Microcomputer-based multiplexer for performing depth profiling with an Auger electron spectrometer.
A microcomputer-based instrument for the automated profiling of samples with an Auger electron spectrometer and Ion Gun is described. The instrument records the changing heights of spectral peaks as it controls spectrometer scanning over predefined windows. Interactive front panel controls are used to set up a run and control profiling operations. The generated data is stored on a magnetic disk for later analysis and plotting. Implementation of the device using an LSI-11 microcomputer and interfacing hardware is detailed, along with the characteristics of the fortran iv driving software. An exploration of future capabilities and applications of the multiplexer is also given.
Oppenheimer
J L
JL
University of California, Lawrence Livermore Laboratory, Livermore, California 94550.