Superlens nano-patterning technology based on the distributed polystyrene spheres.
Based on surface plasmon resonant enhancement, a method to realize photolithography beyond diffraction limit by using polystyrene spheres (PSs) self-assembled on silver slab was proposed in this paper. The optimum parameters for PS with different diameters were presented. In order to verify this method, numerical simulation on a typical configuration with 1.5 microm diameter of PS was carried out by using the finite-difference time-domain (FDTD) method, and the minimum feature size of 88 nm beyond diffraction limit at 365 nm working wavelength was obtained.
Li
Shuhong
S
State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China.
Du
Chunlei
C
Dong
Xiaochun
X
Shi
Lifang
L
Luo
Xiangang
X
Wei
Xingzhan
X
Zhang
Yudong
Y
D003198:Computer Simulation; D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007909:Lenses; D008962:Models, Theoretical; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure; D036103:Nanotechnology / Q000295:instrumentation* / Q000379:methods; D010316:Particle Size; D011137:Polystyrenes / Q000737:chemistry*; D020349:Surface Plasmon Resonance / Q000295:instrumentation*
D011137:Polystyrenes