Deconvolution method for two-dimensional spatial-response mapping of lithographic infrared antennas.
The spatial impulse response of antenna-coupled infrared detectors with dimensions comparable with the wavelength is obtained from a two-dimensional scan of a tightly focused CO(2)-laser beam. The method uses an experimental setup with submicrometer resolution and an iterative deconvolution algorithm. The measured spatial response is compared with numerically computed near-field distributions of a dipole antenna, with good agreement.
Alda
J
J
School of Optics, University of Central Florida, PO Box 162700, Orlando, Florida 32816-2700, USA. j.alda@fis.ucm.es
Fumeaux
C
C
Codreanu
I
I
Schaefer
J A
JA
Boreman
G D
GD