title: Shadowing technique for reducing charge buildup in scanning Auger microanalysis.
abstract: Charge buildup on insulating specimens examined by the scanning Auger microprobe cannot be controlled by conventional surface metal coating techniques which hide the signal of interest. Instead, a simple TEM grid of appropriate geometry can be used as a mask during deposition to leave untouched select spots for analysis.
authors.affiliation: Central Research Laboratory, Texas Instruments Incorporated, Dallas, TX 75265, USA.
authors.forename: T J
authors.initials: TJ
authors.lastname: Shaffner