Chalcogenide coatings of Ge15Sb20S65 and Te20As30Se50.
Chalcogenide coatings are investigated to obtain either optical components for spectral applications or optochemical sensors in the mid-infrared. The deposition of Ge(15)Sb(20)S(65) and Te(20)As(30)Se(50) chalcogenide glasses is performed by two physical techniques: electron-beam and pulsed-laser deposition. The quality of the film is analyzed by scanning electron microscopy, atomic force microscopy, and energy dispersive spectroscopy to characterize the morphology, topography, and chemical composition. The optical properties and optical constants are also determined. A CF(4) dry etching is performed on these films to obtain a channeled optical waveguide. For a passband filter made by electron-beam deposition, cryolite as a low-refractive-index material and chalcogenide glasses as high-refractive-index materials are used to favor a large refractive-index contrast. A shift of a centered wavelength of a photosensitive passband filter is controlled by illumination time.
Nazabal
Virginie
V
Sciences Chimiques de Rennes, UMR 6226, Université Rennes 1, 35042 Rennes, France. virginie.nazabal@univ-rennes1.fr
Cathelinaud
Michel
M
Shen
Weidong
W
Nemec
Petr
P
Charpentier
Frédéric
F
Lhermite
Hervé
H
Anne
Marie-Laure
ML
Capoulade
Jérémie
J
Grasset
Fabien
F
Moreac
Alain
A
Inoue
Satoru
S
Frumar
Miloslav
M
Adam
Jean-Luc
JL
Lequime
Michel
M
Amra
Claude
C