High efficiency silicon nitride surface grating couplers.
High efficiency surface grating couplers for silicon nitride waveguides have been designed, fabricated, and characterized. Coupling efficiencies exceeding 60 % are reported at a wavelength of 1.31 mum, as well as angular and wavelength -3 dB tolerances of 4 degrees and 50 nm, respectively. When the wavelength is increased from 1310 nm to 1450 nm the coupling efficiency progressively decreases but remains above 20 % at 1450 nm. The influence of the duty ratio of the grating has also been investigated: maximum coupling efficiency was obtained at 50 % duty ratio.
Maire
Guillaume
G
Institut d'Electronique Fondamentale, CNRS UMR 8622, Bât. 220, Université Paris-Sud 11, F-91405 ORSAY cedex - France.
Vivien
Laurent
L
Sattler
Guillaume
G
Kazmierczak
Andrzej
A
Sanchez
Benito
B
Gylfason
Kristinn B
KB
Griol
Amadeu
A
Marris-Morini
Delphine
D
Cassan
Eric
E
Giannone
Domenico
D
Sohlström
Hans
H
Hill
Daniel
D
D003198:Computer Simulation; D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008962:Models, Theoretical; D012031:Refractometry / Q000295:instrumentation* / Q000379:methods; D017655:Silicon Compounds / Q000737:chemistry*; D014159:Transducers
D017655:Silicon Compounds; C032734:silicon nitride