Shadowing technique for reducing charge buildup in scanning Auger microanalysis.
Charge buildup on insulating specimens examined by the scanning Auger microprobe cannot be controlled by conventional surface metal coating techniques which hide the signal of interest. Instead, a simple TEM grid of appropriate geometry can be used as a mask during deposition to leave untouched select spots for analysis.
Shaffner
T J
TJ
Central Research Laboratory, Texas Instruments Incorporated, Dallas, TX 75265, USA.