Spatial-mode control of vertical-cavity lasers with micromirrors fabricated and replicated in semiconductor materials.
Micromirrors were fabricated in gallium phosphide by mass transport to provide spatial-mode control of vertical-cavity surface-emitting lasers (VCSEL's). The concave mirrors were used in an external-cavity configuration to provide spatial filtering in the far field. Single-mode cw lasing was demonstrated in 15-microm-diameter VCSEL's with currents as high as 6 times threshold. The fabrication process was extended to micromirrors in gallium arsenide by use of a replication and dry-etch transfer process.
Nikolajeff
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F
Department of Electrical and Computer Engineering, University of Minnesota, Minneapolis, Minnesota 55455, USA. fredrik.nikolajeff@angstrom.uu.se
Ballen
T A
TA
Leger
J R
JR
Gopinath
A
A
Lee
T C
TC
Williams
R C
RC