Anisotropic optical thin films finely sculptured by substrate sweep technology.
In this paper, we have fabricated for the first time films with different orientations of principal axes but similar principal indices and also films with different principal refractive indices but the same orientations of principal axes. During deposition, the deposition angle and the substrate sweep angle are varied to control separately the porosity (refractive principal indices) and column tilt angle (orientations of principal axes) of a birefringent thin film.
Department of Electro-Optical Engineering, National Taipei University of Technology, No. 1, Sec. 3, Chung-Hsiao E. Rd. Taipei, Taiwan (106). jyjun@ntut.edu.tw
Yi-Jun
YJ
Jen
Chia-Feng
CF
Lin
D016880:Anisotropy; D003198:Computer Simulation; D008027:Light; D008422:Materials Testing; D008567:Membranes, Artificial; D008962:Models, Theoretical; D055095:Optics and Photonics / Q000295:instrumentation*; D016062:Porosity; D012031:Refractometry / Q000379:methods*; D012542:Scattering, Radiation; D013672:Technology / Q000379:methods
D008567:Membranes, Artificial