Nanometer measurement with a dual fabry-perot interferometer.
On the basis of analyzing sinusoidal phase-modulating Fabry-Perot interferometry, a method, believed to be novel, is proposed for achieving nanometer measurement accuracy by measuring the time interval between equal amplitudes of the two elementary frequency signals of the transmitted intensities of a dual Fabry-Perot interferometer. A nanometer measurement system based on the method was designed and tested. The experimental results show that the displacement resolution of the system is 0.32 nm at a 1-kHz modulating signal.
Chen
B
B
Zhu
R
R
Wu
Z
Z
Li
D
D
Guo
S
S