title: Compact and low-loss bent hollow waveguides with distributed Bragg reflector.
abstract: In this study, a hollow bent waveguide with distributed Bragg reflectors (DBR) in silicon substrate was presented theoretically and experimentally. We used the two-dimensional finite-difference time-domain method to simulate bending transmission efficiencies for arc- and cut-type 90 degrees -bent waveguides. The air core was embedded by Si(3)N(4)/SiO(2) multilayer. The multilayer stacks were deposited by using plasma-enhanced chemical vapor deposition on the top and bottom of air core. The lowest 90 degree bending loss is around 3.9dB for the arc-type bending waveguides and 0.8dB for cut-type bending waveguides, respectively. This waveguide demonstrates a possibility for higher density of integration in planar light wave circuits.
authors.affiliation: Department of Optics and Photonics, National Central University, Jhong-Li 320, Taiwan.
authors.forename: Hua-Kung
authors.initials: HK
authors.lastname: Chiu
authors.forename: Fu-Li
authors.initials: FL
authors.lastname: Hsiao
authors.forename: Chia-Hua
authors.initials: CH
authors.lastname: Chan
authors.forename: Chii-Chang
authors.initials: CC
authors.lastname: Chen
mesh_terms: D003198:Computer Simulation; D017076:Computer-Aided Design; D004735:Energy Transfer; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008904:Miniaturization; D008962:Models, Theoretical; D055095:Optics and Photonics / Q000295:instrumentation*; D012031:Refractometry / Q000295:instrumentation*; D012825:Silicon / Q000737:chemistry*
chemical_list: D012825:Silicon