title: Nonlinear absorption of thin Al2O3 films at 193 nm.
abstract: Absorption of thin Al2O3 films was measured at 193 nm with an ArF-laser calorimeter. In addition to the expected high linear absorption coefficient, we found, for the first time to our knowledge, that two-photon absorption and transient color-center formation are nonnegligible loss channels in thin films at 193 nm. The nonlinear absorption coefficient is of the order of several times 10(-4) cm/W.
authors.affiliation: Laser-Laboratorium-Göttingen e.V., Hans-Adolf-Krebs-Weg 1, D-37077 Göttingen, Germany. oapel@llg.gwdg.de
authors.forename: O
authors.initials: O
authors.lastname: Apel
authors.forename: K
authors.initials: K
authors.lastname: Mann
authors.forename: A
authors.initials: A
authors.lastname: Zoeller
authors.forename: R
authors.initials: R
authors.lastname: Goetzelmann
authors.forename: E
authors.initials: E
authors.lastname: Eva