title: Comparative study of the roughness of optical surfaces and thin films by use of X-ray scattering and atomic force microscopy.
abstract: The surface roughness of polished glass substrates and optical thin-film coatings is studied with atomic force microscopy and x-ray scattering. It is demonstrated that both methods permit the determination of power spectral density functions in a wide range of spatial frequencies. The results are in good quantitative agreement.
authors.affiliation: Institute of Crystallography, Leninsky prospect 59, Moscow 117333 Russia.
authors.forename: V E
authors.initials: VE
authors.lastname: Asadchikov
authors.forename: A
authors.initials: A
authors.lastname: Duparré
authors.forename: S
authors.initials: S
authors.lastname: Jakobs
authors.forename: A Y
authors.initials: AY
authors.lastname: Karabekov
authors.forename: I V
authors.initials: IV
authors.lastname: Kozhevnikov
authors.forename: Y S
authors.initials: YS
authors.lastname: Krivonosov