Low-loss channel waveguides and Y-splitter formed by ion-exchange in silica-on-silicon.
Low-loss ion-exchanged sol-gel channel waveguides on silicon substrate were fabricated. Ion-exchangeable aluminosilicate glass film was fabricated by sol-gel technique. Ag(+)-Li(+) thermal ion-exchange was used to achieve single mode channel waveguide. Propagation loss of 0.50 dB/cm and coupling loss of 0.76 dB/facet were measured by cutback method. A Y-branch power splitter was also fabricated. The results demonstrate that ion-exchange technique can be applied to prepare low-loss channel waveguides in thin film structures.
He
Zian
Z
The State Key Lab for Advanced Photonic Materials and Devices, Department of Optical Science and Engineering, School of Information Science and Engineering, Fudan University, Shanghai 200433, China.
Li
Yigang
Y
Li
Yingfeng
Y
Zhang
Yanwu
Y
Liu
Liying
L
Xu
Lei
L
D004867:Equipment Design; D019544:Equipment Failure Analysis; D005898:Glass / Q000737:chemistry*; D007477:Ions; D008567:Membranes, Artificial; D055095:Optics and Photonics / Q000295:instrumentation*; D012825:Silicon / Q000737:chemistry*; D012822:Silicon Dioxide / Q000737:chemistry*; D013499:Surface Properties
D007477:Ions; D008567:Membranes, Artificial; D012822:Silicon Dioxide; D012825:Silicon