Evolutionary grinding model for nanometric control of surface roughness for aspheric optical surfaces.
A new evolutionary grinding process model has been developed for nanometric control of material removal from an aspheric surface of Zerodur substrate. The model incorporates novel control features such as i) a growing database; ii) an evolving, multi-variable regression equation; and iii) an adaptive correction factor for target surface roughness (Ra) for the next machine run. This process model demonstrated a unique evolutionary controllability of machining performance resulting in the final grinding accuracy (i.e. averaged difference between target and measured surface roughness) of -0.2+/-2.3(sigma) nm Ra over seven trial machine runs for the target surface roughness ranging from 115 nm to 64 nm Ra.
Major of Astronomy and Space Science, University of Science and Technology, Daejeon 305-333, Korea. jeongyeol.han@gmail.com
Jeong-Yeol
JY
Han
Sug-Whan
SW
Kim
Inwoo
I
Han
Geon-Hee
GH
Kim
D005075:Biological Evolution; D003198:Computer Simulation; D017076:Computer-Aided Design; D018130:Diamond / Q000737:chemistry*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008956:Models, Chemical; D008957:Models, Genetic; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D036103:Nanotechnology / Q000295:instrumentation / Q000379:methods*; D055095:Optics and Photonics / Q000295:instrumentation*; D010316:Particle Size; D013499:Surface Properties
D018130:Diamond