title: Estimation of the thickness and the optical parameters of several stacked thin films using optimization.
abstract: The reverse engineering problem addressed in the present research consists of estimating the thicknesses and the optical constants of two thin films deposited on a transparent substrate using only transmittance data through the whole stack. No functional dispersion relation assumptions are made on the complex refractive index. Instead, minimal physical constraints are employed, as in previous works of some of the authors where only one film was considered in the retrieval algorithm. To our knowledge this is the first report on the retrieval of the optical constants and the thickness of multiple film structures using only transmittance data that does not make use of dispersion relations. The same methodology may be used if the available data correspond to normal reflectance. The software used in this work is freely available through the PUMA Project web page (http://www.ime.usp.br/~egbirgin/puma/).
authors.affiliation: Department of Computer Science IME-USP, University of São Paulo, Rua do Matão 1010, Cidade Universitária, 05508-090, São Paulo SP, Brazil. randrade@ime.usp.br
authors.forename: Ricardo
authors.initials: R
authors.lastname: Andrade
authors.forename: Ernesto G
authors.initials: EG
authors.lastname: Birgin
authors.forename: Ivan
authors.initials: I
authors.lastname: Chambouleyron
authors.forename: José Mario
authors.initials: JM
authors.lastname: Martínez
authors.forename: Sergio D
authors.initials: SD
authors.lastname: Ventura