title: Very large deflection with quadratic voltage dependence of ZnO on Si(3)N(4) bimorph.
abstract: ZnO on Si(3)N(4) bimorphs have shown large deflections with quadratic dependence on applied voltages. Several effects are suggested that might explain these large deflections. No conclusion on the origin of these large deflections can yet be given.
authors.affiliation: Dept. of Electr. Eng., Boston Univ., MA.
authors.forename: J G
authors.initials: JG
authors.lastname: Smits
authors.forename: W
authors.initials: W
authors.lastname: Choi