Near-field Raman imaging using optically trapped dielectric microsphere.
The stumbling block of employing Raman imaging in nanoscience and nanotechnology is the diffraction-limited spatial resolution. Several approaches have been employed to improve the spatial resolution, among which aperture and apertureless near-field Raman techniques are the most frequently used. In this letter, we report a new approach in doing near-field Raman imaging with spatial resolution of about 80 nm, by trapping and scanning a polystyrene microsphere over the sample surface in water. We have used this technique to resolve PMOS transistors with SiGe source drain stressors with poly-Si gates, as well as gold nanopatterns with excellent reproducibility.
Division of Physics and Applied Physics, School of Physical and Mathematical Sciences, Nanyang TechnologicalUniversity, 1 Nanyang Walk, Blk 5 Level 3, Singapore.
Johnson
J
Kasim
Yu
Y
Ting
You Yu
YY
Meng
Liu Jin
LJ
Ping
Alex
A
See
Li Lain
LL
Jong
Shen Ze
SZ
Xiang
D007089:Image Enhancement / Q000379:methods*; D018613:Microscopy, Confocal / Q000379:methods*; D008863:Microspheres; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D013059:Spectrum Analysis, Raman / Q000379:methods*