Characteristics of a multidipole ion source.
The properties of a steady-state, dc discharge multidipole ion source have been investigated. The plasma density in the source depends on the magnet geometries, the discharge voltage, and the bias voltage on the first extraction grid. Different schemes to reduce the loss of ions to the chamber wall are described. Hydrogen ion species in the extracted beam are studied by a mass analyzer.
Leung
K N
KN
Department of Physics, James Madison University, Harrisonburg, VA 22801, USA.
Collier
R D
RD
Marshall
L B
LB
Gallaher
T N
TN
Ingham
W H
WH
Kribel
R E
RE
Taylor
G R
GR