Optical characterization of photonic crystal slabs using orthogonally oriented polarization filters.
We present an experimental method for direct analysis of guided-mode resonances in photonic crystal slab structures using transmission measurements. By positioning the photonic crystal slab between orthogonally oriented polarization filters light transmission is suppressed except for the guided-mode resonances. Angle resolved transmission measurements with crossed polarizers are performed to obtain the band structure around the Gamma-point. Results are compared to mode simulations. Spatially resolved measurements in a confocal microscope setup are used for homogeneity characterizations. Stitching errors and inhomogeneities in exposure dose down to 1.3% in photonic crystal slabs fabricated by electron beam lithography are observed using this method.
Light Technology Institute, Universität Karlsruhe (TH), Engesser Str. 13, 76131 Karlsruhe, Germany. Yousef.Nazirizadeh@lti.uni-karlsruhe.de
Yousef
Y
Nazirizadeh
Jürgen
J
Müller
Ulf
U
Geyer
Detlef
D
Schelle
Ernst-Bernhard
EB
Kley
Andreas
A
Tünnermann
Uli
U
Lemmer
Martina
M
Gerken
D003460:Crystallization / Q000295:instrumentation; D004583:Electrons; D004867:Equipment Design; D008027:Light; D008853:Microscopy; D018613:Microscopy, Confocal / Q000379:methods*; D053758:Nanoparticles; D049329:Nanostructures / Q000737:chemistry; D036103:Nanotechnology / Q000379:methods; D055095:Optics and Photonics; D017785:Photons; D012029:Refraction, Ocular