Multilayer coatings monitoring using admittance diagram.
A method based on admittance diagram called Admittance Real-time Monitoring, ARM, was proposed to monitor multilayer coatings. This optical monitoring method is highly sensitive and capable to compensate for thickness errors. The sensitivities of ARM were compared with that of the conventional method by using runsheet diagram. The in situ error compensation of ARM showed a great improvement in the optical performance when utilized in an anti-reflection coating process.
Thin Film Technology Center/Department of Optics and Photonics, National Central University, Chung-Li, Taiwan. cclee@dop.ncu.edu.tw
Cheng-Chung
CC
Lee
Yu-Jen
YJ
Chen
D055095:Optics and Photonics