High-fidelity replication of Dammann gratings using soft lithography.
We report the experimental results of using the soft lithography method for replication of Dammann gratings. By using an elastomeric stamp, uniform grating structures were transferred to the UV-curable polymer. To evaluate the quality of the replication, diffraction images and light intensity were measured. Compared with the master devices, the replicas of Dammann gratings show a slight deviation in both surface relief profile and optical performance. Experimental results demonstrated that high-fidelity replication of Dammann gratings is realized by using soft lithography with low cost and high throughput.
Wang
Wei
W
Information Optics Lab, Shanghai Institute of Optics and Fine Mechanics, Academia Sinica, Shanghai, China.
Zhou
Changhe
C
Jia
Wei
W