Absolute planarity with three-flat test: an iterative approach with Zernike polynomials.
An iterative algorithm to analyze three-flat test data for absolute planarity measurements is presented. Using the properties of Zernike polynomial representations, results are achieved in a fast and effective manner. Details and demonstrative examples are provided.
CNR - Istituto Nazionale di Ottica Applicata, Largo E. Fermi 6, 50125 Firenze, Italy. maurizio.vannoni@inoa.it
Maurizio
M
Vannoni
Giuseppe
G
Molesini
D000465:Algorithms; D003198:Computer Simulation; D007368:Interferometry / Q000379:methods*; D008962:Models, Theoretical; D009716:Numerical Analysis, Computer-Assisted