title: A Shack-Hartmann measuring head for the two-dimensional characterization of X-ray mirrors.
abstract: The recent development of short-wavelength optics (X/EUV, synchrotrons) requires improved metrology techniques in terms of accuracy and curvature dynamic range. In this article a stitching Shack-Hartmann head dedicated to be mounted on translation stages for the characterization of X-ray mirrors is presented. The principle of the instrument is described and experimental results for an X-ray toroidal mirror are presented. Submicroradian performances can be achieved and systematic comparison with a classical long-trace profiler is presented. The accuracy and wide dynamic range of the Shack-Hartmann long-trace-profiler head allow two-dimensional characterizations of surface figure and curvature with a submillimeter spatial resolution.
authors.affiliation: Imagine Optic, France. jfloriot@imagine-optic.com
authors.forename: Johan
authors.initials: J
authors.lastname: Floriot
authors.forename: Xavier
authors.initials: X
authors.lastname: Levecq
authors.forename: Samuel
authors.initials: S
authors.lastname: Bucourt
authors.forename: Muriel
authors.initials: M
authors.lastname: Thomasset
authors.forename: François
authors.initials: F
authors.lastname: Polack
authors.forename: Mourad
authors.initials: M
authors.lastname: Idir
authors.forename: Pascal
authors.initials: P
authors.lastname: Mercère
authors.forename: Thierry
authors.initials: T
authors.lastname: Moreno
authors.forename: Sylvain
authors.initials: S
authors.lastname: Brochet