Integration of grating couplers in two-story waveguides for rotary displacement sensing.
An integrated-optic device, constructed by stacking two types of grating coupler in a two-story structure of waveguides, is proposed for sensing angular displacement of spindle rotation. In the first story a guided wave is diffracted by a grating coupler and becomes a sensing beam. The sensing beam is reflected by a mirror with a quarter-wave plate attached to a spindle head and is coupled back into the second story by another grating coupler. We measured the rotary displacement of the spindle by detecting variation of polarization direction of the reflected beam. A prototype device has been designed and fabricated, and the operation principle is experimentally confirmed.
Ura
S
S
Sugimoto
A
A
Suhara
T
T
Nishihara
H
H