Lateral scanning white-light interferometer.
White-light vertical scanning interferometry is a well-established technique for retrieving the three-dimensional shapes of small objects, but it can measure only areas as big as the field of view of the instrument. For bigger fields a stitching algorithm must be applied, which often can be a source of errors. A technique in which the object is scanned laterally in front of an instrument with a tilted coherence plane is described. It permits measurements at higher speeds while measurement accuracy is retained and eliminates the need for stitching in one direction. Experimental confirmation is provided.
Olszak
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Veeco Metrology, 2650 East Elvira Road, Tucson, Arizona 85706, USA. aolszak@veeco.com