Phase-locked phase-shifting laser diode interferometer with photothermal modulation.
We propose a phase-shifting interferometer that uses both phase-locked and photothermal modulating techniques. In this interferometer the measurement accuracy is not affected by the intensity modulation that usually appears in current modulation. The surface profile of a diamond-turned aluminum disk was measured; the rms repeatability obtained was lambda/460.
Suzuki
T
T
Zhao
X
X
Sasaki
O
O