title: Variable incidence angle X-ray absorption fine structure spectroscopy: a zirconia film study.
abstract: Variable incidence angle X-ray absorption fine structure (VIAXAFS) spectroscopy offers a non-destructive ability to investigate film nano-structures. This technique was applied, spanning sample-beam angles from a grazing to normal incidence on a film obtained by zirconia sputtering on flat sample of stainless steel. X-ray absorption fine structure analysis on the Zr K edge identified chemical, defects and fractal structures through the film depth. VIAXAFS revealed occurrence of zirconium monoxide fractions at the surface a reduced state of zirconium oxide vs. the zirconium dioxide bulk. The discussion underlines that the technique may quantify the profile of various sub-layers, nano-pores, dislocations, vacancies or defect features.
authors.affiliation: LWV, Paul Scherrer Institut, 5232 Villigen-PSI, Switzerland. claude.degueldre@psi.ch
authors.forename: Claude
authors.initials: C
authors.lastname: Degueldre
authors.forename: Michael
authors.initials: M
authors.lastname: Kastoryano
authors.forename: Kathy
authors.initials: K
authors.lastname: Dardenne
mesh_terms: D000042:Absorption; D018360:Crystallography, X-Ray / Q000379:methods; D004867:Equipment Design; D015233:Models, Statistical; D053838:Scattering, Small Angle; D013052:Spectrometry, X-Ray Emission / Q000295:instrumentation / Q000379:methods*; D015040:Zirconium / Q000737:chemistry*
chemical_list: D015040:Zirconium; C028541:zirconium oxide