Photochemical modification and patterning of SU-8 using anthraquinone photolinkers.
Bioactive protein patterns and microarrays achieved by selective localization of biomolecules find various applications in biosensors, bio-microelectromechanical systems (bio-MEMS), and in basic protein studies. In this paper we describe simple photochemical methods to fabricate two-dimensional patterns on a Novolac A derivative polymer (SU-8) and, subsequently, their functionalization with biomolecules. Anthraquinone (AQ) derivatives are used to chemically modify and pattern SU-8 surfaces. Features as small as 20 mum are obtained when using uncollimated light. The X-Y spatial resolution of micropatterned AQ molecules is improved to 1.5 mum when a collimated light source is used. This micropatterning process will be important for the functionalization of MEMS-based biosensors. The method saves several processing steps and can be integrated in cleanroom fabrication thus avoiding contamination of the sensor surfaces.
Blagoi
Gabriela
G
Department of Micro and Nanotechnology, Technical University of Denmark, DTU Nanotech, Kongens Lyngby, Denmark. Gabriela.Blagoi@nanotech.dtu.dk
Keller
Stephan
S
Persson
Fredrik
F
Boisen
Anja
A
Jakobsen
Mogens Havsteen
MH
D000327:Adsorption; D000880:Anthraquinones / Q000494:pharmacology*; D015374:Biosensing Techniques; D004396:Coloring Agents / Q000494:pharmacology*; D003432:Cross-Linking Reagents / Q000494:pharmacology; D004852:Epoxy Compounds / Q000737:chemistry / Q000494:pharmacology*; D008027:Light; D008956:Models, Chemical; D010777:Photochemistry / Q000379:methods*; D011108:Polymers / Q000737:chemistry / Q000494:pharmacology*; D040081:Protein Array Analysis / Q000379:methods*; D011506:Proteins / Q000737:chemistry; D013050:Spectrometry, Fluorescence / Q000379:methods; D013499:Surface Properties; D013997:Time Factors
D000880:Anthraquinones; D004396:Coloring Agents; D003432:Cross-Linking Reagents; D004852:Epoxy Compounds; D011108:Polymers; D011506:Proteins; C520895:SU-8 compound