Modeling, fabrication, and characterization of tungsten silicide wire-grid polarizer in infrared region.
We designed and fabricated a tungsten silicide wire-grid polarizer. To examine its polarization characteristics, the transmission spectra of the polarizer were simulated using the effective medium theory. The polarizer was fabricated based on the simulation results. The transverse magnetic (TM) polarization transmittance of the fabricated polarizer was greater than 50% over the 5 mum wavelength, and the ratio of TM and transverse electric transmittance was greater than 100 (20 dB) in the infrared range. This fabricated polarizer has higher durability and better compatibility with microfabrication processes than conventional infrared polarizers.
Yamada
Itsunari
I
National Institute of Advanced Industrial Science and Technology, Midorigaoka, Ikeda, Osaka 563-8577, Japan. itsunari.yamada@aist.go.jp
Nishii
Junji
J
Saito
Mitsunori
M