SEM stroboscopy for the evaluation of IC operating functions in the subnanosecond range.
A stroboscopic system has been applied to the scanning electron microscope (SEM) which operates with an electrostatic deflection system permitting pulse rates up to the GHz region, a value obtained with a very small electrode gap of 100/mum. The deflection voltage was 50 mV for a SEM acceleration voltage of 2.5 kV. The efficiency and limitations of this system are theoretically treated. Such a stroboscopic system has been used for an initial determination of the time interval required for a binary operation of an inverter stage. A delay time of 820 ps was calculated and a time interval of 3.8 ns per binary operation was measured.
Hieke
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Forschungslaboratorien der Siemens AG, Hofmannstrasse 51, 8000 Munchen 70, West Germany.
Meusburger
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