title: Performance of high-density cast silicon carbide in the extreme ultraviolet.
abstract: The normal-incidence reflectance of high-density cast silicon carbide (SiC) is evaluated in the extreme ultraviolet (EUV) spectral region. High reflectivity in the EUV is achieved. High reflectivity and the relatively low-cost manufacturing process make high-density cast SiC a promising mirror material for EUV applications.
authors.forename: R A
authors.initials: RA
authors.lastname: Keski-Kuha
authors.forename: C M
authors.initials: CM
authors.lastname: Fleetwood
authors.forename: J
authors.initials: J
authors.lastname: Robichaud