Synthesis of 3D pore mesostructured silica films by vapor infiltration of tetraethoxysilane.
Nonionic alkyl poly(oxyethylene) surfactants (Brij 56) films on a silicon substrate were treated with a tetraethoxysilane (TEOS) vapor. Mesostructured silica films were formed through a nano-phase transition under the infiltration of TEOS into the surfactant films. It was found that the calcined film had a 3D pore structure from the field emission scanning electron microscope (FE-SEM) observations in a different orientation. Grazing angle of incidence small angle X-ray scattering (GISAXS) measurement results showed that the symmetry of the film was an Fmmm space group oriented with the (010) plane parallel to the surface. The ordered structure of the films showed higher thermal stability than the films prepared by a conventional solvent-evaporation method.
Maruo
Takanori
T
Division of Chemical Engineering, Graduate School of Engineering Science, Osaka University, 1-3 Machikaneyama, Toyonaka, Osaka, Japan.
Nagata
Kaori
K
Nishiyama
Norikazu
N
Egashira
Yasuyuki
Y
Ueyama
Korekazu
K