Angstrom ruler for high-accuracy pitch measurement.
An x-ray interferometer (XRI), which takes the lattice spacing of silicon as a length unit, can measure displacement with subnanometer resolution. A scanning probe microscope that combines an XRI and a scanning-tunnel microscope is designed to measure pitch. Experimental results have proved the feasibility of the design.
Lin
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W
Department of Material Science and Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706, USA. wlin@cae.wisc.edu
Dacheng
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L
Mang
C
C
Koenders
L
L
Kuetgens
U
U
Becker
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P