Optical frequency-domain imaging microprofilometry with a frequency-tunable liquid-crystal Fabry-Perot etalon device.
An optical frequency-domain interference microscope with a liquid-crystal Fabry-Perot interferometer as an optical frequency-scan device was developed for microscopic three-dimensional shape measurements. The proposed system can perform absolute measurement of the discontinuous surface profile of a microscopic object without use of mechanically moving components such as a piezoelectric transducer or a grating spectrometer. Experimental results are presented that demonstrate the validity of the principle.
Kinoshita
M
M
Department of Communication and Systems Engineering, The University of Electro-Communications, 1-5-1 Chofugaoka, Chofu, Tokyo 182-8585, Japan.
Takeda
M
M
Yago
H
H
Watanabe
Y
Y
Kurokawa
T
T