Microlenses and Microlens Arrays Formed on a Glass Plate by Use of a CO(2) Laser.
Microlenses and microlens arrays were formed directly on a surface of a glass plate by use of a CO(2) laser. When the surface of a glass plate is heated locally to a working point of the glass material by use of a focused CO(2) laser beam, it tends to become a hyperboloid owing to surface tension, which results in a microlens. A profile of the microlens was measured with an ultrahigh accurate three-dimensional profilometer (Model UA3P, Matsusita Electric Industrial Company Ltd.) that utilizes a specially designed atomic force microscope. An intensity profile and a spot diameter at the focus of the microlens were measured with a microscope and a CCD system utilizing a He-Ne laser as a light source. The focused spot FWHM diameter of 1.35 mum was obtained, and the modulation transfer function was derived from the spot profile. Microlens arrays were also fabricated and characterized.
Wakaki
M
M
Komachi
Y
Y
Kanai
G
G