title: Measurement method of aberration from Ronchigram by autocorrelation function.
abstract: Aberrations up to the fifth-order were successfully measured using an autocorrelation function of the segmental areas of a Ronchigram. The method applied to aberration measurement in a newly developed 300kV microscope that is equipped with a spherical aberration corrector for probe-forming systems. The experimental Ronchigram agreed well with the simulated Ronchigram that was calculated by using the measured aberrations. The Ronchigram had an infinite magnification area with a half-angle of 50mrad, corresponding to the convergence angle of a uniform phase.
authors: CREST, Japan Science and Technology Agency, 4-1-8 Honcho, Kawaguchi, Saitama 332-0012, Japan. hsawada@jeol.co.jp
authors: H
authors: H
authors: Sawada
authors: T
authors: T
authors: Sannomiya
authors: F
authors: F
authors: Hosokawa
authors: T
authors: T
authors: Nakamichi
authors: T
authors: T
authors: Kaneyama
authors: T
authors: T
authors: Tomita
authors: Y
authors: Y
authors: Kondo
authors: T
authors: T
authors: Tanaka
authors: Y
authors: Y
authors: Oshima
authors: Y
authors: Y
authors: Tanishiro
authors: K
authors: K
authors: Takayanagi