title: Chalcogenide coatings of Ge15Sb20S65 and Te20As30Se50.
abstract: Chalcogenide coatings are investigated to obtain either optical components for spectral applications or optochemical sensors in the mid-infrared. The deposition of Ge(15)Sb(20)S(65) and Te(20)As(30)Se(50) chalcogenide glasses is performed by two physical techniques: electron-beam and pulsed-laser deposition. The quality of the film is analyzed by scanning electron microscopy, atomic force microscopy, and energy dispersive spectroscopy to characterize the morphology, topography, and chemical composition. The optical properties and optical constants are also determined. A CF(4) dry etching is performed on these films to obtain a channeled optical waveguide. For a passband filter made by electron-beam deposition, cryolite as a low-refractive-index material and chalcogenide glasses as high-refractive-index materials are used to favor a large refractive-index contrast. A shift of a centered wavelength of a photosensitive passband filter is controlled by illumination time.
authors.affiliation: Sciences Chimiques de Rennes, UMR 6226, Université Rennes 1, 35042 Rennes, France. virginie.nazabal@univ-rennes1.fr
authors.forename: Virginie
authors.initials: V
authors.lastname: Nazabal
authors.forename: Michel
authors.initials: M
authors.lastname: Cathelinaud
authors.forename: Weidong
authors.initials: W
authors.lastname: Shen
authors.forename: Petr
authors.initials: P
authors.lastname: Nemec
authors.forename: Frédéric
authors.initials: F
authors.lastname: Charpentier
authors.forename: Hervé
authors.initials: H
authors.lastname: Lhermite
authors.forename: Marie-Laure
authors.initials: ML
authors.lastname: Anne
authors.forename: Jérémie
authors.initials: J
authors.lastname: Capoulade
authors.forename: Fabien
authors.initials: F
authors.lastname: Grasset
authors.forename: Alain
authors.initials: A
authors.lastname: Moreac
authors.forename: Satoru
authors.initials: S
authors.lastname: Inoue
authors.forename: Miloslav
authors.initials: M
authors.lastname: Frumar
authors.forename: Jean-Luc
authors.initials: JL
authors.lastname: Adam
authors.forename: Michel
authors.initials: M
authors.lastname: Lequime
authors.forename: Claude
authors.initials: C
authors.lastname: Amra