Evolutionary grinding model for nanometric control of surface roughness for aspheric optical surfaces.
A new evolutionary grinding process model has been developed for nanometric control of material removal from an aspheric surface of Zerodur substrate. The model incorporates novel control features such as i) a growing database; ii) an evolving, multi-variable regression equation; and iii) an adaptive correction factor for target surface roughness (Ra) for the next machine run. This process model demonstrated a unique evolutionary controllability of machining performance resulting in the final grinding accuracy (i.e. averaged difference between target and measured surface roughness) of -0.2+/-2.3(sigma) nm Ra over seven trial machine runs for the target surface roughness ranging from 115 nm to 64 nm Ra.
Han
Jeong-Yeol
JY
Major of Astronomy and Space Science, University of Science and Technology, Daejeon 305-333, Korea. jeongyeol.han@gmail.com
Kim
Sug-Whan
SW
Han
Inwoo
I
Kim
Geon-Hee
GH
D005075:Biological Evolution; D003198:Computer Simulation; D017076:Computer-Aided Design; D018130:Diamond / Q000737:chemistry*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008956:Models, Chemical; D008957:Models, Genetic; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D036103:Nanotechnology / Q000295:instrumentation / Q000379:methods*; D055095:Optics and Photonics / Q000295:instrumentation*; D010316:Particle Size; D013499:Surface Properties
D018130:Diamond