title: Reconstruction of a one-dimensional surface from inverse transmission.
abstract: An optimization algorithm for the reconstruction of a surface profile is presented. This algorithm uses the far-field transmitted intensity to retrieve the surface profile of a thin film. We approach the inverse transmission problem as a constrained optimization problem. A mathematical representation of the surface based on B-spline curves and an optimum profile search with the self-adaptation evolutionary strategy (ES) are adopted. As the input data for the ES algorithm for surface inversion, the transmitted intensity has been measured by both a laser bidirectional reflectometer instrument and an in-line digital speckle camera system. The reconstructed 1D surfaces are compared with the profile measured by an atomic force microscope.
authors.affiliation: Surface Optics Corporation, San Diego, California 92127, USA.
authors.forename: Anting
authors.initials: A
authors.lastname: Wang
authors.forename: T A
authors.initials: TA
authors.lastname: Leskova
authors.forename: A A
authors.initials: AA
authors.lastname: Maradudin
authors.forename: Zu-Han
authors.initials: ZH
authors.lastname: Gu