Investigation of rough surfaces and transparent birefringent samples with Mueller-matrix scatterometry.
Measurements made with an automated angle-resolved Mueller-matrix scatterometer are described. The instrument uses incident-polarization electro-optical modulation, division-of-amplitude photopolarimetry, and software-implemented Fourier-transform analysis of the detected signals to determine the scattered Mueller matrix of the sample. The measurement time is approximately 1 s per scattering angle. Applications to the control of surface roughness and structure on rough steel sheets (galvanized and uncoated) and of the properties of transparent birefringent optical elements (liquid-crystal devices) are discussed.
Delplancke
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