Propagation of boundary acoustic waves along a ZnO layer between two materials.
Theoretical and experimental results on boundary acoustic waves propagated along a ZnO layer sandwiched between two materials are presented. It is shown that boundary acoustic waves can exist only when the material constants of the three materials satisfy the particular conditions obtained here. Experiments on SiO(2)/ZnO/SiO(2 ) were performed to verify the theoretical prediction of the existence of boundary waves. Boundary waves were excited and received by interdigital transducers and propagated along the ZnO layer. Propagation loss was practically the same as for Rayleigh waves, indicating a proper mode of the system. The results suggest that future SAW (surface acoustic wave) devices can be made without any package.
Irino
T
T
Tokyo Inst. of Technol.
Shirosaki
Y
Y
Shimizu
Y
Y