title: Testing of rod objects by grazing-incidence interferometry: experiment.
abstract: A grazing-incidence interferometer for the testing of technical surfaces for macroscopic surface deviations is described. Computer-generated holograms serve as beam splitters and references for the workpieces tested. The sensitivity of the interferometer depends on the period of the computer-generated holograms. The method is demonstrated at a rod object of convex profile. Using phase-stepping techniques, the grazing-incidence interferometer provides fast measurements of the entire mantle surface of the test sample with submicrometer precision.
authors.affiliation: Lehrstuhl für Optik, UniversitätErlangen-Nürnberg, Staudtst 7, D-91058 Erlangen, Germany. sven@pi5wsc.physik.unierlangen.de
authors.forename: S
authors.initials: S
authors.lastname: Brinkmann
authors.forename: T
authors.initials: T
authors.lastname: Dresel
authors.forename: R
authors.initials: R
authors.lastname: Schreiner
authors.forename: J
authors.initials: J
authors.lastname: Schwider