Through-focus scanning-optical-microscope imaging method for nanoscale dimensional analysis.
We present a novel optical technique that produces nanometer dimensional measurement sensitivity using a conventional bright-field optical microscope, by analyzing through-focus scanning-optical-microscope images obtained at different focus positions. In principle, this technique can be used to identify which dimension is changing between two nanosized targets and to determine the dimension using a library-matching method. This methodology has potential utility for a wide range of target geometries and application areas, including nanometrology, nanomanufacturing, semiconductor process control, and biotechnology.
Attota
Ravikiran
R
National Institute of Standards and Technology, Gaithersburg, MD 20899, USA. ravikiran.attota@nist.gov
Germer
Thomas A
TA
Silver
Richard M
RM