Reflection-type multiorder grating lens for three ultraviolet wavelengths.
Utilization of second-, third-, and fourth-order diffraction is discussed for providing a single reflection grating lens that yields the same wave-front conversions for wavelengths of 420, 280, and 210 nm, which are used to sense NO(x) and SO(2) gas densities. A blazed grating lens was fabricated by a planar process and characterized by use of UV lamps. The same wave-front conversion was observed at the three UV wavelengths. Efficiencies were measured to be 80%, 70%, and 30% for second-, third-, and fourth-order diffractions, respectively, at wavelengths of 420, 280, and 210 nm, respectively.
Ura
S
S
Graduate School of Engineering, Osaka University, 2-1 Yamada-Oka, Suita, Osaka 5650871, Japan. ura@ele.eng.osaka-u.ac.jp
Honzawa
Y
Y
Suhara
T
T
Nishihara
H
H