title: Novel poly-silicon nanowire field effect transistor for biosensing application.
abstract: A simple and low-cost method to fabricate poly-silicon nanowire field effect transistor (poly-Si NW FET) for biosensing application was demonstrated. The poly-silicon nanowire (poly-Si NW) channel was fabricated by employing the poly-silicon (poly-Si) sidewall spacer technique, which approach was comparable with current commercial semiconductor process and forsaken expensive E-beam lithography tools. The electronic properties of the poly-Si NW FET in aqueous solution were found to be similar to those of single-crystal silicon nanowire field effect transistors reported in the literature. A model biotin and avidin/streptavidin sensing system was used to demonstrate the biosensing capacity of poly-Si NW FET. The changes of I(D)-V(G) curves were consistent with an n-type FET affected by a nearby negatively (streptavidin) and positively (avidin) charged molecules, respectively. Specific electric changes were observed for streptavidin and avidin sensing when nanowire surface of poly-Si NW FET was modified with biotin and streptavidin at sub pM to nM range could be distinguished. With its excellent electric properties and the potential for mass commercial production, poly-Si NW FET can be a very useful transducer for a variety of biosensing applications.
authors.affiliation: Institute of Biological Science and Technology, National Chiao Tung University, Hsinchu 300, Taiwan.
authors.forename: Cheng-Yun
authors.initials: CY
authors.lastname: Hsiao
authors.forename: Chih-Heng
authors.initials: CH
authors.lastname: Lin
authors.forename: Cheng-Hsiung
authors.initials: CH
authors.lastname: Hung
authors.forename: Chun-Jung
authors.initials: CJ
authors.lastname: Su
authors.forename: Yen-Ren
authors.initials: YR
authors.lastname: Lo
authors.forename: Cheng-Che
authors.initials: CC
authors.lastname: Lee
authors.forename: Horng-Chin
authors.initials: HC
authors.lastname: Lin
authors.forename: Fu-Hsiang
authors.initials: FH
authors.lastname: Ko
authors.forename: Tiao-Yuan
authors.initials: TY
authors.lastname: Huang
authors.forename: Yuh-Shyong
authors.initials: YS
authors.lastname: Yang