title: Planar-integrated talbot array illuminators.
abstract: We demonstrate the planar integration of Talbot array illuminators designed to generate one-dimensional spot arrays. The array illuminator basically consists of a phase grating and a cylindrical diffractive lens integrated as a single diffractive optical element onto a transparent glass substrate. We discuss various design aspects, and we focus on problems typical for planar-integrated free-space optics like the tilted optical axis of the system. Experimental results and measurements, which were obtained from planar-integrated setups fabricated as surface-relief structures on a transparent glass substrate by use of standard photolithography, are included.
authors.forename: M
authors.initials: M
authors.lastname: Testorf
authors.forename: J
authors.initials: J
authors.lastname: Jahns