title: Depth profiling of organic films with X-ray photoelectron spectroscopy using C60+ and Ar+ co-sputtering.
abstract: By sputtering organic films with 10 kV, 10 nA C60+ and 0.2 kV, 300 nA Ar+ ion beams concurrently and analyzing the newly exposed surface with X-ray photoelectron spectroscopy, organic thin-film devices including an organic light-emitting diode and a polymer solar cell with an inverted structure are profiled. The chemical composition and the structure of each layer are preserved and clearly observable. Although C60+ sputtering is proven to be useful for analyzing organic thin-films, thick organic-devices cannot be profiled without the low-energy Ar+ beam co-sputtering due to the nonconstant sputtering rate of the C60+ beam. Various combinations of ion-beam doses are studied in this research. It is found that a high dosage of the Ar+ beam interferes with the C60+ ion beam, and the sputtering rate decreases with increasing the total ion current. The results suggest that the low-energy single-atom projectile can disrupt the atom deposition from the cluster ion beams and greatly extend the application of the cluster ion-sputtering. By achievement of a steady sputtering rate while minimizing the damage accumulation, this research paves the way to profiling soft matter and organic electronics.
authors: Research Center for Applied Sciences, Academia Sinica, Taipei 115, Taiwan, Republic of China.
authors: Bang-Ying
authors: BY
authors: Yu
authors: Ying-Yu
authors: YY
authors: Chen
authors: Wei-Ben
authors: WB
authors: Wang
authors: Mao-Feng
authors: MF
authors: Hsu
authors: Shu-Ping
authors: SP
authors: Tsai
authors: Wei-Chun
authors: WC
authors: Lin
authors: Yu-Chin
authors: YC
authors: Lin
authors: Jwo-Huei
authors: JH
authors: Jou
authors: Chih-Wei
authors: CW
authors: Chu
authors: Jing-Jong
authors: JJ
authors: Shyue