title: Angstrom ruler for high-accuracy pitch measurement.
abstract: An x-ray interferometer (XRI), which takes the lattice spacing of silicon as a length unit, can measure displacement with subnanometer resolution. A scanning probe microscope that combines an XRI and a scanning-tunnel microscope is designed to measure pitch. Experimental results have proved the feasibility of the design.
authors: Department of Material Science and Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706, USA. wlin@cae.wisc.edu
authors: W
authors: W
authors: Lin
authors: L
authors: L
authors: Dacheng
authors: C
authors: C
authors: Mang
authors: L
authors: L
authors: Koenders
authors: U
authors: U
authors: Kuetgens
authors: P
authors: P
authors: Becker