Phase-Shifting Interferometry and Maximum-Likelihood Estimation Theory. II. A Generalized Solution.
A novel means of quantitatively assessing the performance of a phase-shifting interferometer is further investigated. We show how maximum-likelihood estimation theory can be used to estimate the surface profile from the general case of M noisy, phase-shifted measurements. Monte Carlo experiments show that the maximum-likelihood estimator is unbiased and efficient, achieving the theoretical Cramér-Rao lower bound on the variance of the error. We then use Monte Carlo experiments to compare the performance of the maximum-likelihood estimator with that of two conventional algorithms.
Rogala
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Barrett
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