshida Honmachi, Sakyouku, Kyoto, Japan. kanno@mech.kyoto-u.ac.jp
Mino
Takuya
T
Kuwajima
Shuichiro
S
Suzuki
Takaaki
T
Kotera
Hidetoshi
H
Wasa
Kiyotaka
K
D002516:Ceramics / Q000737:chemistry*; D003198:Computer Simulation; D004553:Electric Conductivity; D008422:Materials Testing; D008567:Membranes, Artificial; D008956:Models, Chemical; D009556:Niobium / Q000737:chemistry*; D010087:Oxides / Q000737:chemistry*; D011188:Potassium / Q000737:chemistry*
D008567:Membranes, Artificial; D010087:Oxides; D009556:Niobium; C477466:potassium niobate; D011188:Potassium