Low-loss channel waveguides and Y-splitter formed by ion-exchange in silica-on-silicon.
Low-loss ion-exchanged sol-gel channel waveguides on silicon substrate were fabricated. Ion-exchangeable aluminosilicate glass film was fabricated by sol-gel technique. Ag(+)-Li(+) thermal ion-exchange was used to achieve single mode channel waveguide. Propagation loss of 0.50 dB/cm and coupling loss of 0.76 dB/facet were measured by cutback method. A Y-branch power splitter was also fabricated. The results demonstrate that ion-exchange technique can be applied to prepare low-loss channel waveguides in thin film structures.
The State Key Lab for Advanced Photonic Materials and Devices, Department of Optical Science and Engineering, School of Information Science and Engineering, Fudan University, Shanghai 200433, China.
Zian
Z
He
Yigang
Y
Li
Yingfeng
Y
Li
Yanwu
Y
Zhang
Liying
L
Liu
Lei
L
Xu
D004867:Equipment Design; D019544:Equipment Failure Analysis; D005898:Glass / Q000737:chemistry*; D007477:Ions; D008567:Membranes, Artificial; D055095:Optics and Photonics / Q000295:instrumentation*; D012825:Silicon / Q000737:chemistry*; D012822:Silicon Dioxide / Q000737:chemistry*; D013499:Surface Properties
D007477:Ions; D008567:Membranes, Artificial; D012822:Silicon Dioxide; D012825:Silicon