Longitudinal spatial coherence applied for surface profilometry.
A method of optical coherence profilometry, believed to be new, is demonstrated. This method is based on the spatial, rather than the temporal, coherence phenomenon. Therefore the proposed interferometric system is illuminated by a quasi-monochromatic spatial incoherent source instead of a broadband light source. The surface profile is measured by means of shifting the spatial degree of coherence gradually along its longitudinal axis while keeping the optical path difference between the measured surface and a reference plane constant. Experimental proof of the new principle is presented.
Rosen
J
J
Department of Electrical and Computer Engineering, Ben-Gurion University of the Negev, P.O. Box 653, Beer-Sheva 84105, Israel. rosen@ee.bgu.ac.il
Takeda
M
M