title: Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution.
abstract: We have demonstrated near-wavelength resolution microscopy in the extreme ultraviolet. Images of 50 nm diameter nanotubes were obtained with a single ~1 ns duration pulse from a desktop-size 46.9 nm laser. We measured the modulation transfer function of the microscope for three different numerical aperture zone plate objectives, demonstrating that 54 nm half-period structures can be resolved. The combination of near-wavelength spatial resolution and high temporal resolution opens myriad opportunities in imaging, such as the ability to directly investigate dynamics of nanoscale structures.
authors.affiliation: National Science Foundation Engineering Research Center for Extreme Ultraviolet Science and Technology, Colorado State University, Fort Collins, CO 80523, USA. brewerca@engr.colostate.edu
authors.forename: Courtney A
authors.initials: CA
authors.lastname: Brewer
authors.forename: Fernando
authors.initials: F
authors.lastname: Brizuela
authors.forename: Przemyslaw
authors.initials: P
authors.lastname: Wachulak
authors.forename: Dale H
authors.initials: DH
authors.lastname: Martz
authors.forename: Weilun
authors.initials: W
authors.lastname: Chao
authors.forename: Erik H
authors.initials: EH
authors.lastname: Anderson
authors.forename: David T
authors.initials: DT
authors.lastname: Attwood
authors.forename: Alexander V
authors.initials: AV
authors.lastname: Vinogradov
authors.forename: Igor A
authors.initials: IA
authors.lastname: Artyukov
authors.forename: Alexander G
authors.initials: AG
authors.lastname: Ponomareko
authors.forename: Valeriy V
authors.initials: VV
authors.lastname: Kondratenko
authors.forename: Mario C
authors.initials: MC
authors.lastname: Marconi
authors.forename: Jorge J
authors.initials: JJ
authors.lastname: Rocca
authors.forename: Carmen S
authors.initials: CS
authors.lastname: Menoni