In situ 3omega techniques for measuring thermal conductivity of phase-change materials.
Knowledge of the thermal conductivity of phase-change materials is essential for accurate modeling of nonvolatile memory devices that incorporate them. The "3omega method" is a well-established and sensitive technique for measuring this property. We report two new extensions of the 3omega technique that feature in situ monitoring of the phase-change material as it transitions from the as-deposited amorphous phase to the crystalline phase. One technique crystallizes the entire sample in a vacuum oven, while using the 3omega voltage to monitor the phase transition. The other technique uses the 3omega heater to crystallize only the material in the region of measurement.
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IBM/Qimonda/Macronix PCRAM Joint Project, IBM Almaden Research Center, 650 Harry Rd., San Jose, California 95120, USA.
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Raoux
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