Simple sensitive capacitance manometer for corrosive gas laser systems.
The design and performance of a capacitance manometer for use in corrosive gas laser environments is presented. This simple and inexpensive isolating device can be quickly fabricated in any machine shop, and permits the utilization of ordinary non-passivated pressure measurement apparatus or gauges in any gas system, irrespective of the corrosiveness.
Shammas
S
S
Department of Electrical Engineering, University of Alberta, Edmonton, Alberta, Canada, T6G 2G7.
Seguin
H J
HJ