Residual stress in obliquely deposited MgF2 thin films.
MgF(2) films with a columnar microstructure are obliquely deposited on glass substrates by resistive heating evaporation. The columnar angles of the films increases with the deposition angle. Anisotropic stress does not develop in the films with tilted columns. The residual stresses in the films depend on the deposition and columnar angles in a columnar microstructure.
Jaing
Cheng-Chung
CC
Department of Optoelectronic System Engineering, Optoelectronics Technology Research Center,Minghsin University of Science and Technology, Hsin-Chu 304, Taiwan. ccjaing@must.edu.tw
Liu
Ming-Chung
MC
Lee
Cheng-Chung
CC
Cho
Wen-Hao
WH
Shen
Wei-Ting
WT
Tang
Chien-Jen
CJ
Liao
Bo-Huei
BH