Controlling temperature dependence of silicon waveguide using slot structure.
We show that the temperature dependence of a silicon waveguide can be controlled well by using a slot waveguide structure filled with a polymer material. Without a slot, the amount of temperature-dependent wavelength shift for TE mode of a silicon waveguide ring resonator is very slightly reduced from 77 pm/ degrees C to 66 pm/ degrees C by using a polymer (WIR30-490) upper cladding instead of air upper cladding. With a slot filled with the same polymer, however, the reduction of the temperature dependence is improved by a pronounced amount and can be controlled down to -2 pm/ degrees C by adjusting several variables of the slot structure, such as the width of the slot between the pair of silicon wires, the width of the silicon wire pair, and the height of the silicon slab in our experiment. This measurement proves that a reduction in temperature dependence can be improved about 8 times more by using the slot structure.
ICCL, Electronics and Telecommunications Research Institute, 161 Gajong-dong, Yusong-gu, Daejeon 305-350, Korea. jongmool@etri.re.kr
Jong-Moo
JM
Lee
Duk-Jun
DJ
Kim
Gwan-Ha
GH
Kim
O-Kyun
OK
Kwon
Kap-Joong
KJ
Kim
Gyungock
G
Kim
D016477:Artifacts; D004867:Equipment Design; D019544:Equipment Failure Analysis; D005374:Filtration / Q000295:instrumentation* / Q000379:methods; D055095:Optics and Photonics / Q000295:instrumentation*; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D012825:Silicon / Q000737:chemistry*; D013696:Temperature
D012825:Silicon