title: X-ray analysis and mapping by wavelength dispersive X-ray spectroscopy in an electron microscope.
abstract: A compact and easy-to-use wavelength dispersive X-ray spectrometer using a multi-capillary X-ray lens attached to a scanning (transmission) electron microscope has been tested for thin-film analysis. B-K spectra from thin-film boron compounds (B4C, h-BN, and B2O3) samples showed prominent peak shifts and detailed structural differences. Mapping images of a thin W/Si double-layer sample resolved each element clearly. Additionally, a thin SiO2 film grown on a Si substrate was imaged with O-K X-rays. Energy and spatial resolution of the system is also discussed.
authors.affiliation: National Institute for Materials Science, 3-13 Sakura, Tsukuba, Ibaraki 305-0003, Japan. TANAKA.Miyoko@nims.go.jp
authors.forename: Miyoko
authors.initials: M
authors.lastname: Tanaka
authors.forename: Masaki
authors.initials: M
authors.lastname: Takeguchi
authors.forename: Kazuo
authors.initials: K
authors.lastname: Furuya