Enhanced optical microlithography with a Fabry-Perot-based spatial filtering technique.
A coherent multiple imaging technique for use in optical microlithography was studied. The technique involves placing a thin Fabry-Perot etalon between the mask and the projection lens of an optical stepper. An optical lithographic computer simulation tool, Prolith/2, was used to evaluate the aerial image profile obtained for extended mask structures such as typical contact hole arrays and line-space patterns used in integrated circuit fabrication. Additionally, a set of experimental studies were performed to validate the simulation results. Enhancement of both resolution and depth of focus can be obtained simultaneously with appropriate etalon parameters.
Erdélyi
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Department of Electrical and Computer Engineering, Rice University, 6100 Main Street, Houston, Texas 77251, USA.
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Wilson
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Smayling
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Tittel
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