Facile and controlled synthesis of ultra-thin low dielectric constant meso/microporous silica films.
Farrell
Richard A
RA
Department of Chemistry and Tyndall National Institute, University College Cork, Cork, Ireland.
Petkov
Nikolay
N
Cherkaoui
Karim
K
Amenitsch
Heinz
H
Holmes
Justin D
JD
Hurley
Paul K
PK
Morris
Michael A
MA