title: Fringe modulation skewing effect in white-light vertical scanning interferometry.
abstract: An interference fringe modulation skewing effect in white-light vertical scanning interferometry that can produce a batwings artifact in a step height measurement is described. The skewing occurs at a position on or close to the edge of a step in the sample under measurement when the step height is less than the coherence length of the light source used. A diffraction model is used to explain the effect.
authors.forename: A
authors.initials: A
authors.lastname: Harasaki
authors.forename: J C
authors.initials: JC
authors.lastname: Wyant