Theory experiment comparison of the electron backscattering factor from solids at low electron energy (250-5,000 eV).
The electron backscattering factor was measured from 24 different elements at low primary beam energy (250-5,000 eV). The results were compared with Monte Carlo simulations from a variety of freely available programs and an in-house developed program. The results suggest that a thin film of oxide can modify the backscattering factor at low primary energy. In addition, a number of problems have been identified with the freely available programs.
El Gomati
M M
MM
Department of Electronics, University of York, Heslington, York, UK. mmg@ohm.york.ac.uk
Walker
C G H
CG
Assa'd
A M D
AM
Zadrazil
M
M