Development of a stage-scanning system for high-resolution confocal STEM.
A stage-scanning system is composed of a specially designed transmission electron microscopy specimen holder equipped with a piezo-driven specimen stage, power supplier and control software. This system enables the specimen to be scanned three-dimensionally, and therefore confocal scanning transmission electron microscopy (STEM) can be performed with a fixed electron-optics configuration. It is demonstrated that stage-scanning confocal STEM images can be obtained with the lateral atomic resolution and the specimen can be moved three-dimensionally with high precision.
Takeguchi
Masaki
M
Hashimoto
Ayako
A
Shimojo
Masayuki
M
Mitsuishi
Kazutaka
K
Furuya
Kazuo
K
D021621:Imaging, Three-Dimensional / Q000295:instrumentation / Q000379:methods*; D017348:Microscopy, Electron, Scanning Transmission / Q000295:instrumentation / Q000379:methods*