Mass analyzer using electron-beam-guiding type ion source.
A mass analyzer having a scanning electron microscopy (SEM) mechanism and using electron beam bombardment vaporization ion source have been submitted. Secondary ions from the surface trapped in the potential well formed by the incident electron beam can be guided into the slit of mass analyzer through the center of Ta pipe cathode. Efficiency of the collected ions to the evaporated molecules and a qualitative mass analysis with a pressed block of powdered NaCl have been examined. When subsidiary electrodes added above efficiency showed 6.4x10(-4). A sample of 10-mm-thick NaCl has been analyzed along depth direction to the bottom with 0.02 mA at 5 kV in 16 min.
Kishi
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Department of Electronics, Faculty of Engineering, University of Osaka Pref. Sakai, Japan 591Department of Electronics, Faculty of Engineering, Kyoto University, Kyoto, Japan 680.
Yamada
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Takagi
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