Microwave bulk-acoustic-wave reflection-grating resonators.
A technique for fabrication of bulk-acoustic-wave (BAW) resonators operating at fundamental frequencies between 1 and 10 GHz is presented. The resonators utilize a reflection grating made by optical holographic methods in iron-doped lithium niobate. Q factors of 30000 at 1 GHz have been demonstrated. Extension to Q of 10000 at 10 GHz appears feasible. Projected limitations to performance are discussed. The high Q at the high fundamental frequency directly results in low-phase noise. Phase-noise measurements of BAW resonator-stabilized oscillators operating at 1.14 GHz are presented. The single-sideband noise floor of <-140 dBc/Hz is shown to be in agreement with an analytical model. Projected improvements in the devices and circuits promise performance of <-160 dBc/Hz.
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Lincoln Lab., MIT, Lexington, MA.
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