title: Robust, common path, phase shifting interferometer and optical profilometer.
abstract: We describe an improved implementation of our previously reported common-path, phase shifting, and shearing interferometer. Using a time-multiplexed phase shifting scheme, we demonstrate higher sampling resolution, better light sensitivity, and use of arbitrary phase shifting algorithms. We describe microscopic imaging of the surface profile of a copper-plated silicon wafer and demonstrate that the system is vibration insensitive with approximately lambda/100 repeatability. In a more general discussion of our method, we describe the different functional elements and suggest alternative designs and improvements. Possible uses include full-field coherent imaging and high dynamic range wavefront sensing, which we briefly discuss.
authors.affiliation: Department of Molecular Biology and Genetics, Cornell University, Ithaca, New York 14853, USA. rt77@cornell.edu
authors.forename: Remy
authors.initials: R
authors.lastname: Tumbar
authors.forename: Daniel L
authors.initials: DL
authors.lastname: Marks
authors.forename: David J
authors.initials: DJ
authors.lastname: Brady