Measurement method of aberration from Ronchigram by autocorrelation function.
Aberrations up to the fifth-order were successfully measured using an autocorrelation function of the segmental areas of a Ronchigram. The method applied to aberration measurement in a newly developed 300kV microscope that is equipped with a spherical aberration corrector for probe-forming systems. The experimental Ronchigram agreed well with the simulated Ronchigram that was calculated by using the measured aberrations. The Ronchigram had an infinite magnification area with a half-angle of 50mrad, corresponding to the convergence angle of a uniform phase.
Sawada
H
H
CREST, Japan Science and Technology Agency, 4-1-8 Honcho, Kawaguchi, Saitama 332-0012, Japan. hsawada@jeol.co.jp
Sannomiya
T
T
Hosokawa
F
F
Nakamichi
T
T
Kaneyama
T
T
Tomita
T
T
Kondo
Y
Y
Tanaka
T
T
Oshima
Y
Y
Tanishiro
Y
Y
Takayanagi
K
K