title: Some considerations of reduction of reference phase error in phase-stepping interferometry.
abstract: Positioning errors and miscalibrations of the phase-stepping device in a phase-stepping interferometer lead to systematic errors proportional to twice the measured phase distribution. We discuss the historical development of various error-compensating phase-shift algorithms from a unified mathematical point of view. Furthermore, we demonstrate experimentally that systematic errors can also be removed a posteriori. A Twyman-Green-type microlens test interferometer was used for the experiments.
authors.affiliation: Lehrstuhl für Optik, Universität Erlangen-Nürnberg Staudtstrasse 7, D-91058 Erlangen, Germany.
authors.forename: J
authors.initials: J
authors.lastname: Schwider
authors.forename: T
authors.initials: T
authors.lastname: Dresel
authors.forename: B
authors.initials: B
authors.lastname: Manzke