title: Terahertz profilometry at 600 GHz with 0.5 microm depth resolution.
abstract: Characterization of the topography of materials by interferometry in the visible or near-IR wavelength regime becomes difficult or impossible if the surface is rough on the length scale of a tenth of the wavelength and more. In this case, THz radiation can provide an interesting alternative. We demonstrate heterodyne profilometry at 600 GHz as a method for the accurate determination of surface topography with an achievable expanded standard uncertainty of 0.5 mum.
authors.affiliation: Physikalisches Institut, Johann Wolfgang Goethe-Universität Frankfurt, Frankfurt am Main, Germany. hils@physik.uni-frankfurt.de
authors.forename: Bernhard
authors.initials: B
authors.lastname: Hils
authors.forename: Mark D
authors.initials: MD
authors.lastname: Thomson
authors.forename: Torsten
authors.initials: T
authors.lastname: Löffler
authors.forename: Wolff
authors.initials: W
authors.lastname: von Spiegel
authors.forename: Christian
authors.initials: C
authors.lastname: am Weg
authors.forename: Hartmut G
authors.initials: HG
authors.lastname: Roskos
authors.forename: Peter
authors.initials: P
authors.lastname: de Maagt
authors.forename: Dominic
authors.initials: D
authors.lastname: Doyle
authors.forename: Ralf D
authors.initials: RD
authors.lastname: Geckeler
mesh_terms: D007368:Interferometry / Q000379:methods*; D008422:Materials Testing / Q000379:methods*; D008872:Microwaves; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D013499:Surface Properties