Photo-patternable GeO2-contained organic-inorganic hybrid sol-gel films for photonic applications.
Photo-patternable GeO(2)-contained organic-inorganic hybrid films, which can be used for the low cost and mass production of integrated photonic circuits, were synthesized by combining a low-temperature sol-gel process with a spin-coating technique. Optical waveguide properties and photochemical activities of the hybrid sol-gel films were characterized and monitored by a prism coupling technique and a Fourier transform infrared spectroscopy. Advantages for fabrication of ridge structures based on the hybrid films were demonstrated by one-step spin-coating process followed by direct ultraviolet light irradiation. The results indicate that the as-prepared photo-patternable hybrid materials have great applicability for the fabrication of photonic components, and the fabrication process has the advantages of cost-effect and very short processing time over inorganic materials patterning methods.
Electronic Materials Research Laboratory, School of Electronic and Information Engineering, Xi'an Jiaotong University, Xi'an 710049, Shaanxi, PR China. wxque@mail.xjtu.edu.cn
Wenxiu
W
Que
C Y
CY
Jia
M
M
Sun
Z
Z
Sun
L L
LL
Wang
Z J
ZJ
Zhang
D003460:Crystallization / Q000379:methods*; D005782:Gels / Q000737:chemistry; D005857:Germanium / Q000737:chemistry*; D007287:Inorganic Chemicals / Q000737:chemistry*; D008027:Light; D008422:Materials Testing; D008567:Membranes, Artificial; D055095:Optics and Photonics / Q000295:instrumentation*; D009930:Organic Chemicals / Q000737:chemistry*; D010777:Photochemistry / Q000379:methods*; D017785:Photons; D013499:Surface Properties
D005782:Gels; D007287:Inorganic Chemicals; D008567:Membranes, Artificial; D009930:Organic Chemicals; D005857:Germanium; C040516:germanium oxide