Inductive coupled radio frequency plasma bridge neutralizer.
A 13.56 MHz radio frequency plasma bridge neutralizer (rf-PBN) for ion thruster applications as well as ion beam surface processing of insulating materials is presented. The energy for the plasma excitation is inductively coupled into the plasma chamber. Because no components are located inside the plasma, the lifetime of the rf-PBN is expected to be very long. A compact tuning system adapts the input power to the plasma impedance. The electron current may be controlled over a wide range by the rf input power. An electron current of up to 1.6 A has been extracted.
Scholze
F
F
Leibniz Institute of Surface Modification, Permoserstr 15, Leipzig, Germany. frank.scholze@iom-leipzig.de
Tartz
M
M
Neumann
H
H