From nanorings to nanodots by patterning with block copolymers.
We demonstrate three different transfer patterns that can be achieved by use of a surface reconstructed block copolymer film where metal is evaporated onto the surface of the film, providing the contrast. Thin films of diblock copolymers having cylindrical microdomains oriented normal to the surface with long-range lateral order were used. Solvent reconstruction of the film, followed by a glancing angle metal evaporation and thermal annealing, led to three different decorations of the films with gold. These films were used as masks for pattern transfer of pores, columns, and rings to underlying substrate with high fidelity.
Park
Soojin
S
Department of Polymer Science and Engineering, University of Massachusetts, Amherst, MA 01003, USA.
Wang
Jia-Yu
JY
Kim
Bokyung
B
Russell
Thomas P
TP
D003460:Crystallization / Q000379:methods*; D006046:Gold / Q000737:chemistry*; D046911:Macromolecular Substances / Q000737:chemistry; D008422:Materials Testing; D008968:Molecular Conformation; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D036103:Nanotechnology / Q000379:methods*; D010316:Particle Size; D044367:Phase Transition; D011108:Polymers / Q000737:chemistry*; D013499:Surface Properties
D046911:Macromolecular Substances; D011108:Polymers; D006046:Gold