title: In situ optical characterization and reengineering of interference coatings.
abstract: A new optical monitoring system has been developed that allows recording of transmission spectra in the wavelength range between 400 and 920 nm of a growing optical coating during deposition. Several kinds of thin film sample have been prepared by use of a hybrid monitoring strategy that is essentially based on a combination of quartz monitoring and in situ transmission spectra measurements. We demonstrate and discuss the applicability of our system for reengineering procedures of high-low stacks and measurements of small vacuum or thermal shifts of optical coatings.
authors.affiliation: Fraunhofer Institute of Applied Optics and Precision Engineering, Albert-Einstein-Strasse 7, D-07745 Jena, Germany. steffen.wilbrandt@iof.fraunhofer.de
authors.forename: Steffen
authors.initials: S
authors.lastname: Wilbrandt
authors.forename: Olaf
authors.initials: O
authors.lastname: Stenzel
authors.forename: Norbert
authors.initials: N
authors.lastname: Kaiser
authors.forename: Michael K
authors.initials: MK
authors.lastname: Trubetskov
authors.forename: Alexander V
authors.initials: AV
authors.lastname: Tikhonravov