Design and construction of an automatic thin film fabrication and simultaneous computer-controlled measurement equipment built in a cryostat.
The classical way of preparing thin films under one set of conditions and measurement of their properties under a different set of conditions produces large variations in film properties. A system has been designed which provides for measurements of many thin film parameters without removal from the deposition chamber. These parameters include thickness as well as film structural, electrical, and magnetic properties. Such an automatic film fabrication/measurement equipment is highly desirable for thin film research.
Chakupurakal
T
T
Department of Physics, University of Leuven, Leuven, Belgium.