title: A wavelength-selective add-drop switch using silicon microring resonator with a submicron-comb electrostatic actuator.
abstract: Electrostatic comb-drive micro actuator with submicron comb fingers was connected to silicon microring resonator to consist a wavelength-selective add-drop switch at 1.5 microm wavelength with variable coupling mechanism. A 500 nm wide 260 nm thick 63.4 microm long silicon microring waveguide was suspended in air with low-loss suspension arms. The air gap between the microring and the input/output waveguides was adjusted by the voltage applied to the comb actuator to vary the coupling efficiency. Transmittance from the input port to a drop port was varied 32.9dB by applying the voltages from 0V to 28.2V. At 28.2V, transmittance from the input port to a through port decreased by 7.83 dB from that at 0V, and 55% of the intensity was transmitted to the drop port. The full-width-half-maximum bandwidth of the dropped light was 0.5 nm, corresponding to a Q-value of 3150.
authors.affiliation: Department of Nanomechanics, Tohoku University, Sendai 980-8579, Japan.
authors.forename: Kazunori
authors.initials: K
authors.lastname: Takahashi
authors.forename: Yoshiaki
authors.initials: Y
authors.lastname: Kanamori
authors.forename: Yasuo
authors.initials: Y
authors.lastname: Kokubun
authors.forename: Kazuhiro
authors.initials: K
authors.lastname: Hane
mesh_terms: D004581:Electronics / Q000295:instrumentation*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D005374:Filtration / Q000295:instrumentation*; D008027:Light; D008904:Miniaturization; D036103:Nanotechnology / Q000295:instrumentation*; D055095:Optics and Photonics / Q000295:instrumentation*; D055672:Static Electricity; D014159:Transducers