Microlens formation by thin-film deposition with mesh-shaped masks.
Thin-film microlens arrays with high fill factors have been fabricated in a one-step process by shading a vapor beam in a vacuum-deposition apparatus with metallic meshes placed at defined distances to the substrate surface. To generate three-dimensional mask structures with the necessary depth profiles, microgalvanic technology has been applied. Profiles and optical properties of the microlenses have been studied theoretically and experimentally.
Grunwald
R
R
Max-Born-Institut für Nichtlineare Optik und Kurzzeitspektroskopie, Rudower Chaussee 6, D-12489 Berlin, Germany. grunwald@mbi-berlin.de
Mischke
H
H
Rehak
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W