325-nm Interference Microscope.
We first discuss an interference microscope's 3D response in terms of Richards and Wolf's vector theory. We then report the results we obtained with a 325-nm interference microscope using an ultraviolet transparent beam splitter, short-working-distance Mirau interferometer. The microscope performs at near-ideal definitions with a measured FWHM of the intensity spot at 0.14 mum and a FWHM of the depth envelope intensity at 0.25 mum. Feasibility of a shorter wavelength system operating at 248 nm is demonstrated.
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