title: GHz frequency ZnO/Si SAW device.
abstract: The demand for high-frequency low-loss filters generates intensive research on innovative wave guide solutions. In this work, a GHz SAW device based on a ZnO/Si structure was fabricated using classical UV photolithography. The thickness of the piezoelectric thin film was optimized and a specific interdigital transducer structure was used to generate third and fifth harmonic guided waves at 2.5 GHz and 3.5 GHz, respectively, with an aluminum strip larger than 1 micrometer. Different modes have been measured and theoretically identified thanks to an advanced finite-element/boundary-elementbased model. Good agreement is found between theory and experiments. The high-frequency modes have been fully characterized, allowing for accurate design of SAW devices exploiting such modes.
authors.affiliation: Laboratoire de Physique des Milieux Ionisés et Applications, Nancy-UNiversité, CNRS, Boulevard des Aiguillettes B.P. 239 F-54506 Vandoeuvre lès Nancy, France. laurent.lebrizoual@lpmi.uhp-nancy.fr
authors.forename: Laurent Le
authors.initials: LL
authors.lastname: Brizoual
authors.forename: Frederic
authors.initials: F
authors.lastname: Sarry
authors.forename: Omar
authors.initials: O
authors.lastname: Elmazria
authors.forename: Patrick
authors.initials: P
authors.lastname: Alnot
authors.forename: Sylvain
authors.initials: S
authors.lastname: Ballandras
authors.forename: Thomas
authors.initials: T
authors.lastname: Pastureaud