title: Experimental comparison of time-of-flight mass analysis with magnetic mass analysis.
abstract: A series of experiments was carried out in which both a magnetic analyzer (mass separator) and a time-of-flight (TOF) spectrometer were used for ion charge/mass spectral analysis of the ion beam formed by a dc Bernas ion source made for semiconductor implantation. The TOF analyzer was a detachable device that provides rapid analysis of charge-to-mass composition of moderate energy ion beams. The magnetic analyzer was a massive device using a 90 degrees -sector bending magnet with radius of the central orbit of 35 cm. Comparison of these two methods for measuring ion beam composition shows good agreement.
authors.affiliation: High Current Electronics Institute, Russian Academy of Sciences, Tomsk, Russia.
authors.forename: V I
authors.initials: VI
authors.lastname: Gushenets
authors.forename: A S
authors.initials: AS
authors.lastname: Bugaev
authors.forename: E M
authors.initials: EM
authors.lastname: Oks
authors.forename: T V
authors.initials: TV
authors.lastname: Kulevoy
authors.forename: A
authors.initials: A
authors.lastname: Hershcovitch
authors.forename: I G
authors.initials: IG
authors.lastname: Brown