Silane nanopatterns via gas-phase soft lithography.
de la Rica
Roberto
R
Departamento de Micro- y Nanosistemas, Instituto de Microelectrónica de Barcelona (CNM-IMB, CSIC), Campus UAB 08193, Bellaterra, Barcelona. roberto.delarica@gmail.com
Baldi
Antonio
A
Mendoza
Ernest
E
Paulo
Alvaro San
AS
Llobera
Andreu
A
Fernández-Sánchez
César
C
D004058:Diffusion; D004129:Dimethylpolysiloxanes; D005740:Gases; D018625:Microscopy, Atomic Force; D036103:Nanotechnology; D017646:Organosilicon Compounds; D011437:Propylamines; D012821:Silanes; D013499:Surface Properties
D004129:Dimethylpolysiloxanes; D005740:Gases; D017646:Organosilicon Compounds; D011437:Propylamines; D012821:Silanes; C088294:3-aminopropyltrimethoxysilane; C013830:baysilon; C102833:(3-mercaptopropyl)trimethoxysilane