title: Simple and economical capacitive displacement system for UHV operation.
abstract: A parallel plate capacitor was assembled as a displacement transducer for operation in an UHV environment. The capacitive displacement system was linear over a 2.5 mum range with a resolution of 0.051 mum. Components in the electric circuit were common laboratory instruments.
authors.affiliation: Department of Materials Science and Engineering, Stanford University, Stanford, California 94305.
authors.forename: R
authors.initials: R
authors.lastname: Chow
authors.forename: W A
authors.initials: WA
authors.lastname: Tiller