Testing of rod objects by grazing-incidence interferometry: experiment.
A grazing-incidence interferometer for the testing of technical surfaces for macroscopic surface deviations is described. Computer-generated holograms serve as beam splitters and references for the workpieces tested. The sensitivity of the interferometer depends on the period of the computer-generated holograms. The method is demonstrated at a rod object of convex profile. Using phase-stepping techniques, the grazing-incidence interferometer provides fast measurements of the entire mantle surface of the test sample with submicrometer precision.
Brinkmann
S
S
Lehrstuhl für Optik, UniversitätErlangen-Nürnberg, Staudtst 7, D-91058 Erlangen, Germany. sven@pi5wsc.physik.unierlangen.de
Dresel
T
T
Schreiner
R
R
Schwider
J
J