Short-wavelength MEMS-tunable VCSELs.
We present electrically-injected MEMS-tunable vertical-cavity surface-emitting lasers with emission wavelengths below 800 nm. Operation in this wavelength range, near the oxygen A-band from 760-780 nm, is attractive for absorption-based optical gas sensing. These fully-monolithic devices are based on an oxide-aperture AlGaAs epitaxial structure and incorporate a suspended dielectric Bragg mirror for wavelength tuning. By implementing electrostatic actuation, we demonstrate the potential for tuning rates up to 1 MHz, as well as a wide wavelength tuning range of 30 nm (767-737 nm).
Cole
Garrett D
GD
Center for Micro- and Nanotechnologies, Lawrence Livermore National Laboratory, Livermore, CA 94550, USA. cole35@llnl.gov
Behymer
Elaine
E
Bond
Tiziana C
TC
Goddard
Lynford L
LL
D004563:Electrochemistry / Q000379:methods; D004867:Equipment Design; D005740:Gases; D007834:Lasers; D019563:Mechanics; D055095:Optics and Photonics; D013057:Spectrum Analysis / Q000295:instrumentation* / Q000379:methods; D055672:Static Electricity; D013499:Surface Properties
D005740:Gases