Highly coherent injection-seeded 13.2 nm tabletop soft x-ray laser.
We report a dramatic improvement of the spatial coherence and beam divergence (0.66 mrad) of a 13.2 nm wavelength Ni-like Cd tabletop laser by injection seeding the soft x-ray laser amplifier with high-harmonics pulses generated in a Ne gas jet. This phase coherent laser is an attractive light source for at-wavelength interferometry of extreme ultraviolet lithography optics and other applications.
Pedaci
F
F
National Science Foundation Engineering Research Center for Extreme Ultraviolet Science and Technology, Colorado State University, Fort Collins, CO 80523, USA.
Wang
Y
Y
Berrill
M
M
Luther
B
B
Granados
E
E
Rocca
J J
JJ