Fiber optic probe for thermal profiling of liquids during crystal growth.
The applicability of quartz opitcal fibers to the thermal characterization of liquid solutions and melts during crystal growth was demonstrated in a Ga-As solution at 800 degrees C. The measured response time and signal-to-noise ratio were 0.7 s and 71 dB, respectively. Fiber probes offer greater responsivity with less disturbance to fluid flow than conventional thermocouples with protective sheaths and are particularly suited for the investigation of semiconductor crystal growth.
Holmes
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Hughes Research Laboratories, Malibu, California 90265.