title: Rapid qualitative phase analysis in highly textured thin films by x-ray diffraction.
abstract: Phase analysis of highly out-of-plane textured specimens using x-ray diffraction is usually complicated due to the disappearance of most of the x-ray peaks in a common theta/2 theta diffraction geometry. In this paper, we propose a technique, where powderlike spectra of textured samples are obtained by multiaxial x-ray diffraction scans. This technique is a simple, yet powerful method which allows for significant improvement in thin film characterization and provides several types of information about the samples, such as the rapid qualitative identification of phases using common powder x-ray diffraction spectra databases, texture distribution, and quantitative residual stress analysis.
authors.affiliation: Laboratory for Nanometallurgy, Department of Materials, ETH Zurich, Wolfgang-Pauli-Str. 10, CH-8093 Zurich, Switzerland.
authors.forename: Cesare
authors.initials: C
authors.lastname: Borgia
authors.forename: Sven
authors.initials: S
authors.lastname: Olliges
authors.forename: Ralph
authors.initials: R
authors.lastname: Spolenak