Large-core single-mode rib SU8 waveguide using solvent-assisted microcontact molding.
This paper describes a novel fabrication technique for constructing a polymer-based large-core single-mode rib waveguide. A negative tone SU8 photoresist with a high optical transmission over a large wavelength range and stable mechanical properties was used as a waveguide material. A waveguide was constructed by using a polydimethylsiloxane stamp combined with a solvent-assisted microcontact molding technique. The effects on the final pattern's geometry of four different process conditions were investigated. Optical simulations were performed using beam propagation method software. Single-mode beam propagation was observed at the output of the simulated waveguide as well as the actual waveguide through the microscope image.
Huang
Cheng-Sheng
CS
1Department of Mechanical Engineering, University of Washington, Seattle, Washington 98195-2600, USA.
Wang
Wei-Chih
WC