Development of compact high precision two degree of freedom XY piezoelectric stepping positioner.
In this article, a linear piezoelectric stepping positioner developed by Kang et al. [Rev. Sci. Instrum. 78, 075112 (2007)] is extended to have a two degree of freedom XY linear motion and it is experimentally evaluated. A resolution less than 10 nm, a speed of over 0.5 mm/s, push forces of 17.9 and 19.5, and stiffnesses of 6.54 and 5.90 N/microm are attained while maintaining a compact size of 96x96x39 mm3 and the required power consumption of 102.74 W.
Kang
Dongwoo
D
Nano-Opto-Mechatronics Laboratory, Department of Mechanical Engineering, KAIST, 373-1 Guseong-Dong, Yuseong-Gu, Daejeon 305-701, Republic of Korea. dwkang@kaist.ac.kr
Kim
Jungjae
J
Lee
Moon G
MG
Gweon
Daegab
D