title: Improved vertical-scanning interferometry.
abstract: We describe a method that combines phase-shifting and coherence-peak-sensing techniques to permit measurements with the height resolution of phase-shifting interferometry without the interval-slope limitation of lambda/4 per data sample of phase-shifting interferometry. A five-frame algorithm is used to determine both the best-focus frame position and the fractional phase from the best-focus frame of the correlogram acquired through vertical scanning. The two surface profiles retrieved from the phase and the modulation contrast of the correlograms are compared in the phase-unwrapping process to remove fringe-order ambiguity.
authors.forename: A
authors.initials: A
authors.lastname: Harasaki
authors.forename: J
authors.initials: J
authors.lastname: Schmit
authors.forename: J C
authors.initials: JC
authors.lastname: Wyant