title: Towards environmentally friendly, dry deposited, water developable molecular glass photoresists.
abstract: Photoresists based on molecular glasses are gaining more and more importance as resist material to replace polymer based photoresist. In addition environmental issues have to be considered in the long-term. Therefore the paper describes novel negative photoresists containing a ternary mixture of a glassy low molecular functional polyphenol where the film preparation is possible by solvent-free physical vapor deposition. After UV light exposure and a thermal annealing process to enable acid catalyzed crosslinking between the molecular glass and the crosslinker, the photoresist was developed using only water to give well-defined patterns. In order to experimentally study efficiently the multiple parameters such as composition, exposure dose, and development times combinatorial PVD techniques were utilized.
authors.affiliation: Makromolekulare Chemie I, Bayreuther Institut für Makromolekülforschung (BIMF) and Bayreuther Zentrum für Kolloide und Grenzflächen (BZKG), Universität Bayreuth, 95440, Bayreuth, Germany.
authors.forename: Frauke
authors.initials: F
authors.lastname: Pfeiffer
authors.forename: Nelson M
authors.initials: NM
authors.lastname: Felix
authors.forename: Christian
authors.initials: C
authors.lastname: Neuber
authors.forename: Christopher K
authors.initials: CK
authors.lastname: Ober
authors.forename: Hans-Werner
authors.initials: HW
authors.lastname: Schmidt
mesh_terms: D002384:Catalysis; D002839:Chromans / Q000737:chemistry; D020650:Combinatorial Chemistry Techniques; D005419:Flavonoids / Q000737:chemistry* / Q000528:radiation effects*; D005898:Glass / Q000737:chemistry / Q000528:radiation effects; D007189:Indans / Q000737:chemistry; D015394:Molecular Structure; D010636:Phenols / Q000737:chemistry* / Q000528:radiation effects*; D010777:Photochemistry; D059808:Polyphenols; D015363:Quinolones / Q000737:chemistry; D013141:Spiro Compounds / Q000737:chemistry; D013499:Surface Properties; D014466:Ultraviolet Rays; D014867:Water / Q000737:chemistry
chemical_list: C528760:5,5'6,6'-terahydroxy-3,3,3',3'-tetramethyl-1,1'-spirobisindane; C528761:6,6',7,7'-tetrahydroxy-4,4,4',4'-tetramethyl-2,2'-spirobichroman; D002839:Chromans; D005419:Flavonoids; D007189:Indans; D010636:Phenols; D059808:Polyphenols; D015363:Quinolones; D013141:Spiro Compounds; D014867:Water; C514679:N-hydroxynaphthalimide