Effect of fabrication errors in channel waveguide Bragg gratings.
The spectral performances of nonideal rectangular Bragg gratings, integrated in a rib waveguide, are analyzed by a multilayer approach based on the effective-index method. The effects of errors on the photolithographic definition of the grating, that is, period and shape, and of errors on the control of etching depth are investigated. Also the influence of the stitching error, which is unavoidable when the grating is realized by means of electron-beam photolithography, is addressed. A novel analytical approach that extends coupled-mode theory to the analysis of real gratings is also presented.
Coppola
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Department of Electronic Engineering, University of Naples Federico II, Via Claudio 21, 80125 Naples, Italy.
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