Silica-based monolithic sensing plates for waveguide-mode sensors.
We developed a monolithic sensing plate for a waveguide-mode sensor. The plate consists of a SiO(2) glass substrate and a thin silicon layer the surface of which is thermally oxidized to form a SiO(2) glass waveguide. We confirmed that the sensing plate is suitable for high-sensitivity detection of molecular adsorption at the waveguide surface. In addition, a significant enhancement of the sensitivity of the sensor was achieved by perforating the waveguide with holes with diameters of a few tens of nanometers by selective etching of latent tracks created by swift heavy-ion irradiation. Possible strategies for optimizing the plate are discussed.
Center for Applied Near-Field Optics Research, AIST, 1-1-1 Higashi Tsukuba 305-8562, Japan. m-fujimaki@aist.go.jp
Makoto
M
Fujimaki
Carsten
C
Rockstuhl
Xiaomin
X
Wang
Koichi
K
Awazu
Junji
J
Tominaga
Yuuki
Y
Koganezawa
Yoshimichi
Y
Ohki
Tetsuro
T
Komatsubara
D000327:Adsorption; D001710:Biotin / Q000737:chemistry; D003198:Computer Simulation; D004560:Electricity; D008855:Microscopy, Electron, Scanning; D055095:Optics and Photonics / Q000295:instrumentation*; D012822:Silicon Dioxide / Q000737:chemistry*; D019809:Streptavidin / Q000737:chemistry
D001710:Biotin; D012822:Silicon Dioxide; D019809:Streptavidin