Probing multilayer stack reflectors by low coherence interferometry in extreme ultraviolet.
We use low coherence interferometry to investigate the depth structure of a complex multilayer stack reflector. The probing instrument is an interferometer based on a Fresnel's bi-mirror illuminated by relatively wide-band synchrotron undulator light near 13.5 nm. Simulations clearly confirm that our test object generates two back propagated signals that behave as if reflected on two effective planes. First results in this spectral range may open the way to a new physical approach to extreme ultraviolet sample characterization in the form of line-scan optical coherence tomography.
de Rossi
Sébastien
S
Laboratoire Charles Fabry de I'Institut d'Optique, CNRS, Université Paris Sud, Campus Polytechnique, Palaiseau, France. sebastien.derossi@insitutoptique.fr
Joyeux
Denis
D
Chavel
Pierre
P
de Oliveira
Nelson
N
Richard
Marieke
M
Constancias
Christophe
C
Robic
Jean-Yves
JY