Empirical equations for the principal refractive indices and column angle of obliquely deposited films of tantalum oxide, titanium oxide, and zirconium oxide.
Values of the transmittance T(s) and the phaseretardation D were recorded in situ at two angles duringthe growth of thin films of tantalum oxide, titanium oxide, andzirconium oxide for deposition angles theta(nu) in the range40 degrees -70 degrees . Column angles for the same films were determinedex situ from scanning electron microscopy photographs ofdeposition-plane fractures. We show that the experimental columnangles are smaller than the corresponding values predicted by thetangent-rule equation psi = tan(-1)(0.5 tan theta(nu)) and that the experimental values fit a modifiedform of the equation psi = tan(-1)(E(1) tan theta(nu)) where E(1) is less than 0.5. We also show that theprincipal refractive indices are represented well by quadraticfunctions of the deposition angle, for example, n(1)(theta(nu)) = A(0) + A(2) theta(nu)(2).
Hodgkinson
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Wu
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Hazel
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