3-D modulable PDMS-based microlens system.
The design, simulation, fabrication and characterization of 3-D modulable micro-optical system based on poly-dimethilsiloxane (PDMS) are presented in this paper. This system consists on two uncoupled PDMS lenses with different diameter (2 and 10 microm). Under stretching conditions, the dimensions of the small lens are not modified, whereas the geometry of the bigger lens is shifted from spherical to elliptical. A combination of different technologies is used to fabricate this microsystem: silicon, polymer and soft-lithography microfabrication techniques. This combination allows obtaining structures with a simple and mass production technology. Experimental results confirm the predicted numerical simulations, showing that, when the structure is under stretching conditions, the first focus is virtually invariable whereas the second focus becomes a Sturm zone.
Cadarso
V J
VJ
Institut de Microelectrònica de Barcelona (IMB-CNM-CSIC), Campus UAB 08193 Barcelona, Spain. victor.cadarso@cnm.es
Llobera
A
A
Villanueva
G
G
Dominguez
C
C
Plaza
J A
JA
D003198:Computer Simulation; D017076:Computer-Aided Design; D004129:Dimethylpolysiloxanes / Q000737:chemistry*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007909:Lenses; D008904:Miniaturization; D008962:Models, Theoretical; D009757:Nylons / Q000737:chemistry*
D004129:Dimethylpolysiloxanes; D009757:Nylons; C085707:poly(dimethylsiloxane)-polyamide copolymer