Ion implanted optical channel waveguides in Er3+/MgO co-doped near stoichiometric LiNbO3: a new candidate for active integrated photonic devices operating at 1.5 microm.
We report on the fabrication of active optical channel waveguides in Er(3+)/MgO co-doped near stoichiometric lithium niobate crystals by means of selective low-dose oxygen ion implantation through a specially designed photoresist stripe mask. After post-implantation treatment at 260 degrees C for 1 h, the channel waveguides possess a propagation loss of approximately 1.7 dB/cm. The micro-luminescence investigation reveals that fluorescence emissions at approximately 1.5 microm in the waveguides are well preserved with respect to the bulk, exhibiting possible applications for integrated active photonic devices.
Chen
Feng
F
School of Physics, Shandong University, Jinan, 250100, China. drfchen@sdu.edu.cn
Tan
Yang
Y
Ródenas
Airán
A
D000465:Algorithms; D004867:Equipment Design; D004871:Erbium / Q000737:chemistry*; D007477:Ions; D008027:Light; D008277:Magnesium Oxide / Q000737:chemistry*; D018613:Microscopy, Confocal; D008962:Models, Theoretical; D009556:Niobium / Q000737:chemistry*; D010087:Oxides / Q000737:chemistry*; D010100:Oxygen; D010777:Photochemistry / Q000379:methods; D017785:Photons; D013050:Spectrometry, Fluorescence / Q000379:methods; D013696:Temperature; D013997:Time Factors
D007477:Ions; D010087:Oxides; D009556:Niobium; C091692:lithium niobate; D008277:Magnesium Oxide; D004871:Erbium; D010100:Oxygen