title: Electro-optic integration of embedded electrodes and waveguides in LiNbO3 using a femtosecond laser.
abstract: We describe the fabrication of a Mach-Zehnder optical modulator in LiNbO(3) by femtosecond laser micromachining, which is composed of optical waveguides inscripted by a femtosecond laser and embedded microelectrodes subsequently fabricated using femtosecond laser ablation and selective electroless plating. A half-wave voltage close to 19 V is achieved at a wavelength of 632.8 nm with an interaction length of 2.6 mm. This simple and cost-effective technique opens up new opportunities for fabricating integrated electro-optic devices.
authors.affiliation: State Key Laboratory of High Field Laser Physics, Shanghai Instiute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, China.
authors.forename: Yang
authors.initials: Y
authors.lastname: Liao
authors.forename: Jian
authors.initials: J
authors.lastname: Xu
authors.forename: Ya
authors.initials: Y
authors.lastname: Cheng
authors.forename: Zenghui
authors.initials: Z
authors.lastname: Zhou
authors.forename: Fei
authors.initials: F
authors.lastname: He
authors.forename: Haiyi
authors.initials: H
authors.lastname: Sun
authors.forename: Juan
authors.initials: J
authors.lastname: Song
authors.forename: Xinshun
authors.initials: X
authors.lastname: Wang
authors.forename: Zhizhan
authors.initials: Z
authors.lastname: Xu
authors.forename: Koji
authors.initials: K
authors.lastname: Sugioka
authors.forename: Katsumi
authors.initials: K
authors.lastname: Midorikawa