Image reduction to submicrometer dimensions by asymmetric crystal reflection of x rays.
An image-reduction method utilizing asymmetric Bragg reflection is demonstrated by 9.5-fold and 22.6-fold one-dimensional reductions of a 30 cell/mm gold mesh having a web width of 8mum. Applicability of the method to microphotolithography is suggested.
Mardix
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University of Rhode Island, Electrical Engineering Department, Kingston, Rhode Island 02881University of Bristol, H. H. Wills Physics Laboratory, Bristol BS8 1TL, England.
Lang
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