title: Single-shot depth-section imaging through chromatic slit-scan confocal microscopy.
abstract: A chromatic confocal microscope constructed with a white-light source in combination with a diffractive lens provides wavelength-to-depth coding for profile measurements of a three-dimensional sample. We acquired depth-section images nonmechanically and in parallel by incorporating a slit-scan confocal technique into the system. A system using a 100x objective obtained a depth resolution of 0.023 mum comparable with surface profilometers that operate using conventional confocal microscopy. Experimental measurements of a four-phase-level diffractive element and of a machined, metal bearing are presented.
authors.forename: P C
authors.initials: PC
authors.lastname: Lin
authors.forename: P C
authors.initials: PC
authors.lastname: Sun
authors.forename: L
authors.initials: L
authors.lastname: Zhu
authors.forename: Y
authors.initials: Y
authors.lastname: Fainman