title: Residual stress in obliquely deposited MgF2 thin films.
abstract: MgF(2) films with a columnar microstructure are obliquely deposited on glass substrates by resistive heating evaporation. The columnar angles of the films increases with the deposition angle. Anisotropic stress does not develop in the films with tilted columns. The residual stresses in the films depend on the deposition and columnar angles in a columnar microstructure.
authors.affiliation: Department of Optoelectronic System Engineering, Optoelectronics Technology Research Center,Minghsin University of Science and Technology, Hsin-Chu 304, Taiwan. ccjaing@must.edu.tw
authors.forename: Cheng-Chung
authors.initials: CC
authors.lastname: Jaing
authors.forename: Ming-Chung
authors.initials: MC
authors.lastname: Liu
authors.forename: Cheng-Chung
authors.initials: CC
authors.lastname: Lee
authors.forename: Wen-Hao
authors.initials: WH
authors.lastname: Cho
authors.forename: Wei-Ting
authors.initials: WT
authors.lastname: Shen
authors.forename: Chien-Jen
authors.initials: CJ
authors.lastname: Tang
authors.forename: Bo-Huei
authors.initials: BH
authors.lastname: Liao