Application of compact electron cyclotron resonance ion source.
The compact electron cyclotron resonance (ECR) ion source with a permanent magnet configuration (Kei2 source) has been developed at National Institute of Radiological Sciences for a new carbon therapy facility. The Kei2 source was designed for production of C(4+) ions; its performance such as beam intensity and stability has already reached the medical requirements. Therefore, the prototype development of the source for medical use is essentially finished. Recently, we have started a few studies on other applications of the source. One is the production of fullerenes in the ECR plasma and modified fullerenes with various atoms for new materials. A second application is the production of multiply charged ions (not only carbon) for ion implantation. In this paper, some basic experiments for these applications are reported.
Muramatsu
M
M
Graduate School of Mechanical Engineering, Toyo University, Tokyo, Japan. m_mura@nirs.go.jp
Kitagawa
A
A
Iwata
Y
Y
Ogawa
H
H
Hojo
S
S
Kubo
T
T
Kato
Y
Y
Biri
S
S
Fekete
E
E
Yoshida
Y
Y
Drentje
A G
AG