title: Fabrication of one-dimensional programmable-height nanostructures via dynamic stencil deposition.
abstract: Dynamic stencil deposition (DSD) techniques offer a variety of fabrication advantages not possible with traditional lithographic processing, such as the ability to directly deposit nanostructures with programmable-height profiles. However, DSD systems have not enjoyed widespread usage due to their complexity. We demonstrate a simple, low-profile, portable, one-dimensional nanotranslation system that facilitates access to nanoscale DSD abilities. Furthermore we show a variety of fabricated programmable-height nanostructures, including parallel arrays of such structures, and suggest other applications that exploit the unique capabilities of DSD fabrication methods.
authors.affiliation: Johns Hopkins University, Baltimore, Maryland 21218, USA.
authors.forename: J L
authors.initials: JL
authors.lastname: Wasserman
authors.forename: K
authors.initials: K
authors.lastname: Lucas
authors.forename: S H
authors.initials: SH
authors.lastname: Lee
authors.forename: A
authors.initials: A
authors.lastname: Ashton
authors.forename: C T
authors.initials: CT
authors.lastname: Crowl
authors.forename: N
authors.initials: N
authors.lastname: Marković