title: Piezodriven 50-microm range stage with subnanometer resolution.
abstract: A micropositioning stage has been developed for use with optical and electron microscopes in the accurate measurement of fine lines used by the microelectronics industry and microscopic objects such as biological cells, air pollution particles, and asbestos fibers. The stage combines a piezoelectric driving element and flexure pivoted lever arms to achieve a compact, vacuum compatible device with a resolution of 0.001 microm or less over a range of 50 microm.
authors.affiliation: National Bureau of Standards, Washington, D. C. 20234, USA.
authors.forename: F E
authors.initials: FE
authors.lastname: Scire
authors.forename: E C
authors.initials: EC
authors.lastname: Teague