Laser direct-write gray-level mask and one-step etching for diffractive microlens fabrication.
High-efficiency diffractive optical elements can be achieved by an increase in the number of phase levels. We present a technique for laser direct-write gray-level masks on high-energy-beam-sensitive glass and one-step etching on the gray-level mask plate for the production of high-efficiency diffractive optical elements. Sixteen-phase-level diffractive microlenses and microlens arrays with a focusing efficiency of approximately 94% have been realized by use of the one-step nonphotolithographic fabrication technique.
Wang
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Su
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