title: A novel microfluidic driver via AC electrokinetics.
abstract: A novel ac electrokinetic microfluidic driver based on alternating current electro-osmosis flow induced by asymmetrically capacitance/chemistry-modulated microelectrode arrays has been successfully developed and demonstrated. Asymmetric capacitance modulation (ACM) is made of comb electrode arrays and parts of individual electrode surfaces are modulated/deposited with a SiO(2) dielectric layer. This proposed design can be utilized to shift the optimal operation frequency of maximum velocity to a higher frequency to minimize electrolytic bubble generation and enhance micropumping performance. The pumping velocity, described in this paper, is measured via the tracing of microbeads and is a function of applied potential, signal frequency, buffer concentration, and dielectric layer thickness. A maximum pumping velocity up to 290 microm s(-1) in 5 mM buffer solution with the applied potential of 10 Vpp is observed in our prototype device, and the estimated maximum flow rate is up to 26.1 microl h(-1). This is the first successful demonstration regarding bubble-free ac electrokinetic micropumping via such asymmetrically capacitance-modulated electrode arrays. Design, simulation, microfabrication, experimental result, and theoretical model are described in this paper to characterize and exhibit the performance of the proposed novel bubble-free ac electrokinetic microfluidic driver.
authors.affiliation: Department of Power Mechanical Engineering, National Tsing-Hua University, Hsinchu, Taiwan 30043, Republic of China.
authors.forename: Ching-Te
authors.initials: CT
authors.lastname: Kuo
authors.forename: Cheng-Hsien
authors.initials: CH
authors.lastname: Liu
mesh_terms: D004563:Electrochemistry / Q000295:instrumentation / Q000379:methods; D004566:Electrodes; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007700:Kinetics; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation* / Q000379:methods*; D008962:Models, Theoretical; D009995:Osmosis; D013499:Surface Properties