title: Optical constants of sputter-deposited ti-ce oxide and zr-ce oxide films.
abstract: Films of Ti oxide, Zr oxide, Ce oxide, Ti-Ce oxide, and Zr-Ce oxide were made by means of reactive dc magnetron sputtering in a multitarget arrangement. The films were characterized by x-ray diffraction and electrochemical measurements, both techniques being firmly connected to stoichiometric information. The optical constants n and k were evalued from spectrophotometry and from variable-angle spectroscopic ellipsometry. The two analyses gave consistent results. It was found that n for the mixed-oxide films varied smoothly between the values for the pure oxides, whereas k in the band-gap range showed characteristic differences between Ti-Ce oxide and Zr-Ce oxide. It is speculated that this difference is associated with structural effects.
authors.forename: M
authors.initials: M
authors.lastname: Veszelei
authors.forename: L
authors.initials: L
authors.lastname: Kullman
authors.forename: C G
authors.initials: CG
authors.lastname: Granqvist
authors.forename: N
authors.initials: N
authors.lastname: von Rottkay
authors.forename: M
authors.initials: M
authors.lastname: Rubin