title: Carbon/Titanium multilayers as soft-x-ray mirrors for the water window.
abstract: C/Ti multilayers with a period thickness of 2.1-2.7 nm were produced by electron-beam evaporation in ultrahigh vacuum as soft-x-ray mirrors in the water window (lambda = 2.3-4.4 nm). For smoothing the individual interfaces and thus enhancing the total reflectance, each layer was ion polished with an Ar(+) ion beam after deposition. For a multilayer of 85 bilayers, a reflectance of approximately 11% at an angle of incidence of 59 degrees (with respect to the surface normal) by use of s-polarized radiation at a wavelength of 2.77 nm was achieved.
authors.forename: H J
authors.initials: HJ
authors.lastname: Stock
authors.forename: G
authors.initials: G
authors.lastname: Haindl
authors.forename: F
authors.initials: F
authors.lastname: Hamelmann
authors.forename: D
authors.initials: D
authors.lastname: Menke
authors.forename: O
authors.initials: O
authors.lastname: Wehmeyer
authors.forename: U
authors.initials: U
authors.lastname: Kleineberg
authors.forename: U
authors.initials: U
authors.lastname: Heinzmann
authors.forename: P
authors.initials: P
authors.lastname: Bulicke
authors.forename: D
authors.initials: D
authors.lastname: Fuchs
authors.forename: G
authors.initials: G
authors.lastname: Ulm