title: Separation of measurement of the refractive index and the geometrical thickness by use of a wavelength-scanning interferometer with a confocal microscope.
abstract: An improved system for the separate measurement of the refractive index and the geometrical thickness that constitutes a hybrid configuration of a confocal microscope and a wavelength-scanning heterodyne interferometer with a laser diode is presented. The optical path difference can be measured in less than 1 s, which is 10 times quicker than with the low-coherence interferometry previously used, and with a resolution of 10 microm with a fixed reference mirror. Separate measurement of the refractive index and the geometrical thickness of glass plates was demonstrated by use of the arrangement in place of the low-coherence interferometer used previously.
authors.affiliation: Graduate School of Science and Engineering, Saitama University, 225 Shimo-Okubo, Urawa, Saitama 338-8570, Japan. tenchan@optsun.riken.go.jp
authors.forename: T
authors.initials: T
authors.lastname: Fukano
authors.forename: I
authors.initials: I
authors.lastname: Yamaguchi