title: Fabrication of microprisms for planar optical interconnections by use of analog gray-scale lithography with high-energy-beam-sensitive glass.
abstract: For an integrated free-space optical interconnection system we suggest the use of microprisms to achieve large coupling angles at low loss. Prisms were fabricated in photoresist and quartz glass by analog lithography. High-energy-beam-sensitive glass was used as the gray-tone mask. Optical testing of the prisms shows acceptable surface quality and high efficiency (95%).
authors.affiliation: Optische Nachrichtentechnik, Fernuniverstät Hagen, Feithstrasse 140, D-58084 Hagen, Germany. christiane.gimkiewicz@fernuni-hagen.de
authors.forename: C
authors.initials: C
authors.lastname: Gimkiewicz
authors.forename: D
authors.initials: D
authors.lastname: Hagedorn
authors.forename: J
authors.initials: J
authors.lastname: Jahns
authors.forename: E B
authors.initials: EB
authors.lastname: Kley
authors.forename: F
authors.initials: F
authors.lastname: Thoma