Electron-beam deposited boron coatings for the extreme ultraviolet.
Boron films deposited by evaporation with an electron-beam were found to have a relatively high reflectance in the extreme ultraviolet with values similar to those of ion-beam-sputtered (IBS) SiC and IBS B(4)C. The largest reflectance was measured for an 11 nm thick boron film. Some reflectance degradation was observed for boron films stored in a desiccator. Reflectance degradation varied from sample to sample and was found to be either similar to that of IBS SiC and IBS B(4)C or larger.
Grupo de Optica de Laminas Delgadas (GOLD), Instituto de Fisica Aplicada-Consejo Superior de Investigaciones Cientificas, C/Serrano 144, Madrid, Spain.
Manuela
M
Vidal-Dasilva
Mónica
M
Fernández-Perea
José A
JA
Méndez
José A
JA
Aznárez
Juan I
JI
Larruquert