High efficiency NbN nanowire superconducting single photon detectors fabricated on MgO substrates from a low temperature process.
We demonstrate high-performance nanowire superconducting single photon detectors (SSPDs) on bN thin films grown at a temperature compatible with monolithic integration. NbN films ranging from 150 nm to 3 nm in thickness were deposited by dc magnetron sputtering on MgO substrates at 400 degrees C SSPDs were fabricated on high quality NbN films of different thickness (7 to 3 nm) deposited under optimal conditions. Electrical and optical characterizations were performed on the SSPDs. The highest QE value measured at 4.2K is 20% at 1300 nm.
Marsili
F
F
Ecole Polytechnique Fédérale de Lausanne, Institute of Photonics and Quantum Electronics, Station 3, CH-1015 Lausanne, Switzerland. francesco.marsili@epfl.ch
Bitauld
D
D
Fiore
A
A
Gaggero
A
A
Mattioli
F
F
Leoni
R
R
Benkahoul
M
M
Lévy
F
F
D003080:Cold Temperature; D004553:Electric Conductivity; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008277:Magnesium Oxide / Q000737:chemistry* / Q000528:radiation effects*; D036103:Nanotechnology / Q000295:instrumentation; D043942:Nanotubes / Q000737:chemistry* / Q000528:radiation effects*; D009556:Niobium / Q000737:chemistry*; D055095:Optics and Photonics / Q000295:instrumentation*; D012680:Sensitivity and Specificity; D014159:Transducers
D009556:Niobium; D008277:Magnesium Oxide