title: Through-focus scanning-optical-microscope imaging method for nanoscale dimensional analysis.
abstract: We present a novel optical technique that produces nanometer dimensional measurement sensitivity using a conventional bright-field optical microscope, by analyzing through-focus scanning-optical-microscope images obtained at different focus positions. In principle, this technique can be used to identify which dimension is changing between two nanosized targets and to determine the dimension using a library-matching method. This methodology has potential utility for a wide range of target geometries and application areas, including nanometrology, nanomanufacturing, semiconductor process control, and biotechnology.
authors.affiliation: National Institute of Standards and Technology, Gaithersburg, MD 20899, USA. ravikiran.attota@nist.gov
authors.forename: Ravikiran
authors.initials: R
authors.lastname: Attota
authors.forename: Thomas A
authors.initials: TA
authors.lastname: Germer
authors.forename: Richard M
authors.initials: RM
authors.lastname: Silver