Thin film thickness monitor shutter.
This article describes a simple electronic dual-activated shutter which is designed to interface with the Sloan digital thickness monitor model DTM-200 or a set of double-pole double-throw switches which can be operated manually.
Bailey
W E
WE
Department of Physics, Texas Tech University, Lubbock, TX 79409, USA.
Hatfield
L L
LL
Marshall
B J
BJ
D003460:Crystallization / Q000295:instrumentation* / Q000379:methods; D004581:Electronics / Q000295:instrumentation*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008567:Membranes, Artificial
D008567:Membranes, Artificial