Optical properties of plasma ion-assisted deposition silicon coatings: application to the manufacture of blocking filters for the near-infrared region.
I report on the preparation and characterization of optical constants of silicon coatings deposited by an electron beam gun with plasma ion-assisted deposition. With the fabrication of long-wave-pass filters the reliability of the optical constants is assured.
Bruynooghe
Stephane
S
Carl Zeiss AG, Corporate Research and Technology, Coating Technology, Carl Zeiss Strasse 22, 73446 Oberkochen, Germany. bruynooghe@zeiss.de