Computer controlled ESCA for nondestructive surface characterization utilizing a TV-type position sensitive detector.
A position sensitive detector system composed of a channel plate, a vidicon TV camera, and a computer is utilized for multichannel detection of ESCA spectra. It is demonstrated that the system achieves a marked improvement of measurement speed, S/N ratio, and sensitivity. The system also realized an improvement of spatial resolution while retaining energy resolution.
Kudo
M
M
Department of Industrial Chemistry, Faculty of Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, JapanInstitute of Industrial Science, University of Tokyo, 7-22-1, Roppongi, Minato-ku, Tokyo, JapanDepartment of Industrial Chemistry, Faculty of Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, Japan.
Nihei
Y
Y
Kamada
H
H