High accuracy, wide range, rotation angle measurement by the use of two parallel interference patterns.
Based on the idea of measuring small rotation angles with a parallel interference pattern (PIP), a method is developed to measure large rotation angles accurately. Two parallel PIP's that have different periods are used to measure a rotation angle of an object. The measurement made with a small-period PIP provides a high accuracy, and the measurement made with a large-period PIP provides a wide range. An accurate measurement for wide-range angles is made by combining the two measured values. The accuracy of the phase detection is determined by the periods of two PIP's. Rotation angles from approximately -30 to 30 arc min can be measured with an accuracy of 0.2 arc sec. Analytical results are supported by experimental results.
Dai
X
X
Sasaki
O
O
Greivenkamp
J E
JE
Suzuki
T
T