title: Effects of fundamental and second harmonic electron cyclotron resonances on ECRIS.
abstract: A new concept on magnetic field of plasma production and confinement has been proposed to enhance efficiency of an electron cyclotron resonance (ECR) plasma for broad and dense ion beam source under the low pressure. The magnetic field configuration is constructed by a pair of comb-shaped magnet which has opposite polarity to each other, and which cylindrically surrounds the plasma chamber. This magnetic configuration suppresses the loss due to E x B drift, and then plasma confinement is enhanced. The profiles of the electron temperature and density are measured around the ECR zones of the fundamentals and the second harmonics for 2.45 GHz and 11-13 GHz microwaves by using Langmuir probe. Their characteristics and effects are clarified under various operating conditions in both of simple multipole and comb-shaped magnetic configurations.
authors.affiliation: Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University, Suita-Shi, Osaka, Japan. kato@eei.eng.osaka-u.ac.jp
authors.forename: Yushi
authors.initials: Y
authors.lastname: Kato
authors.forename: Takashi
authors.initials: T
authors.lastname: Satani
authors.forename: Toyohisa
authors.initials: T
authors.lastname: Asaji
authors.forename: Fuminobu
authors.initials: F
authors.lastname: Sato
authors.forename: Toshiyuki
authors.initials: T
authors.lastname: Iida