Ultrafast laser fabrication of submicrometer pores in borosilicate glass.
We demonstrate rapid fabrication of submicrometer-diameter pores in borosilicate glass using femtosecond laser machining and subsequent wet-etch techniques. This approach allows direct and repeatable fabrication of high-quality pores with diameters of 400-800 nm. Such small pores coupled with the desirable electrical and chemical properties of glass enable sensitive resistive-pulse analysis to determine the size and concentration of macromolecules and nanoparticles. Plasma-enhanced chemical vapor deposition allows further reduction of pore diameters to below 300 nm.
An
Ran
R
Department of Biomedical Engineering, University of Michigan, Michigan 48109, USA.
Uram
Jeffrey D
JD
Yusko
Erik C
EC
Ke
Kevin
K
Mayer
Michael
M
Hunt
Alan J
AJ
D005898:Glass; D007834:Lasers; D049329:Nanostructures; D036103:Nanotechnology; D013499:Surface Properties