The development and characteristics of a high-speed EELS mapping system for a dedicated STEM.
A new EELS (electron energy loss spectroscopy) real-time elemental mapping system has been developed for a dedicated scanning transmission electron microscope (STEM). The previous two-window-based jump-ratio system has been improved by a three-window-based system. It is shown here that the three-window imaging method has less artificial intensity in elemental maps than the two-window-based method. Using the new three-window system, the dependence of spatial resolution on the energy window width was studied experimentally and also compared with TEM-based EELS. Here it is shown experimentally that the spatial resolution of STEM-based EELS is independent of the energy window width in a range from 10 eV to 60 eV.
Isakozawa
Shigeto
S
Hitachi High-Technologies Corp., 882 Ichige, Hitachinaka, Ibaraki 312-8504, Japan.
Kaji
Kazutoshi
K
Jarausch
Konrad
K
Terada
Shohei
S
Baba
Norio
N
D002857:Chromium / Q000737:chemistry; D017348:Microscopy, Electron, Scanning Transmission / Q000295:instrumentation / Q000379:methods*; D012822:Silicon Dioxide / Q000737:chemistry; D046590:Spectroscopy, Electron Energy-Loss / Q000295:instrumentation / Q000379:methods*; D014025:Titanium / Q000737:chemistry
D002857:Chromium; D012822:Silicon Dioxide; D014025:Titanium