Determination of the electron density in plasma by means of a floating double probe.
Investigations are performed in a microwave plasma expansion containing argon-nitrogen gas mixture. The purpose of this work is to measure accurate electron density values by means of a floating double probe. We check the accuracy of the different methods developed for the double probe under different experimental conditions in Ar-N2 gas mixture, comparing results to single probe measurements. On the basis of previous works, we propose a simple way to determine the electron density without the knowledge of the plasma potential.
Jauberteau
J L
JL
SPCTS, UMR 6638 CNRS, Faculté des Sciences et Techniques, 123 av A. Thomas, 87060 Limoges, France. jean-louis.jauberteau@unilim.fr
Jauberteau
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