title: Ultrafast laser fabrication of submicrometer pores in borosilicate glass.
abstract: We demonstrate rapid fabrication of submicrometer-diameter pores in borosilicate glass using femtosecond laser machining and subsequent wet-etch techniques. This approach allows direct and repeatable fabrication of high-quality pores with diameters of 400-800 nm. Such small pores coupled with the desirable electrical and chemical properties of glass enable sensitive resistive-pulse analysis to determine the size and concentration of macromolecules and nanoparticles. Plasma-enhanced chemical vapor deposition allows further reduction of pore diameters to below 300 nm.
authors.affiliation: Department of Biomedical Engineering, University of Michigan, Michigan 48109, USA.
authors.forename: Ran
authors.initials: R
authors.lastname: An
authors.forename: Jeffrey D
authors.initials: JD
authors.lastname: Uram
authors.forename: Erik C
authors.initials: EC
authors.lastname: Yusko
authors.forename: Kevin
authors.initials: K
authors.lastname: Ke
authors.forename: Michael
authors.initials: M
authors.lastname: Mayer
authors.forename: Alan J
authors.initials: AJ
authors.lastname: Hunt
mesh_terms: D005898:Glass; D007834:Lasers; D049329:Nanostructures; D036103:Nanotechnology; D013499:Surface Properties