title: High-performance talbot array illuminators.
abstract: The performance of two-dimensional Talbot array illuminators is discussed in terms of compression ratio, fabrication cost, and illumination efficiency. By comparing two array-illuminator families, we try to answer the question, "Which Talbot array illuminator provides the best illumination performance and requires the least expenditure in fabrication for a given compression ratio?" We further present experimental results obtained with a quartz-glass four-level surface-relief array illuminator designed for a two-dimensional compression ratio of 16 and fabricated with only two lithographic masks.
authors.forename: W
authors.initials: W
authors.lastname: Klaus
authors.forename: Y
authors.initials: Y
authors.lastname: Arimoto
authors.forename: K
authors.initials: K
authors.lastname: Kodate