title: Short-wavelength MEMS-tunable VCSELs.
abstract: We present electrically-injected MEMS-tunable vertical-cavity surface-emitting lasers with emission wavelengths below 800 nm. Operation in this wavelength range, near the oxygen A-band from 760-780 nm, is attractive for absorption-based optical gas sensing. These fully-monolithic devices are based on an oxide-aperture AlGaAs epitaxial structure and incorporate a suspended dielectric Bragg mirror for wavelength tuning. By implementing electrostatic actuation, we demonstrate the potential for tuning rates up to 1 MHz, as well as a wide wavelength tuning range of 30 nm (767-737 nm).
authors.affiliation: Center for Micro- and Nanotechnologies, Lawrence Livermore National Laboratory, Livermore, CA 94550, USA. cole35@llnl.gov
authors.forename: Garrett D
authors.initials: GD
authors.lastname: Cole
authors.forename: Elaine
authors.initials: E
authors.lastname: Behymer
authors.forename: Tiziana C
authors.initials: TC
authors.lastname: Bond
authors.forename: Lynford L
authors.initials: LL
authors.lastname: Goddard
mesh_terms: D004563:Electrochemistry / Q000379:methods; D004867:Equipment Design; D005740:Gases; D007834:Lasers; D019563:Mechanics; D055095:Optics and Photonics; D013057:Spectrum Analysis / Q000295:instrumentation* / Q000379:methods; D055672:Static Electricity; D013499:Surface Properties
chemical_list: D005740:Gases