In situ lift-out: steps to improve yield and a comparison with other FIB TEM sample preparation techniques.
Steps to improve the success yield of the in situ lift-out technique are presented. These include tapping the plinth of the system and monitoring the grounding current to check the lift-out needle is fixed to the material being removed. In addition, the relative success yields and the time to prepare a TEM lamella for the three main FIB methods are discussed and compared.
Materials Science Centre, University of Manchester, Manchester M1 7HS, UK. richard.langford@manchester.ac.uk
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Langford
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Rogers
D046529:Microscopy, Electron, Transmission / Q000379:methods*