Terahertz profilometry at 600 GHz with 0.5 microm depth resolution.
Characterization of the topography of materials by interferometry in the visible or near-IR wavelength regime becomes difficult or impossible if the surface is rough on the length scale of a tenth of the wavelength and more. In this case, THz radiation can provide an interesting alternative. We demonstrate heterodyne profilometry at 600 GHz as a method for the accurate determination of surface topography with an achievable expanded standard uncertainty of 0.5 mum.
Hils
Bernhard
B
Physikalisches Institut, Johann Wolfgang Goethe-Universität Frankfurt, Frankfurt am Main, Germany. hils@physik.uni-frankfurt.de
Thomson
Mark D
MD
Löffler
Torsten
T
von Spiegel
Wolff
W
am Weg
Christian
C
Roskos
Hartmut G
HG
de Maagt
Peter
P
Doyle
Dominic
D
Geckeler
Ralf D
RD
D007368:Interferometry / Q000379:methods*; D008422:Materials Testing / Q000379:methods*; D008872:Microwaves; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D013499:Surface Properties