Micromachined optical fiber current sensor.
We describe a micromachined optical fiber current sensor. The sensing element consists of a squared silicon membrane (8 mm long and 20 microm thick) that has a cylindrical permanent magnet (NdFeB alloy, 3-mm diameter, 1.5 mm high) fixed on its central region. This structure allows the permanent magnet to vibrate in the presence of the magnetic field gradient generated by an ac. A linear relation between the electrical current and the magnet displacement was measured with white-light interferometry with an optical fiber low-finesse Fabry-Perot microcavity. A measurement range of 0-70 A and a minimum detectable intensity of 20 mA were obtained when distance D between the membrane and the electrical power line was 5 mm. The output signal directly shows a linear response with distance D.
Heredero
R L
RL
Laboratorio de Instrumentacin Espacial, División de Ciencias del Espacio, Instituto Nacional de Técnica Aeroespacial ~INTA!, 28850 Torrejón de Ardoz, Madrid, Spain. lopezhr@inta.es
Fernández de Caleya
R
R
Guerrero
H
H
Los Santos
P
P
Cruz Acero
M
M
Esteve
J
J