Thickness dependence of electrical properties of PZT films deposited on metal substrates by laser-assisted aerosol deposition.
Dependence of electrical properties-dielectric, ferroelectric, and piezoelectric properties-on film thickness was studied for lead-zirconate titanate (PZT) thick films directly deposited onto stainless-steel (SUS) substrates in actuator devices by using a carbon dioxide (CO(2) ), laser assisted aerosol deposition technique. Optical spectroscopic analysis data and laser irradiation experiments revealed that absorption at a given wavelength by the film increased with increasing film thickness. Dielectric constant epsilon, remanent polarization value P(r), and coercive field strength E(c) of PZT films directly deposited onto a SUS-based piezoelectric actuator substrate annealed by CO(2) laser irradiation at 850 degrees C improved with increasing film thickness, and for films thicker than 25 microm, epsilon 800, P(r) 40 microC/cm(2), and E(c) 45 kV/cm. In contrast, the displacement of the SUS-based actuator with the laser-annealed PZT thick film decreased with increasing film thickness.
Baba
S
S
Integration Process Technology Group, Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki Pref. 305-8564, Japan. so-baba@aist.go.jp
Tsuda
H
H
Akedo
J
J
D000336:Aerosols / Q000737:chemistry*; D000537:Aluminum Oxide / Q000737:chemistry*; D003460:Crystallization / Q000379:methods*; D004553:Electric Conductivity; D007834:Lasers; D007854:Lead / Q000737:chemistry*; D008422:Materials Testing; D008567:Membranes, Artificial; D014025:Titanium / Q000737:chemistry*; D015040:Zirconium / Q000737:chemistry*
D000336:Aerosols; D008567:Membranes, Artificial; C065536:lead titanate zirconate; D007854:Lead; D015040:Zirconium; D014025:Titanium; D000537:Aluminum Oxide