Design and fabrication of a micro-optic switch.
In this paper, a polyimide cantilever micro-optic switch of electromagnetic actuation is studied. The model of the electromagnetic actuation is proposed and simulated using finite element method. The best efficiency of electromagnetic force for switching operations is obtained and the parameters of the coil and magnet are determined. During the practical fabrication, the thick resist patterning and electroplating technology is employed to fabricate the electromagnetic actuation. Both the theoretical and experimental results indicate that the balanceable distance of the polyimide cantilever for implementing optical switches is about 1.28 mm with 0.4 A current pulse input, The final experimental results of optical performance for the fabricated micro-optic 1 x 4 switch include the switching time of about 20 ms and the insertion loss of about 0.73 dB.
Li
Wei
W
State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine, Mechanics and Physics, Chinese Academy of Sciences, 16 East Nanhu Street, Changchun, JL 130033, China.
Liang
Jingqiu
J
Liang
Zhongzhu
Z
Li
Xiaoqi
X
Wang
Weibiao
W
Zhong
Yanchao
Y
Sun
Degui
D
D004560:Electricity; D055590:Electromagnetic Phenomena; D055095:Optics and Photonics / Q000295:instrumentation*