Scattering of obliquely incident surface acoustic waves at the boundary between metallized and free surfaces on anisotropic substrates.
A method of theoretically analyzing the reflection and transmission of obliquely incident acoustic surface waves at the boundary between metallized and free surfaces on substrates with general anisotropy is presented. The analysis is performed under the assumption that the fields of the reflecting/transmitting wave can be expressed as a linear combination of three-dimensional surface-wave solutions for the unbounded metallized or free surface, having a common wave number in the direction along the boundary. From the approximate wave matching condition at the boundary, analytical expressions of the reflection and transmission coefficients are derived. Numerical results of field distributions for different kinds of substrates demonstrate the effectiveness of the present analysis.
Yamada
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Fac. of Eng., Toyohashi Univ. of Technol.
Shimizu
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H