Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution.
We have demonstrated near-wavelength resolution microscopy in the extreme ultraviolet. Images of 50 nm diameter nanotubes were obtained with a single ~1 ns duration pulse from a desktop-size 46.9 nm laser. We measured the modulation transfer function of the microscope for three different numerical aperture zone plate objectives, demonstrating that 54 nm half-period structures can be resolved. The combination of near-wavelength spatial resolution and high temporal resolution opens myriad opportunities in imaging, such as the ability to directly investigate dynamics of nanoscale structures.
Brewer
Courtney A
CA
National Science Foundation Engineering Research Center for Extreme Ultraviolet Science and Technology, Colorado State University, Fort Collins, CO 80523, USA. brewerca@engr.colostate.edu
Brizuela
Fernando
F
Wachulak
Przemyslaw
P
Martz
Dale H
DH
Chao
Weilun
W
Anderson
Erik H
EH
Attwood
David T
DT
Vinogradov
Alexander V
AV
Artyukov
Igor A
IA
Ponomareko
Alexander G
AG
Kondratenko
Valeriy V
VV
Marconi
Mario C
MC
Rocca
Jorge J
JJ
Menoni
Carmen S
CS