title: Highly coherent injection-seeded 13.2 nm tabletop soft x-ray laser.
abstract: We report a dramatic improvement of the spatial coherence and beam divergence (0.66 mrad) of a 13.2 nm wavelength Ni-like Cd tabletop laser by injection seeding the soft x-ray laser amplifier with high-harmonics pulses generated in a Ne gas jet. This phase coherent laser is an attractive light source for at-wavelength interferometry of extreme ultraviolet lithography optics and other applications.
authors.affiliation: National Science Foundation Engineering Research Center for Extreme Ultraviolet Science and Technology, Colorado State University, Fort Collins, CO 80523, USA.
authors.forename: F
authors.initials: F
authors.lastname: Pedaci
authors.forename: Y
authors.initials: Y
authors.lastname: Wang
authors.forename: M
authors.initials: M
authors.lastname: Berrill
authors.forename: B
authors.initials: B
authors.lastname: Luther
authors.forename: E
authors.initials: E
authors.lastname: Granados
authors.forename: J J
authors.initials: JJ
authors.lastname: Rocca