title: Polar coordinate laser pattern generator for fabrication of diffractive optical elements with arbitrary structure.
abstract: A precision laser pattern generator for writing arbitrary diffractive elements was developed as an alternative to Cartesian coordinate laser/electron-beam writers. This system allows for the fabrication of concentric continuous-relief and arbitrary binary patterns with minimum feature sizes of less than 0.6 microm and position accuracy of 0.1 microm over 300-mm substrates. Two resistless technologies of writing on chromium and on amorphous silicon films were developed and implemented. We investigated limit characteristics by writing special test structures. A 58-mm f/1.1 zone plate written directly is demonstrated at a lambda/50 rms wave-front error corresponding to a 0.06-microm pattern accuracy. Several examples of fabricated diffractive elements are presented.
authors.affiliation: Laboratory of Laser Technologies, Institute of Automation and Electrometry, Russian Academy of Sciences, Koptuga Prospekt 1, 630090 Novosibirsk, Russia. alexp@okibox.iae.nsk.su
authors.forename: A G
authors.initials: AG
authors.lastname: Poleshchuk
authors.forename: E G
authors.initials: EG
authors.lastname: Churin
authors.forename: V P
authors.initials: VP
authors.lastname: Koronkevich
authors.forename: V P
authors.initials: VP
authors.lastname: Korolkov
authors.forename: A A
authors.initials: AA
authors.lastname: Kharissov
authors.forename: V V
authors.initials: VV
authors.lastname: Cherkashin
authors.forename: V P
authors.initials: VP
authors.lastname: Kiryanov
authors.forename: A V
authors.initials: AV
authors.lastname: Kiryanov
authors.forename: S A
authors.initials: SA
authors.lastname: Kokarev
authors.forename: A G
authors.initials: AG
authors.lastname: Verhoglyad