title: Status of ITEP decaborane ion source program.
abstract: The joint research and development program is continued to develop steady-state ion source of decaborane beam for ion implantation industry. Both Freeman and Bernas ion sources for decaborane ion beam generation were investigated. Decaborane negative ion beam as well as positive ion beam were generated and delivered to the output of mass separator. Experimental results obtained in ITEP are presented.
authors.affiliation: Institute for Theoretical and Experimental Physics, Moscow, Russia. kulevoy@itep.ru
authors.forename: T V
authors.initials: TV
authors.lastname: Kulevoy
authors.forename: S V
authors.initials: SV
authors.lastname: Petrenko
authors.forename: R P
authors.initials: RP
authors.lastname: Kuibeda
authors.forename: D N
authors.initials: DN
authors.lastname: Seleznev
authors.forename: V A
authors.initials: VA
authors.lastname: Koshelev
authors.forename: A V
authors.initials: AV
authors.lastname: Kozlov
authors.forename: Yu B
authors.initials: YB
authors.lastname: Stasevich
authors.forename: A L
authors.initials: AL
authors.lastname: Sitnikov
authors.forename: I M
authors.initials: IM
authors.lastname: Shamailov
authors.forename: V I
authors.initials: VI
authors.lastname: Pershin
authors.forename: A
authors.initials: A
authors.lastname: Hershcovitch
authors.forename: B M
authors.initials: BM
authors.lastname: Johnson
authors.forename: V I
authors.initials: VI
authors.lastname: Gushenets
authors.forename: E M
authors.initials: EM
authors.lastname: Oks
authors.forename: H P
authors.initials: HP
authors.lastname: Poole
authors.forename: E S
authors.initials: ES
authors.lastname: Masunov
authors.forename: S M
authors.initials: SM
authors.lastname: Polozov