title: Development of a stage-scanning system for high-resolution confocal STEM.
abstract: A stage-scanning system is composed of a specially designed transmission electron microscopy specimen holder equipped with a piezo-driven specimen stage, power supplier and control software. This system enables the specimen to be scanned three-dimensionally, and therefore confocal scanning transmission electron microscopy (STEM) can be performed with a fixed electron-optics configuration. It is demonstrated that stage-scanning confocal STEM images can be obtained with the lateral atomic resolution and the specimen can be moved three-dimensionally with high precision.
authors.forename: Masaki
authors.initials: M
authors.lastname: Takeguchi
authors.forename: Ayako
authors.initials: A
authors.lastname: Hashimoto
authors.forename: Masayuki
authors.initials: M
authors.lastname: Shimojo
authors.forename: Kazutaka
authors.initials: K
authors.lastname: Mitsuishi
authors.forename: Kazuo
authors.initials: K
authors.lastname: Furuya
mesh_terms: D021621:Imaging, Three-Dimensional / Q000295:instrumentation / Q000379:methods*; D017348:Microscopy, Electron, Scanning Transmission / Q000295:instrumentation / Q000379:methods*