title: Design and fabrication of diffractive microlens arrays with continuous relief for parallel laser direct writing.
abstract: Diffractive microlens arrays with continuous relief are designed, fabricated, and characterized by using Fermat's principle to create an array of spots on the photoresist-coated surface of a substrate for parallel laser direct writing. Experimental results indicate that a diffraction efficiency of 71.4% and a spot size of 1.97 microm (FWHM) can be achieved at normal incidence and a writing laser wavelength of 441.6 nm with an array of F/4 fabricated on fused silica, and the developed array can be used to improve the utilization ratio of writing laser energy.
authors.affiliation: Ultra-precision Optical and Electronic Instrument Engineering Center, Harbin Institute of Technology, Harbin, Heilongjiang, China.
authors.forename: Jiubin
authors.initials: J
authors.lastname: Tan
authors.forename: Mingguang
authors.initials: M
authors.lastname: Shan
authors.forename: Chenguang
authors.initials: C
authors.lastname: Zhao
authors.forename: Jian
authors.initials: J
authors.lastname: Liu