A new scanning heterodyne interferometer scheme for mapping both surface structure and effective local reflection coefficient.
A new scanning microscope scheme which can map both phase and amplitude change of the probe beam is introduced. We will show that the true surface structure can be imaged by using the results of phase measurements while the amplitude image represents the map of the magnitude of the effective local reflection coefficient (ELRC). Relation between the surface structure and the ELRC is discussed. Spatial resolution is 0.67 microm which is limited by diffraction and the precision for measuring point-to-point variation of the average height of the surface structure is a few nanometers. Potential of this microscopy on surface diagnostics is discussed.
Kwon
Kang Hyuck
KH
Department of Physics, Sogang University, Mapo-Gu, Seoul, Korea.
Kim
Bong Soo
BS
Cho
Kyuman
K
D004867:Equipment Design; D019544:Equipment Failure Analysis; D007089:Image Enhancement / Q000295:instrumentation*; D007368:Interferometry / Q000295:instrumentation*; D018613:Microscopy, Confocal / Q000295:instrumentation*; D013499:Surface Properties