title: Dry tin dioxide hollow microshells and extreme ultraviolet radiation induced by CO2 laser illumination.
abstract: Low-density tin dioxide (SnO2) is required for radiating monochromatic extreme ultraviolet (EUV) light with low debris and high conversion efficiency from a laser. In this paper, tin dioxide nanoparticle hollow microcapsules were successfully fabricated by a layer-by-layer template technique. The obtained capsules have a rougher surface (30 nm in rms) compared to the freshly prepared polyelectrolyte capsules. Based on the X-ray diffraction (XRD) results, the tin dioxide nanoparticles well maintained their size after they were assembled on the capsules' surfaces. In order to remove the polymer template, a heat treatment was introduced, and after the heat treatment the capsule sizes shrank about 71% (the average size was from 4.9 to 3.5 mum), and the obtained capsules maintained their round shape after water evaporation. The narrowest bandwidth at the 13.5 nm emission in the EUV region was observed when the capsules were irradiated by a CO2 laser with an intensity of 2.9 x 10(10) W/cm (2).
authors.affiliation: Institute of Laser Engineering, and Institute for Laser Technology, Osaka University, 2-6 Yamada-oka, Suita, Osaka, Japan.
authors.forename: Liqin
authors.initials: L
authors.lastname: Ge
authors.forename: Keiji
authors.initials: K
authors.lastname: Nagai
authors.forename: Zhongze
authors.initials: Z
authors.lastname: Gu
authors.forename: Yoshinori
authors.initials: Y
authors.lastname: Shimada
authors.forename: Hiroaki
authors.initials: H
authors.lastname: Nishimura
authors.forename: Noriaki
authors.initials: N
authors.lastname: Miyanaga
authors.forename: Yasukazu
authors.initials: Y
authors.lastname: Izawa
authors.forename: Kunioki
authors.initials: K
authors.lastname: Mima
authors.forename: Takayoshi
authors.initials: T
authors.lastname: Norimatsu
mesh_terms: D000327:Adsorption; D002245:Carbon Dioxide / Q000737:chemistry*; D004573:Electrolytes; D006358:Hot Temperature; D007834:Lasers; D018625:Microscopy, Atomic Force; D008855:Microscopy, Electron, Scanning; D008863:Microspheres; D015233:Models, Statistical; D053758:Nanoparticles / Q000737:chemistry; D013499:Surface Properties; D014001:Tin / Q000737:chemistry*; D017971:Tin Compounds / Q000737:chemistry*; D014466:Ultraviolet Rays; D014961:X-Ray Diffraction
chemical_list: D004573:Electrolytes; D017971:Tin Compounds; D002245:Carbon Dioxide; D014001:Tin; C045358:stannic oxide