Comparative study of the roughness of optical surfaces and thin films by use of X-ray scattering and atomic force microscopy.
The surface roughness of polished glass substrates and optical thin-film coatings is studied with atomic force microscopy and x-ray scattering. It is demonstrated that both methods permit the determination of power spectral density functions in a wide range of spatial frequencies. The results are in good quantitative agreement.
Asadchikov
V E
VE
Institute of Crystallography, Leninsky prospect 59, Moscow 117333 Russia.
Duparré
A
A
Jakobs
S
S
Karabekov
A Y
AY
Kozhevnikov
I V
IV
Krivonosov
Y S
YS