title: High-Temperature Lithium Metal-Vapor Capillary Discharge Extreme-Ultraviolet Source at 13.5 nm.
abstract: We describe a high-temperature lithium extreme-ultraviolet (EUV) source based on a capillary discharge configuration that was developed for operating with metal vapors. The source produces narrow-band emission at 13.5 nm in the EUV spectral region, with emission intensity proportional to the lithium-vapor density. At an operating temperature of 725 degrees C, our measurements showed that, on axis, the source generated approximately 0.2 (mJ/2pi sr)/pulse at 13.5 nm.
authors: M A
authors: MA
authors: Klosner
authors: W T
authors: WT
authors: Silfvast