Fabrication of one-dimensional programmable-height nanostructures via dynamic stencil deposition.
Dynamic stencil deposition (DSD) techniques offer a variety of fabrication advantages not possible with traditional lithographic processing, such as the ability to directly deposit nanostructures with programmable-height profiles. However, DSD systems have not enjoyed widespread usage due to their complexity. We demonstrate a simple, low-profile, portable, one-dimensional nanotranslation system that facilitates access to nanoscale DSD abilities. Furthermore we show a variety of fabricated programmable-height nanostructures, including parallel arrays of such structures, and suggest other applications that exploit the unique capabilities of DSD fabrication methods.
Wasserman
J L
JL
Johns Hopkins University, Baltimore, Maryland 21218, USA.
Lucas
K
K
Lee
S H
SH
Ashton
A
A
Crowl
C T
CT
Marković
N
N