title: Investigation of MgF2 optical thin films with ultralow refractive indices prepared from autoclaved sols.
abstract: We have successfully developed a process to form high quality MgF(2) thin films with ultralow refractive indices from autoclaved sols prepared from magnesium acetate and hydrofluoric acid. And we have confirmed that our porous MgF(2) coatings have not only high transmittance in the UV region but also high uniformity of film thickness. They can be uniformly formed on phiv 300 mm substrates as a single coating and as a hybrid coating with sublayers formed by physical vapor deposition. They are expected to be applied to various optics that need high transmittance in the UV region.
authors.affiliation: Core Technology Center, Nikon Corporation, 10-1 Asamizodai 1-chome, Sagamihara, Kanagawa 228-0828, Japan. murata.go@nikon.co.jp
authors.forename: Tsuyoshi
authors.initials: T
authors.lastname: Murata
authors.forename: Hitoshi
authors.initials: H
authors.lastname: Ishizawa
authors.forename: Akira
authors.initials: A
authors.lastname: Tanaka