High-frequency micromechanical resonators from aluminium-carbon nanotube nanolaminates.
At micro- and nanoscales, materials with high Young's moduli and low densities are of great interest for high-frequency micromechanical resonator devices. Incorporating carbon nanotubes (CNTs), with their unmatched properties, has added functionality to many man-made composites. We report on the fabrication of < or = 100-nm-thick laminates by sputter-deposition of aluminium onto a two-dimensional single-walled CNT network. These nanolaminates--composed of Al, its native oxide Al(2)O(3) and CNTs--are fashioned, in a scalable manner, into suspended doubly clamped micromechanical beams. Dynamic flexural measurements show marked increases in resonant frequencies for nanolaminates with Al-CNT laminae. Such increases, further supported by quasi-static flexural measurements, are partly attributable to enhancements in elastic properties arising from the addition of CNTs. As a consequence, these nanolaminate micromechanical resonators show significant suppression of mechanical nonlinearity and enhanced strength, both of which are advantageous for practical applications and analogous to biological nanocomposites, similarly composed of high-aspect-ratio, mechanically superior mineral platelets in a soft protein matrix.
Bak
Jung Hoon
JH
Department of Physics and Astronomy, Seoul National University, Seoul 151-747, Korea.
Kim
Young Duck
YD
Hong
Seung Sae
SS
Lee
Byung Yang
BY
Lee
Seung Ran
SR
Jang
Jae Hyuck
JH
Kim
Miyoung
M
Char
Kookrin
K
Hong
Seunghun
S
Park
Yun Daniel
YD
D000535:Aluminum / Q000737:chemistry*; D037742:Nanotubes, Carbon
D037742:Nanotubes, Carbon; D000535:Aluminum