title: Laser microprobe and resonant laser ablation for depth profile measurements of hydrogen isotope atoms contained in graphite.
abstract: We measured the depth profile of hydrogen atoms in graphite by laser microprobing combined with resonant laser ablation. Deuterium-implanted graphite was employed for the measurements. The sample was ablated by a tunable laser with a wavelength corresponding to the resonant wavelength of 1S-2S of deuterium with two-photon excitation. The ablated deuterium was ionized by a 2 + 1 resonant ionization process. The ions were analyzed by a time-of-flight mass spectrometer. The deuterium ions were detected clearly with the resonant ablation. The detection limit was estimated to be less than 10(16) atoms/cm(3) in our experiments. We determined the depth profile by considering the etching profile and the etching rate. The depth profile agreed well with Monte Carlo simulations to within a precision of 23 mum for the center position and 4-mum precision for distributions for three different implantation depths.
authors: M
authors: M
authors: Yorozu
authors: T
authors: T
authors: Yanagida
authors: T
authors: T
authors: Nakajyo
authors: Y
authors: Y
authors: Okada
authors: A
authors: A
authors: Endo