title: Phase-shifting moireí method with an atomic force microscope.
abstract: Using a phase-shifting technique with an atomic force microscope (AFM), we propose a phase-shifting AFM scanning moiré method. The phase shifting is realized in four steps from 0 to 2pi by a piezoscanner in the AFM. The measurement method and experimental techniques are described in detail. For demonstration this method is applied to determine the phase distribution in the AFM moiré of a 1200-line/mm holographic grating used to measure the thermal deformation in a Quad FlatPack electronic package.
authors: H
authors: H
authors: Xie
authors: C G
authors: CG
authors: Boay
authors: T
authors: T
authors: Liu
authors: Y
authors: Y
authors: Lu
authors: J
authors: J
authors: Yu
authors: A
authors: A
authors: Asundi