Piezoelectrics in micro and nanosystems: solutions for a wide range of applications.
Piezoelectric thin films have interesting prospects in a number of applications for which miniaturization is a driving force. Miniaturization means higher frequency, or higher resolution, or increased functionality. This paper gives a short review on piezoelectric thin films, their deposition processes, integration, properties and applications in microsystems (MEMS), concentrating on the most frequently investigated piezoelectric thin film materials.
Laboratoire de Céramique, Ecole Polytechnique Fédérale de Lausanne EPFL, Lausanne, Switzerland.
Paul
P
Muralt