Determination of optical parameters of very thin (lambda/50) films.
A straightforward approach for estimation of thickness (d), real (epsilon(1)) and imaginary parts (epsilon(2)) of the complex permittivity of very thin films from spectrophotometric measurements is presented. The uncertainties in epsilon(1), epsilon(2), and d due to methodical error and the uncertainties in the measured quantities are investigated. It is shown that the influence of these factors is considerable when epsilon(1), epsilon(2), and d are obtained simultaneously for each wavelength. The accuracy of epsilon(1), epsilon(2), and d is significantly increased if the value of d is evaluated first, its value is kept constant over the whole spectral region, and then epsilon(1) and epsilon(2) are calculated for each wavelength.
Gushterova
Petya
P
Central Laboratory for Optical Storage and Processing of Information, Bulgarian Academy of Sciences, Acad. G. Bontchev Street, Building 101, P.O. Box 95, 1113 Sofia, Bulgaria. pgushterova@dir.bg
Sharlandjiev
Peter
P
Hristov
Boian
B