Electron-beam deposited boron coatings for the extreme ultraviolet.
Boron films deposited by evaporation with an electron-beam were found to have a relatively high reflectance in the extreme ultraviolet with values similar to those of ion-beam-sputtered (IBS) SiC and IBS B(4)C. The largest reflectance was measured for an 11 nm thick boron film. Some reflectance degradation was observed for boron films stored in a desiccator. Reflectance degradation varied from sample to sample and was found to be either similar to that of IBS SiC and IBS B(4)C or larger.
Vidal-Dasilva
Manuela
M
Grupo de Optica de Laminas Delgadas (GOLD), Instituto de Fisica Aplicada-Consejo Superior de Investigaciones Cientificas, C/Serrano 144, Madrid, Spain.
Fernández-Perea
Mónica
M
Méndez
José A
JA
Aznárez
José A
JA
Larruquert
Juan I
JI