title: Microlens formation by thin-film deposition with mesh-shaped masks.
abstract: Thin-film microlens arrays with high fill factors have been fabricated in a one-step process by shading a vapor beam in a vacuum-deposition apparatus with metallic meshes placed at defined distances to the substrate surface. To generate three-dimensional mask structures with the necessary depth profiles, microgalvanic technology has been applied. Profiles and optical properties of the microlenses have been studied theoretically and experimentally.
authors.affiliation: Max-Born-Institut für Nichtlineare Optik und Kurzzeitspektroskopie, Rudower Chaussee 6, D-12489 Berlin, Germany. grunwald@mbi-berlin.de
authors.forename: R
authors.initials: R
authors.lastname: Grunwald
authors.forename: H
authors.initials: H
authors.lastname: Mischke
authors.forename: W
authors.initials: W
authors.lastname: Rehak