title: High-fidelity replication of Dammann gratings using soft lithography.
abstract: We report the experimental results of using the soft lithography method for replication of Dammann gratings. By using an elastomeric stamp, uniform grating structures were transferred to the UV-curable polymer. To evaluate the quality of the replication, diffraction images and light intensity were measured. Compared with the master devices, the replicas of Dammann gratings show a slight deviation in both surface relief profile and optical performance. Experimental results demonstrated that high-fidelity replication of Dammann gratings is realized by using soft lithography with low cost and high throughput.
authors.affiliation: Information Optics Lab, Shanghai Institute of Optics and Fine Mechanics, Academia Sinica, Shanghai, China.
authors.forename: Wei
authors.initials: W
authors.lastname: Wang
authors.forename: Changhe
authors.initials: C
authors.lastname: Zhou
authors.forename: Wei
authors.initials: W
authors.lastname: Jia