Biomimetic subwavelength antireflective gratings on GaAs.
We have developed a simple and scalable bottom-up approach for fabricating moth-eye antireflective coatings on GaAs substrates. Monolayer, non-close-packed silica colloidal crystals are created on crystalline GaAs wafers by a spin-coating-based single-layer reduction technique. These colloidal monolayers can be used as etching masks during a BCl(3) dry-etch process to generate subwavelength-structured antireflective gratings directly on GaAs substrates. The gratings exhibit excellent broadband antireflective properties, and the specular reflection matches with the theoretical prediction using a rigorous coupled-wave analysis model. These bioinspired antireflection coatings have important technological applications ranging from efficient solar cells to IR detectors.
Sun
Chih-Hung
CH
Department of Chemical Engineering, University of Florida, Gainesville, FL 32611, USA.
Ho
Brian J
BJ
Jiang
Bin
B
Jiang
Peng
P
D000818:Animals; D001152:Arsenicals / Q000737:chemistry*; D040761:Biomimetic Materials / Q000737:chemistry*; D032701:Biomimetics / Q000295:instrumentation* / Q000379:methods; D003315:Cornea / Q000737:chemistry*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D005708:Gallium / Q000737:chemistry*; D008027:Light; D009036:Moths / Q000737:chemistry*; D012031:Refractometry / Q000295:instrumentation* / Q000379:methods; D012542:Scattering, Radiation
D001152:Arsenicals; C043055:gallium arsenide; D005708:Gallium