title: Soft X-ray holographic grating beam splitter including a double frequency grating for interferometer pre-alignment.
abstract: Grating beam splitters have been fabricated for soft X-ray Mach- Zehnder interferometer using holographic interference lithography. The grating beam splitter consists of two gratings, one works at X-ray laser wavelength of 13.9 nm with the spatial frequency of 1000 lines/mm as the operation grating, the other works at visible wavelength of 632.8 nm for pre-aligning the X-ray interferometer with the spatial frequency of 22 lines/mm as the pre-alignment grating. The two gratings lie vertically on the same substrate. The main feature of the beam splitter is the use of low-spatial- frequency beat grating of a holographic double frequency grating as the pre-alignment grating of the X-ray interferometer. The grating line parallelism between the two gratings can be judged by observing the diffraction patterns of the pre-alignment grating directly.
authors.affiliation: National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, People's Republic of China. liuychch@ustc.edu.cn
authors.forename: Ying
authors.initials: Y
authors.lastname: Liu
authors.forename: Xin
authors.initials: X
authors.lastname: Tan
authors.forename: Zhengkun
authors.initials: Z
authors.lastname: Liu
authors.forename: Xiangdong
authors.initials: X
authors.lastname: Xu
authors.forename: Yilin
authors.initials: Y
authors.lastname: Hong
authors.forename: Shaojun
authors.initials: S
authors.lastname: Fu
mesh_terms: D003198:Computer Simulation; D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D006696:Holography / Q000295:instrumentation*; D007368:Interferometry / Q000295:instrumentation*; D008962:Models, Theoretical; D012031:Refractometry / Q000295:instrumentation*; D014961:X-Ray Diffraction / Q000295:instrumentation* / Q000379:methods