Effects of additives on the selectivity of byproducts and dry removal of fluorine for abating tetrafluoromethane in a discharge reactor.
The removal efficiency of tetrafluoromethane (CF(4)) was significantly enhanced by adding additives (H(2), O(2), H(2)+O(2), H(2)O) in an atmospheric-pressure microwave plasma reactor. However, large amounts of fluorine (F(2)) were produced in this study. Moreover, the selectivity of F(2) was apparently greater than that of HF (in H(2)-based condition) or COF(2) (in O(2)-based abatement). Notably, in an O(2)-rich environment, more F(2) and a larger amount of CO(2) were produced. Subsequently, F(2) can be effectively removed by reacting with CaO to form CaF(2) at 200 degrees C via an in situ dry, chemical absorption process in the low-temperature afterglow discharge zone within the same plasma reactor.
Department of Chemical and Materials Engineering, National Kaohsiung University of Applied Sciences, 415 Chien-Kung Road, Kaohsiung 807, Taiwan. chtsai@cc.kuas.edu.tw
Cheng-Hsien
CH
Tsai
Zhao-Zhi
ZZ
Kuo
D000042:Absorption; D000393:Air Pollutants / Q000032:analysis*; D001272:Atmosphere; D019149:Bioreactors; D004867:Equipment Design; D005461:Fluorine / Q000737:chemistry*; D006845:Hydrocarbons, Fluorinated / Q000737:chemistry*; D006859:Hydrogen; D007220:Industrial Waste; D008697:Methane / Q000737:chemistry*; D008872:Microwaves; D010100:Oxygen / Q000737:chemistry; D011312:Pressure; D012995:Solubility; D013696:Temperature; D014867:Water / Q000737:chemistry
D000393:Air Pollutants; D006845:Hydrocarbons, Fluorinated; D007220:Industrial Waste; D014867:Water; D005461:Fluorine; D006859:Hydrogen; C538689:tetrafluoromethane; D008697:Methane; D010100:Oxygen