title: Ion sources for energy extremes of ion implantation.
abstract: For the past four years a joint research and development effort designed to develop steady state, intense ion sources has been in progress with the ultimate goal to develop ion sources and techniques that meet the two energy extreme range needs of meV and hundreads of eV ion implanters. This endeavor has already resulted in record steady state output currents of high charge state of antimony and phosphorus ions: P(2+) [8.6 pmA (particle milliampere)], P(3+) (1.9 pmA), and P(4+) (0.12 pmA) and 16.2, 7.6, 3.3, and 2.2 pmA of Sb(3+)Sb(4+), Sb(5+), and Sb(6+) respectively. For low energy ion implantation, our efforts involve molecular ions and a novel plasmaless/gasless deceleration method. To date, 1 emA (electrical milliampere) of positive decaborane ions was extracted at 10 keV and smaller currents of negative decaborane ions were also extracted. Additionally, boron current fraction of over 70% was extracted from a Bernas-Calutron ion source, which represents a factor of 3.5 improvement over currently employed ion sources.
authors.affiliation: Brookhaven National Laboratory, Upton, NY 11973, USA. hershcovitch@bnl.gov
authors.forename: A
authors.initials: A
authors.lastname: Hershcovitch
authors.forename: B M
authors.initials: BM
authors.lastname: Johnson
authors.forename: V A
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authors.lastname: Batalin
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authors.lastname: Kropachev
authors.forename: R P
authors.initials: RP
authors.lastname: Kuibeda
authors.forename: T V
authors.initials: TV
authors.lastname: Kulevoy
authors.forename: A A
authors.initials: AA
authors.lastname: Kolomiets
authors.forename: V I
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authors.lastname: Pershin
authors.forename: S V
authors.initials: SV
authors.lastname: Petrenko
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authors.lastname: Rudskoy
authors.forename: D N
authors.initials: DN
authors.lastname: Seleznev
authors.forename: A S
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authors.lastname: Bugaev
authors.forename: V I
authors.initials: VI
authors.lastname: Gushenets
authors.forename: I V
authors.initials: IV
authors.lastname: Litovko
authors.forename: E M
authors.initials: EM
authors.lastname: Oks
authors.forename: G Yu
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authors.lastname: Yushkov
authors.forename: E S
authors.initials: ES
authors.lastname: Masunov
authors.forename: S M
authors.initials: SM
authors.lastname: Polozov
authors.forename: H J
authors.initials: HJ
authors.lastname: Poole
authors.forename: P A
authors.initials: PA
authors.lastname: Storozhenko
authors.forename: A Ya
authors.initials: AY
authors.lastname: Svarovski