Simple, high current, antimony ion source.
A simple metal ion source capable of producing a continuous, uncontaminated, high current beam of Sb ions is presented. It produced a total ion current of 200 muA at 1 kV extraction voltage. A discharge occurred in the source at a pressure of 6x10(-4) Torr. The ion current extracted from the source increased with the 3/2 power of the extraction voltage. The perveance of the source and ion density in the plasma were 8x10(-9) and 1.8x10(11) cm(-3), respectively.
Sugiura
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Ibaraki Electrical Communication Laboratory, Nippon Telegraph and Telephone Public Corporation, Tokai, Ibaraki-ken, 319-11, Japan.