title: Spatial-mode control of vertical-cavity lasers with micromirrors fabricated and replicated in semiconductor materials.
abstract: Micromirrors were fabricated in gallium phosphide by mass transport to provide spatial-mode control of vertical-cavity surface-emitting lasers (VCSEL's). The concave mirrors were used in an external-cavity configuration to provide spatial filtering in the far field. Single-mode cw lasing was demonstrated in 15-microm-diameter VCSEL's with currents as high as 6 times threshold. The fabrication process was extended to micromirrors in gallium arsenide by use of a replication and dry-etch transfer process.
authors.affiliation: Department of Electrical and Computer Engineering, University of Minnesota, Minneapolis, Minnesota 55455, USA. fredrik.nikolajeff@angstrom.uu.se
authors.forename: F
authors.initials: F
authors.lastname: Nikolajeff
authors.forename: T A
authors.initials: TA
authors.lastname: Ballen
authors.forename: J R
authors.initials: JR
authors.lastname: Leger
authors.forename: A
authors.initials: A
authors.lastname: Gopinath
authors.forename: T C
authors.initials: TC
authors.lastname: Lee
authors.forename: R C
authors.initials: RC
authors.lastname: Williams