title: Advances in microfabricated mass spectrometers.
abstract: Mass filters for miniature mass spectrometers are now being constructed using three-dimensional microfabrication techniques. Crossed-field, travelling-wave, time-of-flight, quadrupole and cylindrical ion-trap filters have all been demonstrated, with steadily increasing mass range and mass resolution. This paper reviews the range of available devices and the state of the art.
authors.affiliation: EEE Department, Imperial College London, Exhibition Road, London, SW7 2AZ, UK. r.syms@imperial.ac.uk
authors.forename: R R A
authors.initials: RR
authors.lastname: Syms
mesh_terms: D004867:Equipment Design; D013058:Mass Spectrometry / Q000295:instrumentation*; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation*